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BG 5195 BEN / A (2011-05) TPG261.oi

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www.pfeiffer-vacuum.de
Instruction Sheet
Compact Cold Cathode Gauge IKR 261
BG 5113 BN
Pfeiffer Vacuum GmbH, D–35614 Asslar,
Deutschland

[9]

www.pfeiffer-vacuum.de
Instruction Sheet
Compact Cold Cathode Gauge IKR 270
BG 5115 BEN
Pfeiffer Vacuum GmbH, D–35614 Asslar,
Deutschland

[10] www.pfeiffer-vacuum.de

Instruction Sheet
Compact FullRange™ Gauge PKR 251
BG 5119 BN
Pfeiffer Vacuum GmbH, D–35614 Asslar,
Deutschland

[11] www.pfeiffer-vacuum.de

Instruction Sheet
Compact FullRange™ Gauge PKR 261
BG 5122 BN
Pfeiffer Vacuum GmbH, D–35614 Asslar,
Deutschland

[12] www.pfeiffer-vacuum.de

Instruction Sheet
Compact Process Ion Gauge IMR 265
BG 5132 BEN
Pfeiffer Vacuum GmbH, D–35614 Asslar,
Deutschland

[13] www.pfeiffer-vacuum.de

Instruction Sheet
Compact FullRange™ BA Gauge PBR 260
BG 5131 BEN
Pfeiffer Vacuum GmbH, D–35614 Asslar,
Deutschland

[14] www.pfeiffer-vacuum.de

Instruction Sheet
Compact Capacitance Gauge
CMR 261 … CMR275
BG 5133 BEN
Pfeiffer Vacuum GmbH, D–35614 Asslar,
Deutschland

Содержание TPG 261

Страница 1: ...BG 5195 BEN A 2011 05 A P A S S I O N F O R P E R F E C T I O N VACUUM TPG 261 SingleGauge Single Channel Measurement and Control Unit for Compact Gauges Operating Instructions...

Страница 2: ...D 35614 Asslar This document applies to products with part number PT G28 030 The part number No can be taken from the product nameplate This manual is based on firmware version 302 510 D If your unit...

Страница 3: ...e Operating Instructions The scope of delivery consists of following parts 1 TPG 261 Single Channel Measurement and Control Unit 1 Power cord 1 Connector for control connection 4 Collar screws and pla...

Страница 4: ...up 14 3 2 1 Rack Installation 14 3 2 2 Installation in a Control Panel 17 3 2 3 Use as Desk Top Unit 18 3 3 Mains Power Connector 19 3 4 Gauge Connector sensor 20 3 5 control Connector 21 3 6 relay Co...

Страница 5: ...Parameters 77 5 2 2 3 Gauge Control 82 5 2 2 4 General Parameters 83 5 2 2 5 Test Parameters 84 5 2 3 Example 90 6 Maintenance 91 7 Troubleshooting 92 8 Repair 93 9 Storage 94 10 Disposal 94 Appendix...

Страница 6: ...extensive equipment and environmental damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage The lamp display is lit The lamp display flashe...

Страница 7: ...ions and take the nec essary precautions for all work you are going to do and consider the safety instructions in this document DANGER DANGER mains voltage Contact with live parts is extremely hazardo...

Страница 8: ...if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modifications altera tions etc on the product use...

Страница 9: ...40 C Use indoors only max altitude 2000 m NN Pollution degree II Protection type IP30 Number 1 Compatible Compact Gauges Pirani Pirani Capacitance Cold Cathode FullRange CC Process Ion FullRange BA Ca...

Страница 10: ...ol via 3 keys via RS232C interface Measurement range depending on gauge 1 17 Measurement error gain error offset error 0 01 F S 0 01 F S Measurement rate 50 s Display rate 10 s Filter time constant sl...

Страница 11: ...60 VDC 1 A 30 W ohmic Service life mechanic electric 5 107 cycles 1 105 cycles at max load Contact positions 22 Relay connector D Sub appliance connector female 15 pin pin assignment 22 Number 1 Reac...

Страница 12: ...onnector female 7 pin pin assignment 21 Number 1 Voltage range 0 10 VDC Internal resistance 660 Measuring signal vs pressure depending on gauge 1 17 Control connector Amphenol C91B appliance connector...

