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5 Installation

22

Version: 1.3.0

MP136E

U651 Rotation Stage

5.5

Connecting the Vacuum Version to the Controller

It is necessary to install a vacuum feedthrough (p. 10) for the vacuum version of the U-651.

Requirements



You have read and understood the general notes on installation (p. 15).



The controller is

switched off

.



You have connected the U-651 to the protective earth conductor (p. 17).



You have read and understood the C815T0003 technical note for the C-815.VF vacuum

feedthrough.

Tools and accessories



C-815.VF vacuum feedthrough, D-sub 15 (p. 10)



PILine® U-600.A0x (p. 10) extension cable, D-sub 15, 1 m to 5 m, air side



Suitable tools for installing the vacuum feedthrough

Installing the vacuum feedthrough

1.

Refer to the C815T0003 technical note for the vacuum feedthrough dimensions (see

"shell size 2").

2.

Provide a suitable opening in the vacuum chamber.

3.

Install the vacuum feedthrough so that the D-sub 15 (f) socket is in the vacuum

chamber.

Connecting the vacuum version to the controller



Connect the U-651 ("positioner"), vacuum feedthrough, and controller as shown in the

connection diagram below.

−

Pay attention to the assignment specified on the labeling of the sockets, plug

connectors, and cables.

Figure 8: Connection of the vacuum version to the controller

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Содержание U--651 Series

Страница 1: ...oder resolution 9 µrad D sub connector U 651 03V Rotation stage with low profile and PILine ultrasonic piezo motors 360 rotation range velocity 540 s incremental encoder resolution 9 µrad D sub connector vacuum compatible to 10 6 hPa U 651 04 Rotation stage with low profile and PILine ultrasonic piezo motors 360 rotation range velocity 540 s incremental encoder resolution 4 µrad D sub connector U ...

Страница 2: ...PI GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any text images and drawings is permitted only in part and only when indicating the source Original instructions First printing 02 12 2020 Document number MP136E CBo Version 1 3 0 Subject to change without...

Страница 3: ... 8 3 4 Scope of Delivery 10 3 5 Suitable Controllers 10 3 6 Accessories 10 3 7 Technical Features 11 3 7 1 Rotary Encoder 11 3 7 2 Reference Switch 11 3 7 3 ID Chip 11 4 Unpacking 13 5 Installation 15 5 1 General Notes on Installing 15 5 2 Connecting the U 651 to the Protective Earth Conductor 17 5 3 Mounting the U 651 onto a Surface 18 5 4 Fixing the Load to the U 651 20 5 5 Connecting the Vacuum...

Страница 4: ... Switch Specifications 36 10 1 3 Maximum Ratings 36 10 1 4 Specifications for Vacuum Compatible Versions 37 10 2 Ambient Conditions and Classifications 37 10 3 Motor Power 38 10 3 1 Motor Power and Operating Voltage 38 10 3 2 Velocity and Torque 39 10 3 3 Motor Power and Lifetime 40 10 3 4 Influence of Downtimes on the Torque 41 10 4 Dimensions 42 10 5 Pin Assignment 43 11 Old Equipment Disposal 4...

Страница 5: ...tal understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation Failure to comply could lead to minor injury Precautionary...

Страница 6: ...ion Load capacity Maximum load capacity in the vertical direction when the rotation stage is mounted horizontally The contact point of the load is at the center of the platform Rotary encoder The rotary encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller referencing must be done before abso...

Страница 7: ...ners MP121EK short instructions 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading Contact our customer service department p 33 Downloading Manuals 1 Open the website www pi ws 2 Search the website for the product number e g U 651 or the product family e g PILine 3 Click the corresponding product to open the product detail page 4 Click the Downloads tab T...

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Страница 9: ...a drive and must be operated with a suitable controller p 10 The controller is not included in the scope of delivery of the U 651 2 2 General Safety Instructions The U 651 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the U 651 Use the U 651 for its intended purpose only and only when it is in perfect t...

