SevenStar CS200-F MFC, Руководство пользователя

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CS200-F MFC is available for valve-close by input digital signal or analog voltage
directly. The Valve Command Mode is used to select one way to interpret the analog signal
of Valve Command. Please refer to “Digital MFC Communication User Manual” for more
details.
3.7 Valve Type
CS200-F MFC have two types of valve: Normally open(NO) or Normally
closed(NC) . When MFC do not have power supply, the “NO” type valve is open and gas
can flow through the MFC; the “NC” type valve is closed and gas can not flow through.
Please mention the valve type when you order the MFC.
3.8 Multi-Gas and Multi-Flow
The multi-gas and multi-range technology has been developed in the CS200-F MFC.
Customer can change gas convert factor, full scale of MFC via digital interface. Full scale
of CS200-F MFC can be re-ranged from 30% to 110%F.S. For example, an MFC with 100
SCCM full scale , the new full scale can be re-ranged between from 30 SCCM to 110
SCCM.
CS200-F MFC support customer offset by the target null value. The target null value
is a customer-programmed constant used to offset the flow output independently of all
other sensor offset constants, including the zero process. For example, set Target Null
Value: -20%F.S
，
then when no flow through MFC
，
the reading is -20%F.S
，
with gas flow
20%F.S through MFC
，
the reading is 0%F.S.Offset range is from -100%F.S to100%F.S.
Please refer to “Digital MFC Communication User Manual” for more details.