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10 Technical Data

Q-522 Miniature Stage

MP134E

Version: 1.0.1

10.3.3 Q-522.10z

Dimensions in mm

Signs that are used to separate decimal places:



Depth and diameter of holes: Point



All other dimensions: Comma

Figure 15: Q-522.10z

Содержание Q-Motion Q-522

Страница 1: ...ual Version 1 0 1 Date 23 08 2019 This document describes the following products Q 522 xyz Q Motion Miniature Linear Stage Piezoelectric Inertia Drive x Travel range 0 6 5 mm 1 13 mm 2 26 mm y Equipment with a sensor 0 without sensor 3 with sensor sensor resolution 4 nm 4 with sensor sensor resolution 1 nm z Suitable for vacuum 0 suitable to 0 1 hPa U suitable to 10 9 hPa ...

Страница 2: ...gs in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 23 08 2019 Document number MP134E KSch version 1 0 1 Subject to change without notice This manual is superseded by any new release The la...

Страница 3: ...oduct View 10 3 3 Product Labeling 12 3 4 Scope of Delivery 13 3 5 Accessories 13 3 6 Suitable Electronics 14 3 7 Technical Features 15 3 7 1 Linear Encoder Sensor 15 3 7 2 Reference Point Switch 15 3 7 3 ID Chip 15 4 Unpacking 17 5 Installation 19 5 1 General Notes on Installation 19 5 2 Mounting the Q 522 on a Surface and Connecting It to a Protective Earth Conductor 21 5 3 Setting Up a Multi Ax...

Страница 4: ...aning the Q 522 41 8 Troubleshooting 43 9 Customer Service 45 10 Technical Data 47 10 1 Specifications 47 10 1 1 Data Table 47 10 1 2 Maximum Ratings 49 10 1 3 Ambient Conditions and Classifications 49 10 2 Operating Time 50 10 3 Dimensions 51 10 3 1 Q 522 00z 51 10 3 2 Q 522 0yz 52 10 3 3 Q 522 10z 53 10 3 4 Q 522 1yz 54 10 3 5 Q 522 20z 55 10 3 6 Q 522 2yz 56 10 4 Pin Assignment 57 10 4 1 Q 522 ...

Страница 5: ...erstanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation If not avoided the dangerous situation will result in minor injur...

Страница 6: ... 3 Definition Term Explanation Load capacity Maximum load capacity in the vertical direction when the stage is mounted horizontally The contact point of the load is in the center of the platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point ...

Страница 7: ...p 1 to 4 Channels E870T0002 Technical Note E 871 1A1 PIShift Controller 1 Channel Linear Encoder PZ241E User Manual PIMikroMove SM148E Software Manual 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading Contact our customer service department p 45 INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the m...

Страница 8: ...product CD in the PC drive 2 Switch to the Manuals directory on the CD 3 In the Manuals directory open the Release News file including releasenews in the file name 4 Find the user name and the password in the section User login for software download in the Release News 5 Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download directory in Windows Explorer 6 Lo...

Страница 9: ... in any orientation The specifications of the Q 522 apply to horizontal mounting p 47 The Q 522 is not intended for applications in areas in which a failure would present severe risks to human beings or the environment For further information on the operating conditions of the Q 522 see Technical Data p 47 Some models of the Q 522 are equipped with a linear encoder for direct position measurement ...

Страница 10: ...Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the Q 522 after having read and understood this user manual Personnel qualification The Q 522 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel 2 4...

Страница 11: ...ge Dimensions Equipment with a linear encoder sensor resolution 1 nm or sensor resolution 4 nm Suitability for operation in vacuum Model Travel range Dimensions Linear encoder present Vacuum suitability to 10 9 hPa Q 522 000 6 5 mm 22 mm 22 mm 10 mm No No Q 522 030 6 5 mm 32 mm 22 mm 10 mm Yes 4 nm No Q 522 040 6 5 mm 32 mm 22 mm 10 mm Yes 1 nm No Q 522 100 13 mm 22 mm 32 mm 10 mm No No Q 522 130 ...