Страница 10: ...U 651 Do not drop the U 651 Do not exceed the maximum permissible stress and load capacities p 35 2 3 Organizational Measures User manual Always keep this user manual together with the U 651 The latest versions of the user manuals are available for download p 3 on our website Add all information from the manufacturer to the user manual for example supplements or technical notes If you give the U 6...

Страница 11: ...ub connector U 651 03V Rotation stage with low Profile and PILine ultrasonic piezo motors 360 rotation range velocity 540 s direct position measurement with incremental encoder 9 µrad resolution D sub connector vacuum compatible to 10 6 hPa U 651 04 Rotation stage with low Profile and PILine ultrasonic piezo motors 360 rotation range velocity 540 s direct position measurement with incremental enco...

Страница 12: ...the base body 2 Platform 3 Base body 4 0 mark of the platform 5 Cable exit The arrow in the figure shows the positive direction of motion 0 mark The 0 mark of the platform is at the 0 mark in the base body after the U 651 does a reference move 3 3 Product Labeling Figure 2 U 651 Position of the product labeling example view ...

Страница 13: ...651 Meaning of each position from the left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive number A WWW PI WS Manufacturer s address website A Data matrix code example contains the serial number A Old equipment disposal p 45 A Country of origin Germany Country of origin B Symbol for the protective earth conductor marks the protective earth connector of the U 651 p 17 Figure 3...

Страница 14: ...RS 232 SPI I O analog joystick networkable via daisy chain C 867 2U2 Piezo motor controller for PILine systems 2 axes USB RS 232 TCP IP SPI I O analog or digital joystick networkable via daisy chain C 867 10C885 Motion controller module for performance class 1 and 2 PILine piezo motor systems 1 axis D sub 15 for PIMotionMaster PID controller To order contact our customer service department p 33 3 ...

Страница 15: ...The U 651 has an optical reference switch refer to Reference Switch Specifications p 36 Refer to the controller user manual and or associated software manuals for the commands that make use of the reference point signal The red dot on the platform is above the 0 mark in the base body after the U 651 has done a reference move 3 7 3 ID Chip The U 651 positioners have a connector with an ID chip Info...

Страница 16: ......

Страница 17: ...fterwards and then shrink wrapped twice in vacuum compatible film Touch the rotation stage only with powder free gloves If necessary wipe the rotation stage clean after unpacking 1 Unpack the U 651 with care 2 Compare the contents with the scope of delivery according to the contract and the delivery note 3 Inspect the contents for signs of damage If any parts are damaged or missing contact our cus...

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Страница 19: ...electronics Temperature changes can also induce charges in piezo actuators Touching or short circuiting the contacts in the connector of the U 651 can lead to minor injuries from electric shock Do not touch the contacts in the connector of the U 651 NOTICE Lubricants dirt condensation Dirt oil lubricants and condensation will render the motor drive inoperable Make sure that the piezo motors of the...

Страница 20: ...d vertically e g the cables connected to the load should have sufficient strain relief INFORMATION For optimum repeatability all components must be connected firmly together INFORMATION When moving the platform in a power off state manually differences in the holding force may be noticeable across the travel range There are mechanical reasons for fluctuations in the holding force and they have no ...

Страница 21: ... the protective earth conductor In the following figure this hole is marked with the symbol for the protective earth conductor Figure 4 M4 threaded hole for connecting the protective earth conductor Figure 5 Connecting the protective earth conductor profile view 1 Base body of the U 651 2 Flat washer 3 Lock washer 4 Screw 5 Cable lug 6 Protective earth conductor Requirements You have read and unde...

Страница 22: ...shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for connecting the protective earth conductor is 0 1 Ω at 25 A 5 3 Mounting the U 651 onto a Surface NOTICE Warping the base body Incorrect mounting can warp the base body A warped base body will increase wear and reduce accuracy Mount the U 6...