Страница 13: ...BG 5195 BEN A 2011 05 TPG261 oi 13 228 5 2 5 310 111 6 68 1 VACUUM 3 5 55 9 70 8 122 5 128 5 For incorporation into a rack or control panel or as desk top unit 1 1 kg Dimensions mm Use Weight...

Страница 14: ...le damage do not put it into operation and make sure it is not inadvertently put into operation The TPG 261 is designed for installation into a 19 rack chassis adapter according to DIN 41 494 For this...

Страница 15: ...e the mechanical strain on the front panel of the TPG 261 preferably equip the rack chassis adapter with a guide rail For safe and easy installation of heavy rack chassis adapters preferably equip the...

Страница 16: ...m ambient tem perature 9 must not be exceeded neither the air circulation obstructed Rack chassis adapter Height 3 U o Slide the TPG 261 into the rack chassis adapter and fasten the adapter panel to t...

Страница 17: ...lations for switching cabi nets Take appropriate measures for the control panel to meet the specifications of the pro tection class For mounting the TPG 261 into a control panel the fol lowing cut out...

Страница 18: ...screws The TPG 261 is also suited for use as desk top unit For this purpose two self adhesive rubber feet as well as a slip on rubber bar are supplied with it n Stick the two supplied rubber feet to t...

Страница 19: ...in the event of a fault Connect the product according to the local regulations and ground it correctly The unit is supplied with a power cord If the mains con nector is not compatible with your system...

Страница 20: ...own screened electromag netic compatibility sensor cable Make sure the gauge you are connecting is compatible 9 Pin assignment of the female 6 pin Amphenol C91B ap pliance connector 1 2 3 4 5 6 1 2 5...

Страница 21: ...f the unit using your own screened electromagnetic compati bility cable Pin assignment of the female 7 pin Amphenol C91B ap pliance connector 1 3 2 5 4 6 7 8 6 4 7 5 2 1 3 Pin Signal 2 5 4 1 6 Analog...

Страница 22: ...Signal Switching function 1 4 3 2 Pressure below threshold Pressure above threshold or power supply turned off Switching function 2 7 6 5 Pressure below threshold Pressure above threshold or power sup...

Страница 23: ...on the rear of the unit using your own screened electromagnetic compatibility cable e g PC TPG 261 Chassis 2 RXD RXD 3 TXD TXD 5 GND Chassis GND Minimum configuration Pin assignment of the male 9 pin...

Страница 24: ...ated Measurement value in floating point or exponential format or status messages Measurement unit Parameter mode activated Warning error flashing Operator keys Switching function status Offset value...

Страница 25: ...performs a self test identifies the connected gauge activates the parameters that were in effect before the last power off switches to the Measurement mode adapts the parameters if required if anothe...

Страница 26: ...ng function parameter group for entering or displaying thresholds 33 Gauge parameter group for entering or displaying gauge parameters 37 Gauge control group for entering or displaying gauge control p...

Страница 27: ...andard operating mode of the TPG 261 Measurement values and statuses as well as the gauge identification are displayed in this mode Parameter mode 10 s Measurement mode Status Power on Measurement val...

Страница 28: ...ance Gauge PCR Cold Cathode Gauge IKR FullRange CC Gauge PKR Process Ion Gauge IMR FullRange BA Gauge PBR Capacitance Gauge CMR Piezo Gauge APR Press key 1 s The gauge is turned off is dis played inst...

Страница 29: ...Pressure p Measurement range If the TPG 261 is operated with linear gauges CMR 261 375 APR 250 267 negative pressures may be indicated Possible causes negative drift offset correction activated with...

Страница 30: ...ullRange CC Gauge PKR 251 PKR 261 Process Ion Gauge IMR 265 FullRange BA Gauge PBR 260 Capacitance Gauge CMR 261 CMR 375 Piezo Gauge APR 250 APR 267 No gauge connected no Sensor Connected gauge cannot...

Страница 31: ...parameter values as well as for testing the TPG 261 For ease of operation the parameters are di vided into groups Power on Parameter mode depending on history Switching function parameters Gauge para...

Страница 32: ...7 General parameters 52 Test parameters 56 Modifications of parameters come into effect immedi ately and are stored automatically Exceptions are men tioned under the corresponding parameters Selecting...

