SevenStar CS200-F MFC, Руководство пользователя

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excludes consumable materials and wear parts (in teflon, viton, etc.).
6.2.5 No MFC will be accepted for repair or warranty without a decontamination and purge
certificate.
6.2.6 Each MFC is individually checked (visual inspection of fittings, helium leak test and
flow calibration). Sevenstar shall not be responsible for any damage caused by gas leakage
or the use of a dangerous gas. Users are responsible for following the safety rules
applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty,
and MFC that have been damaged as a result of improper use will not be replaced by
Sevenstar.
6.2.7 Specific warranty requirements are as follows :
A
，
Gas must be clean and particle-free, which means a filter must be fitted in the gas
line upstream of the MFC.
B
，
Gas must comply with the following pressure specifications:
1. Gas pressure must never exceed 3MPa.
2. Differential pressure must be more than 0.05MPa for full-scale flow through the
MFC valve unless another value is specified in the user’s manual.
3. Differential pressure must be less than 0.35MPa for the MFC valve to regulate
without gas-flow oscillation unless another value is specified in the user’s manual.
4. Pressure at the mass-flow inlet must be regulated by an accurate pressure regulator
to prevent gas-flow oscillation.
C ， Electrical connection requirements are as follows:
The system must be wired carefully: non-observance of the pin-out may irreversibly
damage the electronic board inside the MFC, in which case the warranty will be