SevenStar CS200-F MFC Скачать руководство пользователя | Manualshive

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30

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附

录Ⅰ 产品序号描述

CS200

标

标

标准

准

准订

订

订单

单

单的

的

的填

填

填写

写

写格

格

格式

式

式

CS200

[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d]

[t] –

类号

-

[ F]

截止阀一体化

MFC(0

～

5V )

[g,g,g] –

使用气体

依照标准

SEMI52-0302(

注：

029

氨气不适用

)

-[ 013 ] N

2

-[ 000 ]

混合气体详见

[d]

[v] –

调节阀配置

- [ O]

常开调节阀

- [ C]

常闭调节阀

- [ N]

无阀

[r,r,r,r] –

满量程流量

- [ 005C]  5SCCM
- [ 010C]  10SCCM
- [ 020C]  20SCCM
- [ 030C]  30SCCM
- [ 050C]  50SCCM
- [ 100C]    100SCCM
- [ 200C]  200SCCM
- [ 300C]  300SCCM
- [ 500C]  500SCCM
- [ 001L]  1SLM
- [ 002L]  2SLM
- [ 003L]  3SLM
- [ 005L]  5SLM
- [ 010L]  10SLM
- [ 020L]  20SLM
- [ 030L]  30SLM
- [ 050L]  50SLM

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Содержание CS200-F MFC

Страница 1: ...REV 2 4 CS 200 F 2015 12...

Страница 2: ...19 1 6 1 5 3 9 19 1 6 2 5 3 10 20 1 6 3 5 3 11 LED 20 2 1 6 4 1 20 2 2 6 4 2 21 2 3 6 4 2 1 21 2 3 1 6 4 2 2 21 2 3 2 11 2 3 2 1 1 4 VCR 11 5 1 21 2 3 2 2 12 5 2 21 2 4 12 2 4 1 12 6 1 23 2 4 2 13 6 2...

Страница 3: ...1 30 1 1...

Страница 4: ...2 30 1 2 CS 1 3 a b c d e f g h...

Страница 5: ...3 30 i j k 1 4 MFC MFM CVD CS200 F MFC MFM 0 5V 4 20mA 8 16 VDC 14 28 VDC Digital MFC CS200 F MFC MAC 32 RS485 19200 0 5V CS MFC...

Страница 6: ...1 sec 0 05 0 35MPa 10SLM 0 1 0 35MPa 10SLM 30SLM 0 2 0 45MPa 30SLM 50SLM 0 05 F S 0 1 F S 30SLM 0 2 F S 30SLM 1MPa 1 10 10 Pa m3 sec He 5 45 RS485 DeviceNet ProfiBus 0 5 VDC 4 20 mA RS485 DeviceNet P...

Страница 7: ...N2 SCCM SLM 273 15K 0 101325 Pa 760mm Hg F S Full Scale S P Set Piont 1 6 CS200 F MFC MFM 1 6 1 SCCM SLM 0 C 273 15K 101325Pa 760mm Hg MFC MFM 1 6 2 CS200 F MFC MFM 22 2 100 1000 1 6 3 CS200 F MFC MF...

Страница 8: ...2 1 2 2 CS200 F MFC MFM 2 3 2 3 1 CS200 F 2 1 2 2 2 3 2 4 Compression Fitting 3 Compression Fitting 6 Compression Fitting1 8 Compression Fitting1 4 Compression Fitting3 8 VCR1 4 1 5 C 1 5 W L 2 1 MFC...

Страница 9: ...7 30 2 1 CS200 F...

Страница 10: ...8 30 2 2...

Страница 11: ...9 30 2 3...

Страница 12: ...10 30 2 4...

Страница 13: ...11 30 3 8 6 10 1 4 3 1 8 VCR1 4 VCO1 4 L 157 8 169 2 1 2 2 2 4 132mm 50mm 2 3 2 2 3 2 1 1 4 VCR VCR VCR VCR 1 4 VCR 2 5 2 6 VCR VCR 1 8 1 4 2 5 VCR VCR 2 6 VCR VCR...

Страница 14: ...12 30 2 3 2 2 2 7 1 25 2 7 2 7 1 25 2 4 2 4 1 CS200 F 8 16V DC 14 28V DC 24VDC CS200 F D DeviceNet ProfiBus D 9 15 9 SEMI 0 5V 15 0 5V 4 20mA...

