PI P-611 Series, Руководство пользователя

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10 Technical Data
36 Version: 1.2.0 PZ253E P­611 Positioners
P­611.1S P­611.10 Unit Tolerance
Drive properties
Ceramic type PICMA® P-885 PICMA® P-885
Electrical capacitance 1.5 1.5 µF ±20 %
Miscellaneous
Operating temperature
range
-20 to 80 -20 to 80 °C
Material Aluminum, steel Aluminum, steel
Dimensions 44 mm × 44 mm ×
17 mm
44 mm × 44 mm ×
17 mm
Mass 0.135 0.135 kg ±5 %
Cable length 1.5 1.5 m ±10 mm
Voltage connection LEMO LEMO
Sensor connection LEMO -
Recommended electronics
E-503, E-505,
E-610, E-621,
E-625, E-665,
E-836
E-503, E-505,
E-610, E-621,
E-625, E-665,
E-836
The resolution of the system is limited only by the noise of the amplifier and the measuring
technology because PI piezo nanopositioning systems are free of friction.
P­611.2S P­611.20 P­611.XZS P­611.XZ0 Unit Tolerance
Active axes X, Y X, Y X, Z X, Z
Motion and positioning
Integrated sensor SGS – SGS –
Travel range at -20 to
120 V, open loop
120 120 120 120 µm +20 % /
-0 %
Travel range, closed loop 100 – 100 – µm
Resolution, open loop 0.2 0.2 0.2 0.2 nm typ.
Resolution, closed loop 2 – 2 – nm typ.
Linearity error 0.1 – 0.1 – % typ.
Repeatability <10 – <10 – nm typ.
Pitch in X, Y ±5 ±5 ±5 ±5 µrad typ.
Tilt θ
X
(motion in Z) – – ±10 ±10 µrad typ.
Yaw in X ±20 ±20 ±20 ±20 µrad typ.
Yaw in Y ±10 ±10 – – µrad typ.
Tilt θ
Y
(motion in Z) – – ±10 ±10 µrad typ.