Queensgate NANOSCAN NPC-D-6110, Руководство пользователя

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Table 2-3: Example of NPC-D-6xx0 System performance
Parameter Value Units Comments
NPS-X-15 NanoMechanism
– System
Range > 15 µm Calibrated Closed loop.
Linearity 0.01 % Typical.
Bandwidth (small signal) 280 Hz Typical on Fast PID setting.
Stage noise 0.01 nmHz
-½
DPT-D NanoMechanism
– System
Range
See DPT-D
specification
sheet
µm Calibrated Closed loop.
Linearity 0.1 % Typical.
Bandwidth (small signal) 300 Hz
For DPT-D-
40. Bandwidth’s will
vary depending upon DPT-D
variant.
Stage noise 0.02 nmHz
-½
OSM-Z-100 NanoMechanism
– System
Range 100 µm Calibrated Closed loop.
Linearity 0.01 % Typical.
Bandwidth (small signal) 100 Hz Typical on Fast PID setting.
Stage noise 0.03 nmHz
-½