Страница 15: ...DeviceNet ProfiBus RS485 2 4 2 2 8 2 9 2 10 2 11 2 12 2 13 14 15 CS200 F 9 D 15 D RS485 DeviceNet ProfiBus DP 9 D ProfiBus 15 D CS200 F CS200 F CS200 F 0 5V 4 20mA 2 8 pin1 pin6 2 9 pin1 pin7 pin8 pi...

Страница 16: ...14 30 2 10 RS485 2 11 DeviceNet 2 12 2 13 2 14 ProfiBus DP 2 15 ProfiBus 15 D...

Страница 17: ...D08 1 2 4 2F 3F 4F D08 1F 1FM 1FS 8C 8CM 1G 1GM 15V 24V USB MFC DB15 QCX 19 QCX P19 QCX 48 QCX 17 QCX P17 QCX 46 QCX 41 QCX 43 QCX 34 QCX 50 MFC DB9 QCX 20 QCX P20 QCX 49 QCX 18 QCX P18 QCX 47 QCX 42...

Страница 18: ...16 30 2 17 CS 2 18 CS...

Страница 19: ...17 30 2 19 CS RS485...

Страница 20: ...18 30 2 5 2 5 1 2 5 2 2 5 3 MFC MFM 2 5 4 2 5 5 20 2 5 6 2 5 7 3 1 CS200 F 3 2 CS200 F 0 5V 4 20mA 0 5V 4 20mA CS MFC 3 3 LED LED ProfiBus 3 4...

Страница 21: ...49 MFC 100ms 3 6 CS200 F MFC CS MFC 3 7 CS200 F MFC MFC MFC 3 8 CS200 F MFC MFC MFC 0 3 1 1 100SCCM MFC 30SCCM 110SCCM SCCM MFC CS200 F Target Null Value MFC MFM F S Target Null Value 20 F S MFC MFM...

Страница 22: ...FM 3000 SCC CS MFC 3 10 CS200 F MFC MFM EEPROM MFC MFM LED MFC MFM LED CS MFC 3 11 LED CS200 F 485 1 LED MFC MFM MFC MFC MFM CS200 F DeviceNet 2 LED CS200MFC CS220 _DnetSpecification_V1 01 CS200 F Pro...

Страница 23: ...21 30 4 1 3 4 1 2 4 2 4 2 1 4 2 2 MFC MFC 1 F S 5 1 5 1 1 5 1 2 D 5 1 3...

Страница 24: ...22 30 5 2 1 2 MFC MFC MFC 3 MFC MFM MFC MFM MFC MFM...

Страница 25: ...23 30 6 1 6 2 MFC MFM 6 2 1 6 2 2 6 2 3 20 6 2 4 MFC MFM 6 2 5 MFC MFC MFM MFC MFM 6 2 6...

Страница 26: ...24 30 a MFC MFM b 3MPa MFC 1 3 MFC 1 3 c MFC d VCR e f MFC MFM MFC MFC 6 3 http mfc sevenstar com cn 6 4 1 2 3 4 5 MFC...

Страница 27: ...FC 0 5V g g g SEMI52 0302 029 013 N2 000 d v O C N r r r r 005C 5SCCM 010C 10SCCM 020C 20SCCM 030C 30SCCM 050C 50SCCM 100C 100SCCM 200C 200SCCM 300C 300SCCM 500C 500SCCM 001L 1SLM 002L 2SLM 003L 3SLM...

Страница 28: ...0mm BB 1 8 5SLM CC 1 4 30SLM HH 3 8 MM VCR 1 4 UU VCO 1 4 XX d s V m H E U D d 0 05 0 35 MPa 7 3 50 8 psid FLOW 10SLM 0 1 0 35 MPa 14 5 50 8 psid 10SLM FLOW 30SLM 0 2 0 45 MPa 29 0 65 3 psid 30SLM FLO...

Страница 29: ...27 30 4 20mA N2 60 CO2 40 0 3 0 5 MPa 40 0 15V ProfiBus CS200 F013C500CDGGVHS CS200 F 013 C 500C D GG V H S CS200 N2 500SCCM DB15 Compression Fitting 6mm 0 05 0 3 MPa 40...

Страница 30: ...C2H4 038 0 366 1 251 0 597 C2H6 054 0 424 1 342 0 482 C3H4 068 0 363 1 787 0 421 C3H6 069 0 366 1 877 0 411 C3H8 089 0 399 1 967 0 358 C4H6 093 0 352 2 413 0 322 C4H8 104 0 372 2 503 0 299 C4H10 117...

