SAES SIP POWER, Руководство пользователя

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USER MANUAL - SIP POWER ION PUMP CONTROLLER
M.HIST.0109.23 Rev.1 Page 40 of 62
SW3_THR_MIN[31:24]
R/W R/W R/W R/W R/W R/W R/W R/W R/W
Bit 23 22 21 20 19 18 17 16
SW3_THR_MIN[23:16]
R/W R/W R/W R/W R/W R/W R/W R/W R/W
Bit 15 14 13 12 11 10 9 8
SW3_THR_MIN[15:8]
R/W R/W R/W R/W R/W R/W R/W R/W R/W
Bit 7 6 5 4 3 2 1 0
SW3_THR_MIN[7:0]
R/W R/W R/W R/W R/W R/W R/W R/W R/W

Bit 31:0 – Switch SW3 low threshold
These registers contain switch SW3 low threshold in nA units.
SW3_THR_MAX – 0x400c – Switch SW3 high threshold
Bit 31 30 29 28 27 26 25 24
SW3_THR_MAX[31:24]
R/W R/W R/W R/W R/W R/W R/W R/W R/W
Bit 23 22 21 20 19 18 17 16
SW3_THR_MAX[23:16]
R/W R/W R/W R/W R/W R/W R/W R/W R/W
Bit 15 14 13 12 11 10 9 8
SW3_THR_MAX[15:8]
R/W R/W R/W R/W R/W R/W R/W R/W R/W
Bit 7 6 5 4 3 2 1 0
SW3_THR_MAX[7:0]
R/W R/W R/W R/W R/W R/W R/W R/W R/W

Bit 31:0 – Switch SW3 high threshold
These registers contain switch SW3 high threshold in nA units.
CONV_RATE – 0x400e – Conversion rate
Bit 15 14 13 12 11 10 9 8
CONV_RATE[15:8]
R/W R/W R/W R/W R/W R/W R/W R/W R/W
Bit 7 6 5 4 3 2 1 0
CONV_RATE[7:0]
R/W R/W R/W R/W R/W R/W R/W R/W R/W

Bit 31:0 – Conversion rate
This register contains the conversion rate in A/Torr units useful to compute chamber pressure from
output current.