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3-3. Tubing diagram
The tubing system of purity meter is configured as shown in the following figure. The direction of three-way
switching valve determines the function as follows.
Detector head connected to REF. IN line
The air under atmospheric pressure can be drawn from REF. IN.
Draw in fresh air with the handy aspirator two or three times to introduce it to the GAS room of the
detector head.
Detector head connected to GAS IN line
A measuring gas can be supplied from GAS IN. (Supply pressure: 0.1 - 0.7 MPa (gauge pressure))
A measuring gas pressure is reduced by passing through the orifice, and the appropriate flow rate of
gas enters the gas room of the sensor.
When replacement of the gas room of the detector head is completed, stop supplying a measuring gas
with the three-way switching valve and put the gas room of the detector head into the state of
atmospheric pressure to perform measurement.
Detector head
Orifice
Three-way
switching valve
GAS IN
REF. IN
GAS OUT
Handy aspirator
GAS room
REF. room