Страница 23: ...s are provided with a thread depth of at least 13 mm The surface flatness is 10 µm For applications with large temperature changes The surface should have the same thermal expansion properties as the U 651 e g surface made of aluminum You have accounted for the space required to route cables without bending and according to regulations The U 651 is not connected to the controller Tools and accesso...

Страница 24: ... screws 2 1 Nm 4 Check that the U 651 is fixed firmly to the surface 5 4 Fixing the Load to the U 651 NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that are applied to the platform can damage the U 651 For fixing type and mass of the load pay attention to the maximum permissible forces according to the specifications p 35 Avoid tilting torques 0 5 Nm on the pla...

Страница 25: ... holes in the platform The gap between the center of gravity of the load and the center of the platform is as small as possible in all directions At least three points are provided for fixing the load on the platform Tools and accessories At least three M3 screws of suitable length p 42 Suitable tool for tightening the screws Fixing the load 1 Align the load on the U 651 so that the mounting holes...

Страница 26: ...hrough D sub 15 p 10 PILine U 600 A0x p 10 extension cable D sub 15 1 m to 5 m air side Suitable tools for installing the vacuum feedthrough Installing the vacuum feedthrough 1 Refer to the C815T0003 technical note for the vacuum feedthrough dimensions see shell size 2 2 Provide a suitable opening in the vacuum chamber 3 Install the vacuum feedthrough so that the D sub 15 f socket is in the vacuum...

Страница 27: ...peration If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the U 651 to the protective earth conductor before restarting NOTICE Destruction of the piezo motor due to electric flashovers Using the U 651 in environments that increase the electrical conductivity could lead to the destruction of the piezo motor by electric flashovers Electric fl...

Страница 28: ... properly connected see Pin Assignment p 43 HINWEIS Short circuiting due to condensation Condensation can lead to short circuiting and failure of the U 651 Wait for a sufficient period of time to allow the U 651 to reach room temperature in the following cases After unpacking or before starting for the first time If the U 651 has been brought from a cold into a warm environment or from a warm into...

Страница 29: ...axes Check the settings of the servo control parameters NOTICE Overheating during continuous operation The highest torque or holding force is reached at maximum motor power however the U 651 may overheat during continuous operation Pay attention to the recommended motor power depending on the duty cycle and the ambient temperature p 40 NOTICE Damage or considerable wear due to high accelerations H...

Страница 30: ... of your rotation stage for doing initial motion testing during starting Depending on the application using the default parameter values e g for P term I term D term acceleration and velocity can cause damage to the rotation stage especially when operated with heavy loads If possible Start without a load first Always install the latest version of the positioner database onto your PC For starting w...

Страница 31: ...otor performance when using extension cables The parameter values in the controller must be adjusted if the total cable length exceeds 3 m between positioner and controller If the total cable length between the positioner and the controller exceeds 6 5 m contact our customer service department p 33 Adjusting parameter values when using extension cables 1 Adjust the value of the Frequency Shift par...

Страница 32: ......

Страница 33: ...bricants 7 2 Doing a Maintenance Run Depending on the operating conditions and the period of use of the U 651 a maintenance run may be required The maintenance run is performed to redistribute the existing lubricant in the bearing of the U 651 The stage must rotate by at least one full revolution during the maintenance run To evenly distribute the existing lubricant in the stage bearing perform a ...

Страница 34: ...roller Cleaning the rotation stage Only when the rotation stage is not used in vacuum If necessary clean the surfaces of the rotation stage with a cloth that is dampened with a mild cleanser or disinfectant Only when the rotation stage is used in vacuum Touch the rotation stage only with powder free gloves If necessary wipe the rotation stage clean ...

Страница 35: ...a flat surface The recommended flatness of the surface is 10 µm For applications with large temperature changes Only mount the U 651 on surfaces that have the same or similar thermal expansion properties as the U 651 e g surfaces made of aluminum Reduced accuracy No or limited motion Excessive load Reduce the load see Data Table p 35 When the rotation stage is mounted vertically make sure that the...