Страница 12: ... nm Resolution 0 6 N Drive Force Dimensions 22 33 10 mm W L H Piezoelectric Inertia Drive Q 522 040 Q Motion Miniature Linear Stage 6 5 mm Travel Range Linear Encoder 1 nm Resolution 0 6 N Drive Force Dimensions 22 33 10 mm W L H Piezoelectric Inertia Drive Q 522 100 Q Motion Miniature Linear Stage 13 mm Travel Range without Position Sensor for Open Loop Operation 0 6 N Drive Force Dimensions 22 3...

Страница 13: ...tion 0 6 N Drive Force Dimensions 22 33 10 mm W L H Piezoelectric Inertia Drive Vacuum Compatible to 10 9 hPa Q 522 10U Q Motion Miniature Linear Stage 13 mm Travel Range without Position Sensor for Open Loop Operation 0 6 N Drive Force Dimensions 22 33 10 mm W L H Piezoelectric Inertia Drive Vacuum Compatible to 10 9 hPa Q 522 14U Q Motion Miniature Linear Stage 13 mm Travel Range Linear Encoder ...

Страница 14: ...atform 2 Ceramic rail of the drive 3 Base body 4 Linear guiding 5 Cable exit for drive connection Figure 2 Example of model with linear encoder Q 522 140 stage 1 Case of the linear encoder 2 Ruler of the linear encoder 3 Moving platform 4 Ceramic rail of the drive 5 Base body 6 Linear guiding 7 Cable exit for drive connection 8 Cable exit for sensor connection ...

Страница 15: ...ion for drive and sensor with vacuum incompatible models Sub D 15 m connector with vacuum compatible models Sub D 15 f connector 3 With vacuum incompatible models with sensor Warning sign Electrostatic sensitive devices 4 Type plate p 12 5 Stage Figure 4 Direction of motion of the Q 522 shown using the Q 522 100 left and Q 522 140 with linear encoder right for examples The arrow in the figure abov...

Страница 16: ...ion of the product labeling example view Position Labeling Description A 113064246 Serial number example individual for each Q 522 Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers A Q 522 140 Product name example the places after the point refer to the model A B Warning sign Observe manual A Old equipment disposal p 59 ...

Страница 17: ...t for mounting the Q 522 consisting of 2 1 5 m6 x 3 A2 dowel pins ISO 8734 2 M2x6 A2 socket head cap screws ISO 4762 MP134E Manual for Q 522 linear positioning stage Only with models without sensor which are not suitable for operation in a vacuum 7202500042 0015 Adapter cable for connection to the E 870 drive electronics Sub D 15 f to Mini DIN 4 m 0 3 m Only with models with sensor which are not s...

Страница 18: ...with Connector Strip E 870 1G PIShift Piezomotor PiezoMike Drive Electronics 1 Channel Bench Top Device E 870 21 PIShift Piezomotor PiezoMike Drive Electronics 2 Channels OEM Board with Connector Strip E 870 2G PIShift Piezomotor PiezoMike Drive Electronics 2 Channels Bench Top Device E 870 41 PIShift Piezomotor PiezoMike Drive Electronics 4 Channels OEM Board with Connector Strip E 870 4G PIShift...

Страница 19: ...tch The Q 522 models equipped with a sensor have an optical reference point switch The commands that use the reference signal are described in the user manual of the controller and or in the corresponding software manuals 3 7 3 ID Chip Q 522 models with sensor contain an ID chip in the connector The following data are stored as parameters on the ID chip Information on the stage Type serial number ...

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Страница 21: ... stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the stage is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film Only touch the stage with powder free gloves If necessary wipe the stage clean after unpacking 1 Unpack the Q 522 with care 2 If presen...

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Страница 23: ... 522 26 Connecting the Q 522 to the Electronics 29 5 1 General Notes on Installation Figure 7 Accessible when the moving platform is driven out Ceramic rail of the PIShift drive and for models with sensor ruler of the linear encoder example Q 522 140 NOTICE Damage from mechanical actions The ruler of the linear encoder is scratch sensitive and can be damaged by mechanical actions e g from pointed ...