Страница 31: ...029 0 501 0 760 0 719 NO 016 0 238 1 339 0 978 NO2 026 0 192 2 052 0 737 N2O 027 0 210 1 964 0 710 O2 015 0 220 1 427 0 981 PCl3 193 0 125 6 127 0 358 PH3 031 0 261 1 517 0 690 PF5 143 0 161 5 620 0...

Страница 32: ...n C C 0 3106 N Cp CP N N Ar He 1 01 CO N2 1 00 CO2 NO2 0 94 NH3 C4H8 0 88 N N1 1 T N2 2 T Nn n T 0 3106 N1 1 T N2 2 T Nn n T C 1Cp1 1 T 2Cp2 2 T nCpn n T 1 n T 1 n CP1 CPn N1 Nn 1 101325Pa 760 mm Hg 2...

Страница 33: ...10 64362939 64362925 86 10 64361831 8491 8315 86 10 64362923 http mfc sevenstar com cn E mail mfcsales sevenstar com cn 401 516 547 1916 200070 86 21 33030324 86 21 63533265 45 B712 518031 86 755 8829...

Страница 34: ...REV 2 4 CS200 F MFC MFM User s Manual 2015 12...

Страница 35: ...2 Unpacking 7 SECTION 4 MAINTENANCE 2 3 Mechanical Installation 8 4 1 General 23 2 3 1 General 8 4 2 Caution 23 2 3 2 Installation 12 SECTION 5 TROUBLESHOOTING 2 3 2 1 1 4VCR Installation 12 5 1 Init...

Страница 36: ...ate store and distribute any part of this manual in mean of electric mechanical photocopy recording or other way without permission of Sevenstar This manual is not assured that there is no mistake and...

Страница 37: ...abiding by the below notices a Do not replace any components or disassemble instrument Do not replace any components or disassemble the instrument without any authorized and make sure that the label...

Страница 38: ...inlet gas is less than maximum working pressure referring to maximum working pressure in manual j Please keep the whole system away from pollution When system running do not use polluting gas such as...

Страница 39: ...a dual interface voltage and current as well as RS 485 DeviceNet and ProfiBus digital interfaces It is possible to operate the instrument completely digitally or it can be operated in analog mode with...

Страница 40: ...flow 30SLM Max Pressure 1MPa 145pisg Zero Drift 0 6 F S per year without autozero Leak integrity 1 10 9 atm cc sec He 1 10 10 Pa m3 sec He wetted Materials Viton Surface Finish 25Ra Operation Tempera...

Страница 41: ...omer s information the MFC are calibrated under standard conditions 1 6 1 Standard conditions Without special conditions specified by the customer the MFC is calibrated under the following standard co...

Страница 42: ...ent The temperature is 22 2 1 6 3 Precision Adjustment Each MFC is accurately controlled for 24 hours after manufacturing on a different calibration bench The accuracy the dynamic response and the sta...

Страница 43: ...valve upstream or downstream in relation to the process sequencing It is recommended that you install an in line filter upstream to the controller in order to prevent MFC from contamination CS200 F sh...

Страница 44: ...9of34 Figure 2 1 CS200 F MFC Figure 2 2 Product R D dimensions...

Страница 45: ...10of34 Figure 2 3 Product DeviceNet dimensions...

Страница 46: ...ting Length Compression Fitting 6 Compression Fitting1 4 Compression Fitting3 8 Compression Fitting 10 Compression Fitting 3 Compression Fitting1 8 VCR1 4 M VCO1 4 M L mm 157 8 169 Table 2 1 The lengt...

Страница 47: ...eck the gland to gland space including the gaskets Remove the plastic gland protector caps When using loose VCR original style gaskets inserting the gasket into the female nut For VCR retainer gaskets...

Страница 48: ...u should manually use spanner to wrench it tighten by 1 2 turn pulling up imported Compression Fitting should use spanner to be tighten in 1 25 turns to prove its not blow by after your installing the...

Страница 49: ...utput available CS200 F MFC MFM can communicate with PC via RS485 DeviceNet or ProfiBus 2 4 2 Connections 9 pin male Sub D connector 15 pin male Sub D connector RS485 connector DeviceNet connector ele...

Страница 50: ...igure 2 11 electromagnetic valve connector Figure 2 12 electromagnetic valve connector Figure 2 13 RS232 RS485 connector Figure 2 14 ProfiBus connector of Figure 2 15 ProfiBus connector of 9 pin femal...