Страница 36: ......

Страница 37: ...ation Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicable If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p 3 ...

Страница 38: ......

Страница 39: ...it Tolerance Active axes θZ θZ Rotation range 360 360 Velocity closed loop 540 540 s max Minimum incremental motion 27 12 µrad typ Bidirectional repeatability 54 24 µrad Positioning U 651 03 U 651 03V U 651 04 U 651 04V Unit Tolerance Sensor type Incremental encoder Incremental encoder Sensor resolution 9 4 µrad Mechanical properties U 651 03 U 651 03V U 651 04 U 651 04V Unit Tolerance Load capaci...

Страница 40: ...e Reference switch Optical Optical Operating temperature 0 to 40 0 to 40 C Material Anodized aluminum Anodized aluminum Mass 500 500 g 5 Cable length 1 5 model 03 1 0 model 03V 1 5 model 04 1 0 model 04V m Cable length 1 5 m 200 mm Cable length 1 0 m 20 mm Recommended electronics C 867 1U C 867 1U Ask about customized versions 10 1 2 Reference Switch Specifications Type Optical sensor Supply volta...

Страница 41: ...hesive Bakeout temperature 80 C 176 F Bakeout time 3 hours 10 2 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classifications for the U 651 Area of application For indoor use only Maximum altitude 2000 m Air pressure All models except vacuum compatible models 1100 hPa to 0 1 hPa Vacuum compatible models 1100 hPa to 10 6 hPa Relative humidity Highest r...

Страница 42: ...operating voltage and the motor power of the U 651 The operating voltage is output by the controller and depends on the actual control value The polarity sign of the control value determines the direction of motion Motor power Operating voltage rounded Corresponding control value on the controller 0 0 Veff 0 25 18 Veff 8192 or 8192 50 36 Veff 16384 or 16384 75 53 Veff 24575 or 24575 100 71 Veff ma...

Страница 43: ...ty and Torque The following figure can be used to estimate the velocity and torque of the U 651 with different motor powers Motion is possible starting at a motor power of approx 30 Figure 9 Relationship between velocity and torque of the U 651 with different motor power levels ...

Страница 44: ...lowing graph A load cycle corresponds to a positioning run and includes the acceleration motion deceleration as well as downtime break The motor should only sporadically be operated at peak power the peak power serves as a control reserve INFORMATION In a vacuum there is no heat dissipation via convection Operate the vacuum version of the U 651 with a 20 lower motor power than given in the graph o...

Страница 45: ...10 Technical Data U 651 Rotation Stage MP136E Version 1 3 0 41 10 3 4 Influence of Downtimes on the Torque Figure 11 Torque of the U 651 depending on the downtime of the motor ...

Страница 46: ...2 Version 1 3 0 MP136E U 651 Rotation Stage 10 4 Dimensions Dimensions in mm Note that the decimal points are separated by a comma in the drawings Figure 12 U 651 Dimensions and position of the 0 mark 1 after referencing ...

Страница 47: ... 3 USM_P2 Input Piezo 71 VAC RMS 4 VDD Input 5 V 5 NC Not connected 6 ID_CHIP Bidirectional Data line for ID chip 7 ENCA Output Encoder channel A inverted RS 422 8 ENCB Output Encoder channel B inverted RS 422 9 USM_P1 Input Motor voltage ground 10 GND 0 V 11 USM_P3 Input Piezo 71 VAC RMS 12 NC Not connected 13 REFSWITCH Output Reference switch 14 ENCA Output Encoder channel A RS 422 15 ENCB Outpu...

Страница 48: ......

Страница 49: ...national national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge Any old PI equipment can be sent free of charge to the following address Physik Instrumente PI GmbH Co KG Auf der Roem...

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Страница 51: ... Conformity has been issued in accordance with the following European directives Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 EMC EN 61326 1 RoHS EN 50581 or EN IEC 63000 12 EU Declaration of Conformity ...

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