Pfeiffer Vacuum Prisma QMS 200, Руководство по эксплуатации

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BG 805 201 BE (9911) QMS200.om
3
Table of contents
Product identification 2
Validity 2
Intended use 2
Training 2
1 Safety 4
1.1 Symbols used 4
1.2 Personnel qualifications 5
1.3 General safety instructions 5
1.4 Liability and warranty 5
2 Technical data 6
2.5 System overview 6
2.6 Standards complied with 8
2.7 Ambient conditions 8
2.8 QMS 200 F 8
2.9 QMS 200 M 9
2.10 QME 200 9
2.11 SP 200 10
2.12 Pin assignment 10
3 Installation 12
3.1 Unpacking 12
3.2 Montage 12
3.2.1 Required space 13
3.2.2 Required tools 14
3.2.3 QMA installation 15
3.2.4 QME installation 16
3.3 Electrical connections 16
3.3.1 QME connection 16
3.3.2 Connecting the SP 200 power supply to Prisma 19
3.3.3 Connecting the PC 20
3.4 Installing the software 20
4 Operation 21
4.1 Commissioning 21
4.2 Configuration 22
5 Maintenance 23
5.1 QMA 23
5.1.1 Filament change 23
5.2 QME 24
5.2.1 Cleaning 24
5.2.2 Replacing the filter mat 25
5.2.3 “TUNE” of RF generator 26
5.2.4 Optimizing the ion source sensitivity 26
5.2.5 Replacing the QME 27
6 Accessories and spare parts 28
7 Disposal 29
Appendix 30
A: LAN Interface 30
B: Literature 31
Declaration of contamination 32
Declaration of conformity 33
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