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Pfeiffer Vacuum Prisma QMS 200, Руководство по эксплуатации

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BG 805 201 BE     (9911)     QMS200.om

3 Installation

Note

Store the transport fastening devices and re-install them before
transporting the product again.

DANGER

Voltages up to 330 VDC appear on the QMA 200 during operation.
Other parts in the vacuum chamber (e.g. gauges) may possibly be exposed to
this voltage under unfavorable conditions. If as a result such parts (including the
lines and connected equipment!) become hazardous, they must be arranged or
protected in such a way that no sparkover and charge transfer can occur.

If the QMA can be touched while the vacuum system is open, additional
protection is needed, e.g.:

•

  mechanical protection against touching

•

  forced disconnection of the SP 200 power supply when the system is opened.

DANGER

No external hazardous voltages are allowed to be transferred to the electrodes of
the QMA 20. If such danger sources exist in the vacuum chamber, additional
safety measures (e.g. better placement, shielding, grounding, etc.) must be taken
that reliable preclude such influences. Also lower external voltages acting on the
QMA may damage the electronics and lead to unreliable measurement results.
Suitable precautions are to be taken as mentioned above.

WARNING

The QMA must be correctly installed from a vacuum engineering point of view,
i.e. the gases to be detected must have unhindered access to the analyzer.
Vacuum coating of the analyzer must be prevented.

Note

Make sure you adhere to the special requirements concerning cleanliness and
damage prevention when working with vacuum components.

3.1 Unpacking

3.2 Montage

Содержание Prisma QMS 200

Страница 1: ...Operating manual incl Declaration of conformity BG 805 201 BE 9911 1 QMS 200 Quadrupole mass spectrometer Prisma Installation Operation Maintenance Technical data PRODUCT SERVICE geprüfte Sicherheit ...

Страница 2: ...nneltron M 200 Prisma with 90 connection PT D28 508 QME 200 Faraday M 300 Prisma with 90 connection PT D28 509 QME 200 Channeltron M 300 Prisma with 90 connection PT D28 510 QME 200 Faraday M 100 Prisma with 90 connection PT D28 511 QME 200 Channeltron M 100 Prisma with 90 connection B 5181 408 KY SP 200 The part number can be taken from the nameplate This document is based on the firmware version...

Страница 3: ... 3 2 4 QME installation 16 3 3 Electrical connections 16 3 3 1 QME connection 16 3 3 2 Connecting the SP 200 power supply to Prisma 19 3 3 3 Connecting the PC 20 3 4 Installing the software 20 4 Operation 21 4 1 Commissioning 21 4 2 Configuration 22 5 Maintenance 23 5 1 QMA 23 5 1 1 Filament change 23 5 2 QME 24 5 2 1 Cleaning 24 5 2 2 Replacing the filter mat 25 5 2 3 TUNE of RF generator 26 5 2 ...

Страница 4: ...can be extremely hazardous in the event of a fault Connect the product according to the local regulations and ground it correctly Note Caution dirt sensitive area Dirt causes malfunctions or failures Always wear clean lint free gloves and use clean tools when working in this area Note Store the transport fastening devices and re install them before transporting the product again please contact you...

Страница 5: ...do and consider the safety instructions in this document Before you begin to work find out whether any vacuum components are con taminated Adhere to the relevant regulations and take the necessary precau tions when handling contaminated parts Communicate the safety instructions to other users Pfeiffer assumes no liability and the warranty becomes null and void if the end user or third parties disr...

Страница 6: ...formation of all assemblies into the nameplate replicas in this manual 2 5 System overview QME 200 QME 200 with 90 connection QMA 200 F Faraday QMA 200 M Channeltron Typ QME 200 No BG D28 F No 24 V 2 A Pfeiffer Vacuum D 35614 Asslar Typ QME 200 No BG D28 F No 24 V 2 A Pfeiffer Vacuum D 35614 Asslar Typ No F No Pfeiffer Vacuum D 35614 Asslar Typ No F No Pfeiffer Vacuum D 35614 Asslar ...

Страница 7: ...BG 805 201 BE 9911 QMS200 om 7 Balzers Limited FL 9496 Balzers QUADSTAR 422 Version 6 xx No BN 882 236 T Copyright C 28 SP 200 Power cable Software Balzers Quadstar Accessories ...

Страница 8: ...araday Detection limit mbar 1 10 12 2 10 12 4 10 12 Unit resolution valley full mass range at 10 peak height adjustable to u 10 0 5 2 5 Sensitivity to Argon A mbar 1 10 3 6 10 4 3 10 4 Contribution to neighboring mass 40 41 ppm 10 20 50 Max operating pressure mbar 1 10 4 Reproducibility of peak ratio constant conditions over 8 h N2 and Ar from air 0 5 QMA operating temperature C 0 150 Bakeout temp...

