● The error message “Alignment Motor Error.” is
displayed.
There are problems with the alignment
movement function.
Contact our local distributor.
● The error message “Unknown Error.” is displayed.
An error of unknown origin has occurred.
Stop using the instrument and contact
our local distributor.
● The error message “External Communication Error.” is
displayed.
Poor cable connection
Check t he cables connected t o the
instrument, and the other ends connected
to other instruments.
DATA Transfer is not running.
Check that DATA Transfer (including the
relay software when being connected via
USB) is running correctly. Refer to the
instruction manual of DATA Transfer for
details.
There may be an error in DATA Transfer.
Check that there is no error in DATA
Transfer (including the relay software
when being connected via USB). Refer to
the instruction manual of DATA Transfer
for details.
6-3
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?
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