User Manual
F712T0002, valid for F-712.MA1 and F-712.MA2
Mma, BRo, 12/6/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
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Phone +49 721 4846-0, Fax +49 721 4846-1019, Email
Specifications
F-712.MA1 and F-712.MA2 Systems
F-712.MA1 / F-712.MA2
Unit
Number of active axes
6 / 12
Motion and positioning
Coarse positioning with spindle-driven axes
Active axes
X, Y, Z
Travel range in X, Y, Z
25, 25, 25
mm
Minimum incremental motion
3
µm
Max. velocity
20
mm/s
Sensor type
Rotary encoder
Guiding
Crossed roller guides
Drive type
DC motor
Fine positioning with piezo-driven axes
Active axes
X, Y, Z
Closed-loop travel in X, Y, Z
100
µm
Min. incremental motion, open-loop
0.3
nm
Min. incremental motion, closed-loop
2.5
nm
Linearity error, for the entire travel range*
2
%
Repeatability (bidirectional) 10% travel range
2
nm
Sensor type
Incremental
Drive type
PICMA®
Alignment
Scanning time of spiraled area scan 500 µm Ø**
<3 / <6
s
Scanning time of spiraled area scan 100 µm Ø**
<0.3 / <1
s
Scanning time of spiraled area scan 10 µm Ø**
<0.2 / <0.5
s
Signal optimization with gradient search, randomized with
±5 µm (repeatability < 0.01 dB)***
<0.3 / <0.3
s
Miscellaneous
Cable length
3
m
Technical data specified at 20 ±3 °C
* without polynomial linearization
** typical time span for scanning the entire area and moving to the highest intensity
*** reaching the global maximum after first light has been found