Страница 9: ...eight kg 4 4 4 7 at 90 connection Connection flange DN 40 CF Measurement channels 64 Measurement modes Scan analog Scan Bargraph MID Measurement cycles Mono Multichannel 1 9999 Cycles or Repeat Measurement data buffer 128 Kbytes MID dwell 10 ms 60 s Measurement speed Scan analog Bargraph Peak Scan Bargraph Stair 200 ms u 60 s u 20 ms u 60 s u Electrometer amplifier 10 5 10 12 A f s fix and autoran...

Страница 10: ... contact the connector housing The opposite end should remain open or be grounded so that no damaging compensating currents can occur control Pin Assignment Pin Assignment D Sub H Density 15 pin female 1 AO_CH 1 9 AI_CH 1 2 AO_CH 2 10 EXT_RUN 3 AO_CH 3 11 REL_1A 4 AO_CH 4 12 REL_1B 5 AO_COM 13 REL_2A 6 AI_CH 0 14 REL_2B 7 AI_CH 0 15 GND 8 AI_CH 1 Case Shield WARNING When this connection is used a ...

Страница 11: ... a shielded cable is required for EMC reasons The shield must contact the connector housing The opposite end should remain open or be grounded so that no damaging compensating currents can occur 24 V DC Pin Assignment 3 pin female 1 24 V DC 2 GND 3 GND Case Screen QMA Pin Assignment 13 pin male 1 Reserve 2 Extr 3 Focus 4 HV 5 Filament 1 6 Filament 2 7 Anode 8 RF 9 GND 10 GND 11 RF 12 Filament Comm...

Страница 12: ... of the SP 200 power supply when the system is opened DANGER No external hazardous voltages are allowed to be transferred to the electrodes of the QMA 20 If such danger sources exist in the vacuum chamber additional safety measures e g better placement shielding grounding etc must be taken that reliable preclude such influences Also lower external voltages acting on the QMA may damage the electron...

Страница 13: ...diameter 37 mm otherwise short circuits to the wall can occur The diameter of the extension tube for the QMA 200 M must be at least 40 5 mm 3 2 1 Required space Faraday Channeltron Faraday Prisma with 90 connection Faraday ø37 228 83 100 DN 40 CF F KA 118 184 130 141 127 5 228 100 DN 40 CF F KA 138 ø37 118 54 6 27 313 141 127 5 ø37 118 228 54 100 141 127 5 DN 40 CF F KA 117 ...

Страница 14: ...m hexagon socket screw key 10 mm open end wrench 2 pieces Screwdriver blade width 3 4 mm Prisma with 90 connection Channeltron Faraday SP 200 3 2 2 Required tools 228 100 DN 40 CF F KA 139 ø37 130 54 6 27 313 83 141 127 5 3000 56 80 165 ...

Страница 15: ...zontally with the guiding groove downward This results in optimum protection of the QME against falling objects and affords easy installation and excellent access to the front panel On the Prisma with 90 connection this results in a vertically suspended arrangement of the QME 200 QMA 200 F QMA 200 M 3 2 3 QMA installation Removing the transport brace and flanging the analyzer to the vacuum chamber...

Страница 16: ... Firmly tighten the two hexagon socket head screws These screws secure the QME mechanically and ensure electrical safety by providing ground contact WARNING All electrical connections must have cable strain relief Route the cables separately from EMI sources WARNING For reasons of electromagnetic compatibility a single central grounding point is strongly recommended for all connected units pumping...

Страница 17: ...nd off as a function of the total pressure EXT_PROT The SEM and filament supplies are turned off when the specified total pressure threshold Protection is exceeded They are turned on under software control if the total pressure is below the power off threshold INTERN Turned on and off under software control If no gauge head is connected the filament and Channeltron can be controlled by a floating ...

Страница 18: ...e four control methods Communication line QMS 200 4 Frame No 60 not supported by Balzers Quadstar INTERN The measurement cycle is started and stopped under software control EXT AUTO The start is initiated with the positive edge of the EXT_RUN signal The measurement cycle continues until it is canceled with halt or until the preset number of measurement cycles has been performed EXT NORM The start ...

Страница 19: ...be controlled directly by the software e g for outputting calculated concentration values Signal designation AO_CH 1 AO_COM AO Channel 1 AO_CH 2 AO_COM AO Channel 2 AO_CH 3 AO_COM AO Channel 3 AO_CH 4 AO_COM AO Channel 4 2 differential high impedance analog inputs They can be assigned to measurement channels or be read directly by the software Signal designation AI_CH 0 AI_CH 0 AI Channel 0 AI_CH ...

Страница 20: ...xist yet 3 3 3 Connecting the PC 3 4 Installing the software n Open the enclosed Balzers QuadstarTM software package o Remove the enclosed cables p Establish the connections RS 232 C Interface Use the supplied 9 conductor null modem cable If required use the extension cable and or the DB9 male DB25 female Adapter Balzers QuadstarTM 1 LAN interface If a LAN interface is used 29 Balzers QuadstarTM 1...

Страница 21: ...st not be defeated by an extension cable without protective ground conductor WARNING Check the vacuum in the QMA before you insert the power plug of the SP 200 Required vacuum conditions 10 4 mbar with Faraday type 10 5 mbar with Channeltron type If you use the compact gauge head connected to the QME the power plug may be inserted without checking the vacuum conditions But do not turn on the Emiss...