Страница 24: ...e ESD protective cap from the connector only when you connect the Q 522 to the controller NOTICE Heating up of the Q 522 during operation The heat produced during operation of the Q 522 can affect your application Install the Q 522 so that the application is not impaired by the dissipated heat Ensure sufficient ventilation at the place of installation Make sure that the complete bottom side of the...

Страница 25: ...ffixed with zero backlash INFORMATION When handling the vacuum version of the stage appropriate cleanliness must be ensured Only touch the stage with powder free gloves If necessary wipe the stage clean INFORMATION The positive direction of motion of the axis is given in the product view p 10 5 2 Mounting the Q 522 on a Surface and Connecting It to a Protective Earth Conductor NOTICE Protruding sc...

Страница 26: ... thermal expansion properties as the Q 522 INFORMATION The contact of the Q 522 with the protective earth conductor is made as follows Two counter sunk holes in the base body of the Q 522 Suitable conductive screws p 13 Protective earth conductor connected to the surface on which the Q 522 is mounted INFORMATION Observe the applicable standards for mounting the protective earth conductor Figure 8 ...

Страница 27: ...s the Q 522 e g surface made of aluminum The evenness of the surface is 2 µm You have accounted for the space required for a cable routing free of kinks and in accordance with regulations Tools and accessories LPS22 5006 screw set from the scope of delivery of the Q 522 p 13 2 1 5 m6 x 3 dowel pins ISO 8734 2 M2x6 socket head cap screws ISO 4762 Suitable tools for fastening the screws Mount the Q ...

Страница 28: ...rface without backlash 5 3 Setting Up a Multi Axis System The Q 522 can be used in XY systems NOTICE Impermissibly high load on the stages In an XY system the stage for the Y axis must be moved as well Impermissibly high loads interfere with the motion and can damage the stages Include the mass of the moved stage in the calculation of the load to be moved For all stages in a multi axis system Do n...

Страница 29: ...e electronics You have properly mounted the lower stage on a surface and connected it to a protective earth conductor p 21 You have accounted for the space required for a cable routing free of kinks and in accordance with regulations Tools and accessories LPS22 5006 screw set from the scope of delivery of the Q 522 p 13 2 1 5 m6 x 3 dowel pins ISO 8734 2 M2x6 socket head cap screws ISO 4762 Suitab...

Страница 30: ... the screw with a maximum torque of 35 Ncm d Make sure that the screw head does not protrude from the counter sunk hole e Repeat the steps a to d for the other counter sunk hole in the base body of the Q 522 4 Check that the upper Q 522 fits on the lower Q 522 without backlash 5 4 Affixing the Load to the Q 522 NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that...

Страница 31: ...z The arrows identify the following mounting holes in the moving platform of the Q 522 For load alignment Black arrows Locating holes Ø 1 5 mm H7 depth 2 mm For affixing the load White arrows M1 6 threaded holes depth 2 5 mm Light gray arrows M2 threaded holes depth 2 6 mm Dark gray arrows M2 threaded holes depth 2 8 mm ...

Страница 32: ...ou have made two locating holes of Ø 1 5 mm H7 in the load for accommodating locating pins Tools and accessories Screws of suitable length p 51 Options M2 screws Only Q 522 0yz and Q 522 2yz M1 6 screws Suitable tools for fastening the screws Optional 2 locating pins of suitable length for locating holes with Ø 1 5 mm H7 Affixing the load to the Q 522 1 Align the load on the Q 522 so that the moun...

Страница 33: ...tion regarding the connection of a vacuum compatible Q 522 contact the customer service department p 45 Prerequisites You have read and understood the general notes on installation You have installed the E 870 drive electronics p 14 You have read and understood the user manual of the drive electronics The drive electronics is switched off i e not connected to the power source Tools and accessories...

Страница 34: ...connected Connecting the Q 522 x00 to E 870 drive electronics with a connector strip Connect the Q 522 x00 to the connector strip of the drive electronics using a suitable adapter 5 5 2 Connecting the Q 522 to the Controller INFORMATION For information regarding the connection of a vacuum compatible Q 522 contact the customer service department p 45 Prerequisites You have read and understood the g...