Страница 51: ...8CM 1G 1GM Input 15V Input 24V To Serial of PC To USB of Computer MFC DB15 Pin QCX 19 QCX P19 QCX 48 QCX 17 QCX P17 QCX 46 QCX 41 QCX 43 QCX 34 QCX 50 MFC DB9 pin QCX 20 QCX P20 QCX 49 QCX 18 QCX P18...

Страница 52: ...17of34 Figure 2 17 CS Product and Illustration of Connecting Power Figure 2 18 CS Product and Illustration of Connecting Power...

Страница 53: ...oduct Sevenstar manufactures all standard cables RS485 adaptor customized cables and some accessories For more details contact Sevenstar or its local agent 2 5 Checking Before Operation Before operati...

Страница 54: ...inert gas for one hour SECTION3 FUNCTIONS 3 1 General Based on new sensor driver technology zero balance technology and VCP technology CS200 F MFC presents high performance and reliability And more d...

Страница 55: ...ED 3 4 Soft Start The CS200 F MFC support soft start function Soft start allows customer change the setting of MFC with definite rate Please refer to Digital MFC Communication User Manual for more det...

Страница 56: ...and multi range technology has been developed in the CS200 F MFC Customer can change gas convert factor full scale of MFC via digital interface Full scale of CS200 F MFC can be re ranged from 30 to 1...

Страница 57: ...w These conditions can be read and reset from the RS485 interface Provisions will be made for masking disabling the alarms or warnings on an individual basis Warning and Alarms Sensor Zero Output Out...

Страница 58: ...tioned as a MFM In that case the maximum flow testing voltage could reach beyond 10V please be careful while flow is beyond F S 5V Full Scale the real flow will have no linearity corresponding with fl...

Страница 59: ...from the system purge the controller thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to purge the controller could cause a fire or explosion resulting...

Страница 60: ...the software Power failure Check Power and pin position Setpoint incorrect Check setpoint signal Contamination Contact Sevenstar Defective sensor Contact Sevenstar PCB problems Contact Sevenstar Defe...

Страница 61: ...ect or indirect loss for customers or others 6 2 Product Warranty 6 2 1 Sevenstar products are guaranteed against defects in materials and workmanship if used in accordance with specifications and not...

Страница 62: ...follows A Gas must be clean and particle free which means a filter must be fitted in the gas line upstream of the MFC B Gas must comply with the following pressure specifications 1 Gas pressure must...

Страница 63: ...es Sevenstar can provide services like start up service software development gas system design training etc Please visit mfc sevenstar com cn for more information and find your nearest service and cal...

Страница 64: ...003L 3SLM 050C 50SCCM 005L 5SLM 100C 100SCCM 010L 10SLM 200C 200SCCM 020L 20SLM 300C 300SCCM 030L 30SLM 500C 500SCCM 050 50SLM 000C customized Full scale please consult d for details a Electronic con...

Страница 65: ...ssure 3 MPa 435 1 psig Calibration temperature 22 2 Valve command mode 2 Power Supply 24V Command type DeviceNet default digital mode Profibus default mode for Profibus other analog voltage S Customiz...

Страница 66: ...ith shut off valve Gas N2 Type of Valve Normally closed Full range Electronic connector DB9 Fittings Compression Fitting 6mm Seal material Viton Mounting position For example Customized requirement In...

Страница 67: ...150 0 722 C2H2 042 0 4049 1 1620 0 596 C2H4 038 0 3658 1 2510 0 597 C2H6 054 0 4241 1 3420 0 482 C3H4 068 0 3633 1 7870 0 421 C3H6 069 0 3659 1 8770 0 411 C3H8 089 0 3990 1 9670 0 358 C4H6 093 0 3515...

Страница 68: ...0 2464 0 9000 1 431 NH3 029 0 5005 0 7600 0 719 NO 016 0 2378 1 3390 0 978 NO2 026 0 1923 2 0520 0 737 N2O 027 0 2098 1 9640 0 710 O2 015 0 2196 1 4270 0 981 PCl3 193 0 1247 6 1270 0 358 PH3 031 0 261...

Страница 69: ...he gas N Structure factors of gas molecule See the following table Table Gas Molecule Composing factors COMPOSITION EXAMPLE N VALUE Single atom numerator Ar He 1 01 Double atom numerator CO N2 1 00 Tr...

Страница 70: ...fcsales sevenstar com cn Shanghai Office Room 1916 Unicom International Tower NO 547 Tianmu West Road Zhabei District Shanghai 200070 China Tel 86 21 33030324 Fax 86 21 63533265 Shenzhen Office Room 7...

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