Страница 33: ...ing entering and editing threshold values of the two switching functions Measurement mode Parameter mode depending on history Switching function 1 lower threshold Switching function 1 upper threshold...

Страница 34: ...24 21 and can be evaluated via the floating contacts at the relay connector Pressure p Switching function On Off Time t Off 2 3 4 2 3 4 2 3 4 Display Measurement value The name of the parameter e g Sw...

Страница 35: ...w defines the pres sure at which the switching func tion is activated when the pres sure is dropping e g Gauge dependent table If another gauge type is con nected the TPG 261 automati cally adjusts th...

Страница 36: ...on is deactivated when the pres sure is rising e g Gauge dependent table If another gauge type is con nected the TPG 261 automati cally adjusts the threshold if required 10 lower threshold lower thres...

Страница 37: ...is used for displaying entering and editing parameters of the connected gauge Filter time constant Calibration factor Measurement range Offset Penning Underrange Control Pirani range extension 10 s De...

Страница 38: ...d parameter value is dis played Some parameters are not available for all gauges and thus not always displayed 38 40 41 42 43 45 46 depending on pressure Available for The measurement value filter per...

Страница 39: ...rence in measured values Pressure p Time t Normal Good relationship between re sponse and sensitivity of the display and the switching func tions to changes in the meas ured values Pressure p Time t S...

Страница 40: ...r Pirani Gauge TPR Pirani Capacitance Gauge PCR Cold Cathode Gauge IKR FullRange CC Gauge PKR Process Ion Gauge IMR FullRange BA Gauge PBR Capacitance Gauge CMR Piezo Gauge APR only for pressures 1 10...

Страница 41: ...r logarithmic gauges it is automatically recognized Available for Pirani Gauge TPR Pirani Capacitance Gauge PCR Cold Cathode Gauge IKR FullRange CC Gauge PKR Process Ion Gauge IMR FullRange BA Gauge P...

Страница 42: ...splayed measurement value the displayed threshold value of the switching functions the analog output at the control connector 21 Value Offset correction deactivated e g Offset correction activated Pre...

Страница 43: ...Capacitance Gauge CMR Piezo Gauge APR There is a number of possible causes of an underrange the pressure in the vacuum system is lower than the measurement range the measurement element has not ignite...

Страница 44: ...d The switching function changes to OFF Activate deactivate the underrange control If chances are that the pressure in the vacuum system drops below the measurement range of the gauge it is advisable...

Страница 45: ...ailable for Pirani Gauge TPR Pirani Capacitance Gauge PCR Cold Cathode Gauge IKR FullRange CC Gauge PKR Process Ion Gauge IMR FullRange BA Gauge PBR Capacitance Gauge CMR Piezo Gauge APR Value Normal...

Страница 46: ...ange Pirani Gauge TPR Pirani Capacitance Gauge PCR 5 10 5 1500 mbar Cold Cathode Gauge IKR FullRange CC Gauge PKR Process Ion Gauge IMR FullRange BA Gauge PBR Capacitance Gauge CMR Piezo Gauge APR Val...

Страница 47: ...entering and editing parame ters which define the activation deactivation of the connected gauge If the connected gauge cannot be controlled 49 this group is not available depending on history Gauge...

Страница 48: ...auge activation is displayed as long as the key is pressed or at least for 1 5 s Afterwards the currently valid parameter value is dis played Some parameters are not available for all gauges and thus...

Страница 49: ...A Gauge PBR Capacitance Gauge CMR Piezo Gauge APR Value Manual activation The gauge can be activated by pressing the key External activation The gauge is activated by an input signal fed via the contr...

Страница 50: ...IMR FullRange BA Gauge PBR Capacitance Gauge CMRx Piezo Gauge APR except for self control Value Manual deactivation The gauge is deactivated by pressing the key External deactivation The gauge is deac...

Страница 51: ...auge TPR Pirani Capacitance Gauge PCR Cold Cathode Gauge IKRx FullRange CC Gauge PKR Process Ion Gauge IMR FullRange BA Gauge PBR Capacitance Gauge CMR Piezo Gauge APR Adjustment range e g 10 5 10 2 m...

Страница 52: ...up general parameters is used for displaying entering and editing generally applicable system pa rameters Measurement unit Transmission rate Display resolution Default settings Parameter mode 10 s dep...

