Pfeiffer Vacuum Prisma QMS 200, Руководство по эксплуатации

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BG 805 201 BE (9911) QMS200.om
Safety
QME/QMA EN 61010-1:1993
IEC1010-1:1990 +A1:1992
Protection class I
SP 200 DIN EN 60950
IEC 950, UL 1950
CSA 22.2 Nr.234
EMV
Immunity EN 50082-2
Emission EN 50081-1
Operation Only in inside rooms
Altitude max. 2000 m NN
Protection IP 30
Pollution degree 2
Temperatures
Storage/transport -25°C...+70°C
Operation QME 0°C....+40°C
SP 0°C....+40°C
Relative humidity max. 80% up to 31°C,
linearly decreasing to 50% at 40°C
QMS 200 F1 QMS 200 F2 QMS 200 F3
Mass range u 1 ... 100 1 ... 200 1 ... 300
Detector type Faraday
Detection limit mbar
<1
×
10
-12
<2
×
10
-12
<4
×
10
-12
Unit resolution (valley,
full mass range)
at 10 % peak height
adjustable to
%
u
<10
0.5 ... 2.5
Sensitivity to Argon A/mbar
>1
×
10
-3
>6
×
10
-4
>3
×
10
-4
Contribution to
neighboring mass
40/41
ppm <10 <20 <50
Max. operating
pressure mbar
1
×
10
-4
Reproducibility of peak
ratio (constant
conditions over 8 h, N
2
and Ar from air)
% ±0.5
QMA operating
temperature
°C 0 ... +150
Bakeout temperature
(QME removed)
°C max. +200
HS ion source Open type, radial symmetric, 2 thoriated
iridium filaments (tungsten optional),
degassing by electron bombardment (10 mA,
300 V)
Mounting orientation
any ( → 15)
Weight kg 3 (3.3 at 90° connection)
Connection flange DN 40 CF
2.6 Standards complied
with
2.7 Ambient conditions
2.8 QMS 200 F