PI P-611 Series, Руководство пользователя

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10 Technical Data
P­611 Positioners PZ253E Version: 1.2.0 39
P­611.3S
P­611.3SF
P­611.3O
P­611.3OF
Unit Tolerance
Voltage connection D-sub 25 (m) D-sub 25 (m)
Sensor connection D-sub 25 (m) –
Recommended electronics
E-503, E-505, E-663,
E-664, E-727
E-503, E-505, E-663,
E-664, E-727
The resolution of the system is limited only by the noise of the amplifier and the measuring
technology because PI piezo nanopositioning systems are free of friction.
Adapter cables with LEMO connectors for sensor and operating voltage available.
P­611.ZS P­611.Z0 Unit Tolerance
Active axes Z Z
Motion and positioning
Integrated sensor SGS -
Travel range at -20 to +120 V,
open loop
120 120 µm +20 % /
-0 %
Travel range, closed loop 100 - µm
Resolution, open loop 0.2 0.2 nm typ.
Resolution, closed loop 2 - nm typ.
Linearity error 0.1 - % typ.
Repeatability <10 - nm typ.
Tilt θ
Z
(motion in Z) ±5 ±5 µrad typ.
Tilt θ
X
(motion in Z) ±20 ±20 µrad typ.
Tilt θ
Y
(motion in Z) ±5 ±5 µrad typ.
Mechanical properties
Stiffness 0.45 0.45 N/µm ±20 %
Resonant frequency, no load 460 460 Hz ±20 %
Resonant frequency under load,
30 g
375 375 Hz ±20 %
Resonant frequency under load,
100 g
265 265 Hz ±20 %
Push/pull force capacity 15 / 10 15 / 10 N max.
Drive properties
Ceramic type PICMA® P-885 PICMA® P-885
Electrical capacitance 1.5 1.5 µF ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 °C
Material Aluminum, steel Aluminum, steel
Dimensions 44 mm × 44 mm
× 27 mm
44 mm × 44 mm
× 27 mm