Страница 53: ...e key is pressed or at least for 1 5 s Afterwards the currently valid parameter value is dis played The parameters are available for all gauge types and thus always displayed 54 54 55 55 Available for...

Страница 54: ...sholds etc See Appendix 95 for conversion Value mbar bar Torr only available if Torr lock is not activated i e Torr is not suppressed 59 Pascal Transmission rate of the RS232C interface Value e g 9600...

Страница 55: ...igits or three inte grals When the PrE 46 is ON and the pressure is in the range p 1 0E 4 mbar the display resolution of the PCR Gauge is reduced by one decimal digit All user parameter settings are r...

Страница 56: ...and editing special parameter values and for running test programs This group is only avail able if the key was pressed while the TPG 261 was turned on Measurement mode Firmware version Watchdog contr...

Страница 57: ...59 59 Available for all gauges The name of the parameter is dis played as long as the key is pressed or at least for 1 5 s The firmware version is continuously displayed 60 60 61 61 62 62 63 64 Availa...

Страница 58: ...tes the modifi cation index A Z Please mention this index when contacting Pfeiffer Vacuum in the event of a prob lem Behavior of the system control watchdog in the event of an error Setting The system...

Страница 59: ...ing Measurement unit avail able Measurement unit not available The entry lock function prevents inadvertent entries in the Parameter mode and thus malfunctions Setting Entry lock function disabled Ent...

Страница 60: ...your local Pfeiffer Vacuum service center Test of the program memory Test sequence The test runs automatically one time Test in process Test finished no error found After the test a four digit checks...

Страница 61: ...the error message persists after several test sequences have been run please contact your local Pfeiffer Vacuum service center Test of the display Test sequence The test runs automati cally one time...

Страница 62: ...sitivity of the open meas urement circuit Test sequence e g Measuring signal in Volt Test of channel 1 of the analog digital converter with a reference voltage at the signal input of the sensor con ne...

Страница 63: ...control commands or messages are triggered by mistake The relays switch on and off cyclically The switching operations are indicated optically and can be heard The contacts of the switching functions...

Страница 64: ...No function Error relay Test of the RS232C interface The TPG 261 repeats each sign transmitted by the communicating HOST The data transferred from to the TPG 261 can be displayed by the computer only...

Страница 65: ...y inquiries or parameter modifications have been made the transmission of measured values can be started again with the COM command 72 Pin assignment of the 9 pin D Sub connector and RS232 interface c...

Страница 66: ...o beginning of line 13 0D LF LINE FEED Advance by one line 10 0A ENQ ENQUIRY Request for data transmission 5 05 ACK ACKNOWLEDGE Positive report signal 6 06 NAK NEGATIVE ACKNOWLEDGE Negative report sig...

Страница 67: ...end of mes sage ACK CR LF Positive acknowledg ment of a received message When requested with a mnemonic instruction the TPG 26x transmits the measurement data or parameters as ASCII strings to the HO...

Страница 68: ...parameters CR LF Transmits data with end of message The strings received are verified in the TPG 26x If an error is detected a negative acknowledgment NAK is output HOST TPG 26x Explanation Mnemonics...

Страница 69: ...ion 84 PRE Pirani range extension 81 PR1 Pressure measurement measurement data gauge 1 70 PR2 Pressure measurement measurement data gauge 2 70 PRX Pressure measurement measurement data gauge 1 and 2 7...

Страница 70: ...ve ACK CR LF Transmit ENQ Receive x sx xxxxEsxx CR LF Measurement value 1 in current pressure unit Status x 0 Measurement data okay 1 Underrange 2 Overrange 3 Sensor error 4 Sensor off IKR PKR IMR PBR...

Страница 71: ...e unit Status gauge 2 Measurement value gauge 1 1 in current pressure unit Status gauge 1 x 0 Measurement data okay 1 Underrange 2 Overrange 3 Sensor error 4 Sensor off IKR PKR IMR PBR 5 No sensor out...

Страница 72: ...yEsyy CR LF Measurement value gauge 2 1 in current pressure unit Status gauge 2 Measurement value gauge 1 1 in current pressure unit Status gauge 1 x 0 Measurement data okay 1 Underrange 2 Overrange 3...

Страница 73: ...ENQ Receive x x CR LF Identification gauge 2 x TPR Pirani Gauge or Pirani Capacitive gauge 1 IKR9 Cold Cathode Gauge 10 9 IKR11 Cold Cathode Gauge 10 11 PKR FullRange CC Gauge PBR FullRange BA Gauge I...

