PI P-611 Series, Руководство пользователя

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10 Technical Data
38 Version: 1.2.0 PZ253E P­611 Positioners
P­611.3S
P­611.3SF
P­611.3O
P­611.3OF
Unit Tolerance
Active axes X, Y, Z X, Y, Z
Motion and positioning
Integrated sensor SGS
Travel range at -20 to 120 V,
open loop
120 / axis 120 / axis µm +20 % /
-0 %
Travel range, closed loop 100 / axis – µm
Resolution, open loop 0.2 0.2 nm typ.
Resolution, closed loop 1 – nm typ.
Linearity error 0.1 – % typ.
Repeatability <10 – nm typ.
Pitch in X, Y ±5 ±5 µrad typ.
Tilt θ
X
(motion in Z) ±10 ±10 µrad typ.
Yaw in X ±20 ±20 µrad typ.
Yaw in Y ±10 ±10 µrad typ.
Tilt θ
Y
(motion in Z) ±10 ±10 µrad typ.
Mechanical properties
Stiffness 0.3 0.3 N/µm ±20 %
Resonant frequency X / Y / Z, no
load
350 / 220 / 250 350 / 220 / 250 Hz ±20 %
Resonant frequency under load
in X / Y / Z, 30 g
270 / 185 / 230 270 / 185 / 230 Hz ±20 %
Resonant frequency under load
in X / Y / Z, 100 g
180 / 135 / 200 180 / 135 / 200 Hz ±20 %
Push/pull force capacity in
motion direction
15 / 10 15 / 10 N max.
Load capacity 15 15 N max.
Drive properties
Ceramic type PICMA® P-885 PICMA® P-885
Electrical capacitance 1.5 1.5 µF ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 °C
Material Aluminum, steel Aluminum, steel
Dimensions P-611.3S:
44 mm × 44 mm ×
43.2 mm
P-611.3SF:
48 mm × 50 mm ×
44.2 mm
P-611.3O:
44 mm × 44 mm ×
43.2 mm
P-611.3OF:
44 mm × 50 mm ×
44.2 mm
Mass 0.32 0.32 kg ±5 %
Cable length 1.5 1.5 m ±10 mm