Страница 22: ...starTM 1 The system must be configured when it is put into service for the first time n With a double click open the RGA program o Follow the instructions on the screen Balzers QuadstarTM Chapter 11 1 Within the RGA program the Prisma works with standard parameters For achieving optimum results with user defined parameters 26 Note The system can be configured with or without QMS However the QMS sh...

Страница 23: ...rming the same steps described in Chapter 3 2 5 but in reverse order p Detach the analyzer from the vacuum chamber q Place the analyzer into the supplied mounting tool r Grip the U sections with flat nose pliers and loosen the screws so that the U sections are just being kept in position by the screws s Take off the 3 nuts t Carefully pull the filament assembly upward u Dispose of the used filamen...

Страница 24: ...n the setscrews and tighten them with the special socket wrench z Grip the U sections with flat nose pliers introduce the electrical connections of the filament laterally at the U sections and tighten the screws The dust filter at the air intake must be cleaned whenever there is clearly visible contamination Use a vacuum cleaner to extract the dust from the filter For this work it is not necessary...

Страница 25: ...source and detach all electrical connections to the QME o Separate the QME from the analyzer by performing the same steps as described in Chapter 3 2 4 QME installation but in reverse order p Set the QME on a flat surface with the front panel facing upward tune control LAN ready 24V RS 232 C VACUUM q Unfasten the screws illustrated in the drawing do not lose the lock washers and remove the front p...

Страница 26: ... LED flashes In case of severe detuning it is on continuously In this case turn clockwise to the stop and continue with b Turn the tuning screw a Clockwise until the LED is on b Counterclockwise until the LED is off Continue turning until the LED is on again c Turn clockwise by one full turn d The RF generator is now tuned q Reinstall the cap The ion source sensitivity should be optimized when the...

Страница 27: ...V Set FIELD AXIS as follows 1 Set to 8 V 2 Reduce the voltage so that the peak intensity drops to about 1 of the original value 3 Increase the voltage by 3 V 4 If the peak structure is too pronounced reduce the voltage accordingly The ion source is now optimized x When working with a new ion source repeat v after several hours of operation y Quit the Ion source window and save the data If the QME ...

Страница 28: ...ngsten E E BN 846 138 T BN 846 139 T 9 Misc ion source small parts Z 10 Ion source HS Ir HS Wo Tungsten E E BN 846 137 T BN 846 279 T 11 Hexagon screw M6 35 Z N 3015 349 X 12 Hexagon nut M6 Z N 3415 043 X4 13 Washer M6 Z N 3502 418 X 14 Cu seal DN 40 CF Z BP 414 606 T 15 QMA mounting tool Z BG 444 456 Channeltron E BN 846 182 T SP 200 E B 5181 408 KY ARCNET board for PC AT OPA 200 A B 5278 503 KT ...

Страница 29: ...levant local regula tions N WARNING Caution substances detrimental to the environment Products operating fluids etc may require disposal in accordance with special regulations Dispose of such substances in accordance with the relevant local regulations After disassembling the product separate its components according to the following criteria Contaminated components radioactive toxic caustic or bi...

Страница 30: ... OPA 200 3 r m i n 1 5 m m o Connect PC Prisma Note For fiber optic conductors with length 750 m factory configuration For fiber optic conductors with length 750 m reconfiguration required please contact your nearest Pfeiffer Vacuum service center p Connection via HUB OHA 200 OHA 200 2 A LAN Interface OHA 200 Pfeiffer Vacuum ...

Страница 31: ...Operating manual Optical Hub OHA 200 BG 803 055 BE 9612 Balzers AG 9496 Balzers Principality of Liechtenstein 3 Operating manual Network controller board OPA 200 SH ARC BAL 9603 SoHard Gesellschaft für Soft und Hardware Entwicklung mbH D 90766 Fürth Germany 4 Communication protocol BG 805 203 BE Pfeiffer Vacuum GmbH D 35614 Asslar B Literature ...

Страница 32: ...armful substances no yes The repair and or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay This declaration can only be completed and signed by authorized and qualified staff Harmful substances gases and or by products Please list all substances gases and by products which may have come ...

Страница 33: ...provisions of the listed Guidelines Guidelines harmonised standards national standards in languages and specifica tions which have been applied 73 23 EWG 7 93 89 336 EWG 7 93 EN 61010 1 1993 EN 50081 1 1992 EN 50082 2 1994 Asslar 7 September 1999 Wolfgang Dondorf Managing director Product EU Declaration of Conformity as defined by the listed Guidelines Signature ...

Страница 34: ...34 BG 805 201 BE 9911 QMS200 om ...

Страница 35: ...BG 805 201 BE 9911 QMS200 om 35 ...

Страница 36: ...Pfeiffer Vacuum GmbH Emmeliusstrasse 33 D 35614 Asslar Deutschland Tel 49 0 6441 802 0 Fax 49 0 6441 802 202 Original German BG 805 201 BD 9911 info pfeiffer vacuum de www pfeiffer vacuum de ...

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