Pfeiffer Vacuum Prisma QMS 200, Руководство по эксплуатации

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BG 805 201 BE (9911) QMS200.om
If SEM+FIL control is not used, the input can be used as a digital input for a
floating contact between the signal lines EXT_PROT and COM. In this case the
configuration parameter SEM+FIL must be set to INTERN.
Logic assignment: Contact open:
→ DI 0 = true
Contact closed: →
DI 0 = false
Digital input Digital outputs
Analog inputs
Analog outputs
• External
measurement
cycle start or
•
Free digital
input
(a second digital
inputs is available
according to the
connection)
Switching thresholds
or e.g. valve
open/close Reading of
measured values,
e.g. pressure,
temperature, gas
flow
• Measured
values, e.g. ion
currents
•
Calculated
values, e.g.
concentration
Specifications and connector pin assignment → 9
,
10
External measurement cycle start with a floating contact between the signal lines
EXT_RUN and GND. There are four control methods:
→ Communication line QMS 200: [4]
(Frame No. 60; not supported by Balzers Quadstar™):
INTERN:
The measurement cycle is started and stopped under software control
EXT-AUTO:
The start is initiated with the positive edge of the EXT_RUN signal. The
measurement cycle continues until it is canceled with <halt> or until the preset
number of measurement cycles has been performed.
EXT-NORM
The start is initiated with the positive edge of the EXT_RUN signal. The
measurement cycle keeps running as long as the trigger level is high or until it is
canceled <halt> or until the preset number of cycles has been performed.
EXT-SNGL:
The start is initiated with the positive edge of the EXT_RUN signal. However, the
unit must first be prepared by entering <run>. The measurement cycle continues
until it is canceled with <halt> or until the preset number of measurement cycles
has been performed.
Digital input
3.3.1.2 control connection
External measurement cycle
start
Parameter: cycle /TRIG
tune
control
LAN
ready
24V
RS-232-C
VACUUM