Страница 74: ...l Transmit ERR CR LF Receive ACK CR LF Transmit ENQ Receive xxxx CR LF xxxx 0000 No error 1000 Error Controller error See display on front panel 0100 NO HWR No hardware 0010 PAR Inadmissible parameter...

Страница 75: ...ceive x x x x CR LF List of all present error messages xx 0 No error 1 Watchdog has responded 2 Task fail error 3 EPROM error 4 RAM error 5 EEPROM error 6 DISPLAY error 7 A D converter error 9 Gauge 1...

Страница 76: ...hannel 2 1 Switching function 1 2 Switching function 2 3 Switching function 3 4 Switching function 4 1 Values can be entered in any format They are internally converted into the floating point format...

Страница 77: ...ching function 3 1 Status switching function 2 1 Status switching function 1 1 1 x 0 off 1 on Transmit FIL x x CR LF Gauge 2 x 0 fast 1 medium default 2 slow Gauge 1 Receive ACK CR LF Transmit ENQ Rec...

Страница 78: ...value of the measurement range Full Scale of linear gauges has to be defined by the user the full scale value of logarithmic gauges is automatically recognized Transmit FSR x x CR LF Gauge 2 x 0 0 01...

Страница 79: ...Gauge 2 Gauge 1 Transmit OFD sx xxxxEsxx sx xxxxEsxx CR LF Gauge 2 Offset 1 in current pressure unit default 0 0000 Gauge 1 1 Values can be entered in any format They are internally converted into th...

Страница 80: ...ault 1 on Gauge 1 Receive ACK CR LF Transmit ENQ Receive x x CR LF Gauge 2 Gauge 1 Transmit DGS x x CR LF Gauge 2 x 0 Degas off default 1 Degas on 3 min Gauge 1 Receive ACK CR LF Transmit ENQ Receive...

Страница 81: ...05 TPG261 oi 81 Transmit PRE x x CR LF Gauge 2 x 0 off default 1 on Messr hre 1 Receive ACK CR LF Transmit ENQ Receive x x CR LF Gauge 2 Gauge 1 PCR gauge only measurement range up to 5 10 5 mbar Pira...

Страница 82: ...deactivation 4 self control Controlling source for gauge activation x 0 no control 1 automatic activation 2 manual activation default 3 external activation 4 hot start Controlled gauge x 1 Gauge 1 2 G...

Страница 83: ...ered the report signal is transmitted at the new transmission rate Receive ACK CR LF Transmit ENQ Receive x CR LF Transmission rate Transmit DCD x CR LF Resolution x 2 Display x x 2 digits default 3 D...

Страница 84: ...pacitance gauge is combined with a linear gauge with 1000 mbar F S x 0 manual default 1 automatic Receive ACK CR LF Transmit ENQ Receive x CR LF Measurement display behavior For service personnel Tran...

Страница 85: ...error is automatically acknowledged and cancelled af ter 2 s Receive ACK CR LF Transmit ENQ Receive x CR LF Watchdog control Transmit TLC x CR LF x 0 off default 1 on Receive ACK CR LF Transmit ENQ Re...

Страница 86: ...e xxxx yyyy CR LF Check sum hex ERROR word Transmit EEP CR LF Receive ACK CR LF Transmit ENQ Starts the test duration 1 s Do not keep repeating the test EEPROM life Receive xxxx CR LF ERROR word Trans...

Страница 87: ...ENQ Receive x x xxxx x x xxxx x xxxx x xxxx CR LF ADC channel 4 identification Gauge 2 0 0000 5 0000 V ADC channel 3 Gauge 1 identification 0 0000 5 0000 V ADC channel 2 Measurement signal gauge 2 0 0...

Страница 88: ...triggered by mistake Transmit IOT x yy CR LF Relay status in hex format yy 00 All relays deactivated 01 Switching function relay 1 activated 02 Switching function relay 2 activated 04 Switching functi...

Страница 89: ...LF Receive ACK CR LF Transmit ENQ Receive xxxx CR LF Key 4 x 0 Not pushed 1 Pushed Key 3 Key 2 Key 1 Transmit RST CR LF Receive ACK CR LF Transmit ENQ Starts the test repeats each character test is in...