Страница 35: ...he Q 522 with the connector of the Y adapter cable Sub D 15 f 2 Connect the Y adapter cable with the E 871 controller a Connect the HD Sub D 15 m connector for motor connection to the corresponding socket of the controller see user manual of the controller b Connect the HD Sub D 15 f connector for sensor connection to the panel plug of the controller see user manual of the controller 3 Secure the ...

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Страница 37: ...tart up Do not remove the protective earth conductor during operation If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the Q 522 to the protective earth conductor before starting it up again CAUTION Burning from hot surface The surface of the Q 522 and its vicinity can heat up during operation Touching the Q 522 and surrounding parts can re...

Страница 38: ...ollisions Collisions can damage the stage the load to be moved and the environment Make sure that no collisions are possible between the stage the load to be moved and the environment in the motion range of the stage Do not place any objects in areas where they can get caught by moving parts Stop the motion immediately if an electronics malfunction occurs NOTICE Operating frequency too high An ope...

Страница 39: ...e Maximum Motor Output ID 0x9 parameter If necessary reduce the commanded control value and the value of the Maximum Motor Output parameter Reduce the operating time with a high operating frequency p 50 Stop the motion immediately if an electronics malfunction occurs NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause d...

Страница 40: ...ration in vacuum below 0 1 hPa Do not operate the Q 522 during evacuation NOTICE Increased wear due to small working range Using a small working range permanently increases the wear in this region If possible Select another part of the travel range for the working range in regular intervals 6 2 Starting Up the Stage The presence of a sensor defines the electronics to be used to operate the Q 522 s...

Страница 41: ... 33 You have read and understood the documentation of the E 870 drive electronics E870T0001 Technical Note or E870T0002 Technical Note You have properly installed the stage p 19 The E 870 drive electronics has been properly installed and all connections on the E 870 have been set up see E870T0001 Technical Note or E870T0002 Technical Note Starting up the Q 522 x0z with the E 870 drive electronics ...

Страница 42: ... Operating voltage lower limit PIShift Lower Supply Voltage ID 0x1F000100 0 V Charging current during forward motion PIShift Forward Current ID 0x1F000200 0 2 A Charging current during backward motion PIShift Backward Current ID 0x1F000300 0 2 A Operating frequency in step mode PIShift Frequency ID 0x1F000400 20000 Hz Duty cycle of the current source during the output of one period of the modified...

Страница 43: ...Maximum Motor Output ID 0x9 parameter in the PIMicosStages2 dat stage database takes a value of 15 kHz For further information see Operating Time p 50 and user manual of the E 871 controller Prerequisites You have read and understood the general notes on start up and operation p 33 You have properly installed the stage p 19 You have read and understood the user manual of the controller You have re...

Страница 44: ...Miniature Stage 2 If necessary Adapt the Maximum Motor Output ID 0x9 parameter to your application also refer to General Notes on Start Up and Operation p 33 and Operating Time p 50 The E 871 user manual describes the start up using the PIMikroMove program ...

Страница 45: ... this manual 7 2 Performing a Maintenance Run The maintenance run must cover the entire travel range Perform the maintenance run after every 10 million steps 7 3 Cleaning the Q 522 Prerequisites You have disconnected the stage from the electronics Cleaning the stage Only when the stage is not used in vacuum When necessary clean the surfaces of the stage with a cloth that is lightly dampened with a...

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Страница 47: ...tion in the Technical Data section p 47 If the stage is mounted vertically make sure that the installed load is lower than the self locking of the drive Parameters of the drive electronics incorrectly set See the Functional impairment after system modification problem in this table Operating voltage too low Provide an operating voltage of 48 V Unfavorable operating frequency for step mode Adapt th...

Страница 48: ...ive is blocked Carefully release the blockage by manually moving the moving platform back and forth Contact our customer service department p 45 If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 45 ...

Страница 49: ...estions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website 9 Customer Service ...

