Pfeiffer Vacuum HISCROLL 12, Руководство по эксплуатации

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16 Technical data and dimensions
16.1 General
Basis for the technical data of Pfeiffer Vacuum spiral vacuum pumps:
● Specifications according to PNEUROP committee PN5
● ISO 21360-1 2016: “Vacuum technology - Standard methods for measuring vacuum-pump per-
formance - Part 1: General description”
● Integral leakage rate with 100 % helium concentration, 10 s measurement duration
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1
1 · 10 -3
100 1 0.1 0.75
bar 1000 1
1 · 10
5 1000 100 750
Pa 0.01
1 · 10 -5
1 0.01
1 · 10 -3 7.5 · 10 -3
hPa 1 1 · 10 -3 100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33
1.33 · 10
-3 133.32 1.33 0.133 1
1 Pa = 1 N/m 2
Tbl. 27: Conversion table: Pressure units
mbar l/s
Pa m 3 /s
sccm Torr l/s
atm cm 3 /s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m
3
/s
10 1 592 7.5 9.87
sccm
1.69 · 10 -2 1.69 · 10 -3
1
1.27 · 10 -2 1.67 · 10 -2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm 3 /s
1.01 0.101 59.8 0.76 1
Tbl. 28: Conversion table: Units for gas throughput
16.2 Technical data
Performance data
● The
tested base pressure is measured during quality control prior to delivery using a
gas-type-independent measuring device (according to ISO 21360).
Selection field HiScroll 6, scroll
pump, standard in-
cluding ATEX
HiScroll 6, scroll
pump, without GB,
including ATEX
HiScroll 6, scroll
pump, with auto-
mated GB
ATEX-certification Ex II 3/-G Ex h IIC T4
Gc X +5 °C ≤ T
a
≤ +40
°C
Ex II 3/-G Ex h IIC T4
Gc X +5 °C ≤ T
a
≤ +40
°C
–
Part number PD S10 000 PD S10 001 PD S10 002
Connection flange (in) DN 25 ISO-KF DN 25 ISO-KF DN 25 ISO-KF
Connection flange (out) DN 25 ISO-KF DN 25 ISO-KF DN 25 ISO-KF
Cooling method Air, Forced convection Air, Forced convection Air, Forced convec-
tion
Tested base pressure
1.5 · 10 -2 hPa 1.5 · 10 -2 hPa 1.5 · 10 -2 hPa
Intake pressure max. 1100 hPa 1100 hPa 1100 hPa
Recommended continu-
ous inlet pressure, max.
200 hPa 200 hPa 200 hPa
Exhaust pressure, max. 1500 hPa 1500 hPa 1500 hPa
Pumping speed 6.1 m³/h 6.1 m³/h 6.1 m³/h
Technical data and dimensions
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