Страница 90: ...00E 09 9 0000E 07 CR LF Request for parameters of switching function 1 setpoint 1 Positive acknowledgement Request for data transmission Thresholds S SP1 1 6 80E 3 9 80E 3 CR LF E ACK CR LF Modificati...

Страница 91: ...e outside of the TPG 261 a slightly moist cloth will usually do Do not use any aggressive or scouring cleaning agents DANGER DANGER mains voltage Contact with live parts is extremely hazardous when li...

Страница 92: ...off Acknowledge with the key If the watchdog is set to the TPG 261 acknowledges the message automatically after 2 s 58 The watchdog has tripped because of a severe electric disturbance or an oper atin...

Страница 93: ...cause and remedy acknowledgement Operating system Task Fail error Acknowledge with the key If the problem persists after the message has been acknowledged for several times and or the gauge has been...

Страница 94: ...tal to the environment Products or parts thereof mechanical and electric components operating fluids etc can be detrimental to the environment Dispose of such substances in accordance with the relevan...

Страница 95: ...10 3 760 1 mbar Pascal Torr mmWs psi mbar 1 100 750 062 10 3 10 2 14 504 10 3 Pascal 10 10 3 1 7 5 10 3 0 102 0 145 10 3 Torr 1 333 133 322 1 13 595 19 337 10 3 mmWs 9 81 10 2 9 81 7 356 10 2 1 1 422...

Страница 96: ...1 oi The following values are activated when the default set tings are loaded 55 1000 mbar 1 00 log 1 000 lin normal off 0 10 2 mbar 1 10 11 mbar default off mbar 9600 2 Digit user off off Auto 9 10 1...

Страница 97: ...ate To be sure note your parameter settings before upgrading the firmware 96 n Turn the TPG 261 off o Connect the TPG 261 with the serial COM1 COM2 interface of your PC via a 9 pin D Sub extension cab...

Страница 98: ...used instead of the actual index n Unpack the self extracting file o If you have not connected the TPG 261 to the COM1 interface Open the batch file edit the interface and save the new setting p Star...

Страница 99: ...TPG 261 off Wait at least 10 s before turning the TPG 261 on again in order for it to correctly initialize it self The TPG 261 is now ready for operation To be sure check that the current parameter s...

Страница 100: ...35614 Asslar Deutschland 4 www pfeiffer vacuum de Operating Instructions Compact Pirani Capacitance Gauge PCR 260 BG 5180 BEN Pfeiffer Vacuum GmbH D 35614 Asslar Deutschland 5 www pfeiffer vacuum de O...

Страница 101: ...iffer Vacuum GmbH D 35614 Asslar Deutschland 11 www pfeiffer vacuum de Instruction Sheet Compact FullRange Gauge PKR 261 BG 5122 BN Pfeiffer Vacuum GmbH D 35614 Asslar Deutschland 12 www pfeiffer vacu...

Страница 102: ...Pfeiffer Vacuum GmbH D 35614 Asslar Deutschland 16 www pfeiffer vacuum de Operating Instructions Compact Capacitance Gauge CMR 371 CMR375 BG 5138 BEN Pfeiffer Vacuum GmbH D 35614 Asslar Deutschland 1...

Страница 103: ...47 gauge activation 49 gauge deactivation 50 OFF threshold 51 Gauge identification 30 Gauge parameters 37 calibration factor 40 Degas 45 measurement range 41 measurement value filter 38 offset 42 Pir...

Страница 104: ...ersion 95 Program update 97 version 2 58 R RAM test 60 relay connector 22 Repair 93 RS232 connector 23 RS232C test 64 S Safety 6 Scope of delivery 3 sensor connector 20 Serial interface connector 23 S...

Страница 105: ...nternational national standards and specifications EN 61000 3 2 2006 EMC limits for harmonic current emissions EN 61000 3 3 1995 A1 2001 A2 2005 EMC limitation of voltage changes voltage fluctuations...

Страница 106: ...43 1 894 17 04 office pfeiffer vacuum at Benelux Pfeiffer Vacuum GmbH Sales Service Benelux Tel 800 pfeiffer benelux pfeiffer vacuum de India Pfeiffer Vacuum India Ltd Tel 91 40 2775 0014 pfeiffer vsn...

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