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Страница 51: ...resolution 4 nm 26 mm travel range resolution 1 nm UHV version Q 522 24U 6 5 mm to 26 mm travel range open loop UHV versions Q 522 x0U Active axis X X X X X X X Travel range 6 5 6 5 13 13 26 26 6 5 to 26 mm Maximum velocity 6 6 6 6 6 6 6 mm s Minimum incremental motion 8 2 8 2 8 2 nm Pitch yaw over entire travel range 300 400 300 400 300 400 300 400 300 400 300 400 300 400 µrad Linearity 3 5 3 5 3...

Страница 52: ... 1 3 1 3 1 3 N Motor type Piezoelectric inertia drive Miscellaneous Q 522 030 Q 522 040 Q 522 04U Q 522 130 Q 522 140 Q 522 14U Q 522 230 Q 522 240 Q 522 24U Q 522 x00 Q 522 x0U Unit Operating temperature range 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 C Cable length 1 1 1 1 1 1 1 m Motor sensor connector D sub 15 m Material Aluminum steel Mass including cabling 107 107 118 118 128 1...

Страница 53: ...ssure Q 522 xy0 1100 hPa to 0 1 hPa Q 522 xyU 1100 hPa to 10 9 hPa Relative humidity Highest relative humidity 80 for temperatures up to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Operating temperature 0 C to 40 C Storage temperature 20 C to 70 C Transport temperature 20 C to 70 C Maximum bakeout temperature for vacuum compatible products Q 522 xyU 120 C...

Страница 54: ...g and high wear the operating time with given operating frequency and 100 duty cycle should not exceed the values given in the following table Operating frequency in Hz 1 Operating time 2 48 V 0 2 A 20000 10 s max 10000 20 s max 5000 60 s max 1000 120 s max 1 For the relevant parameters see Starting Up the Stage p 36 and the user manual of the electronics used 2 With 100 duty cycle without heat di...

Страница 55: ...522 Miniature Stage MP134E Version 1 0 1 51 10 3 Dimensions 10 3 1 Q 522 00z Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma Figure 13 Q 522 00z ...

Страница 56: ...22 Miniature Stage 10 3 2 Q 522 0yz Dimensions in mm The dimensions of the Q 522 030 and Q 522 040 models are identical Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma Figure 14 Q 522 04z ...

Страница 57: ... Data Q 522 Miniature Stage MP134E Version 1 0 1 53 10 3 3 Q 522 10z Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma Figure 15 Q 522 10z ...

Страница 58: ...22 Miniature Stage 10 3 4 Q 522 1yz Dimensions in mm The dimensions of the Q 522 130 and Q 522 140 models are identical Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma Figure 16 Q 522 14z ...

Страница 59: ... Data Q 522 Miniature Stage MP134E Version 1 0 1 55 10 3 5 Q 522 20z Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma Figure 17 Q 522 20z ...

Страница 60: ...22 Miniature Stage 10 3 6 Q 522 2yz Dimensions in mm The dimensions of the Q 522 230 and Q 522 240 models are identical Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma Figure 18 Q 522 2yz ...

Страница 61: ...nal differential Output 2 Motor Motor signal differential Input 3 Motor Motor signal differential Input 4 VDD 2 Supply voltage 5 V Input 5 6 ID chip data 2 ID chip data Output 7 SIN 2 Encoder A Output 8 COS 2 Encoder B Output 9 Motor Motor signal differential Input 10 GND GND GND 11 Motor Motor signal differential Input 12 13 REF 2 Reference signal differential Output 14 SIN 2 Encoder A Output 15 ...

Страница 62: ...tion Direction 1 SIN 2 Encoder A Output 2 REF 2 Reference signal differential Output 3 COS 2 Encoder B Output 4 VDD 2 Supply voltage 5 V Input 5 SH Shield Shield 6 7 8 Motor Motor signal differential Input 9 SIN 2 Encoder A Output 10 REF 2 Reference signal differential Output 11 COS 2 Encoder B Output 12 GND GND GND 13 14 15 Motor Motor signal differential Input 1 The sign indicates that the corre...

Страница 63: ...international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente...

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Страница 65: ...been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50581 2012 12 EC Declaration of Conformity ...

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