3 Product Description
8
Version: 1.0.1
MP134E
Q-522 Miniature Stage
Model
Travel
range
Dimensions
Linear encoder
present
Vacuum
suitability (to
10
-9
hPa)
Q-522.240
26 mm
32 mm × 42 mm × 10 mm
Yes (1 nm)
No
Q-522.00U
6.5 mm
22 mm × 22 mm × 10 mm
No
Yes
Q-522.04U
6.5 mm
32 mm × 22 mm × 10 mm
Yes
Yes
Q-522.10U
13 mm
22 mm × 32 mm × 10 mm
No
Yes
Q-522.14U
13 mm
32 mm × 32 mm × 10 mm
Yes
Yes
Q-522.20U
26 mm
22 mm × 42 mm × 10 mm
No
Yes
Q-522.24U
26 mm
32 mm × 42 mm × 10 mm
Yes
Yes
Detailed model names
Order
number
Product name
Q-522.000
Q-Motion Miniature Linear Stage, 6.5 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive
Q-522.030
Q-Motion Miniature Linear Stage, 6.5 mm Travel Range, Linear Encoder, 4 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.040
Q-Motion Miniature Linear Stage, 6.5 mm Travel Range, Linear Encoder, 1 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.100
Q-Motion Miniature Linear Stage, 13 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive
Q-522.130
Q-Motion Miniature Linear Stage, 13 mm Travel Range, Linear Encoder, 4 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.140
Q-Motion Miniature Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm
Resolution, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H), Piezoelectric
Inertia Drive
Q-522.200
Q-Motion Miniature Linear Stage, 26 mm Travel Range, without Position Sensor, for
Open-Loop Operation, 0.6 N Drive Force, Dimensions 22 × 33 × 10 mm (W × L × H),
Piezoelectric Inertia Drive
