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Safety

5

2

Safety

2.1

Safety precautions

Do not expose any body parts to the vacuum.

Observe all safety and accident prevention regulations.

Regularly check the proper observance off all safety measures.

Power supply:

 The turbopump power supply must apply to the requirements of dou-

ble insulation between mains input voltage and operating voltage according to the reg-
ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use 
exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum 
is able to guarantee the compliance of the European and North American guidelines.

A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).

Duty to inform

Each person involved in the installation, operation or maintenance of the vacuum pump 
must read and observe the safety-related parts of these operating instructions.

The operator is obligated to make operating personnel aware of dangers originating 
from the vacuum pump, the pumped medium and the entire system.

Installation and operation of accessories

Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in 
the operating instructions of the individual components.

For information on order numbers of components, see "Accessories".

Use original accessory parts only.

NOTICE

Checking the safety system against excess rotation speed

To  provide the functioning of the integrated safety system for avoiding excess rotation 
speed, the pump must run-up from the standstill at least once a year.

Switch off the pump and await the complete standstill (rotation speed = 0 Hz).

Run-up the pump according to this operating instructions.

WARNING

Danger of unsafe electrical installation

Safe operation after installation is the responsibility of the operator.

Do not independently modify or change the pump and electrical equipment.

Make sure that the system is integrated in an emergency off safety circuit.

Consult Pfeiffer Vacuum for special requirements.

WARNING

Danger due to lack of power disconnection device as defined in SEMI-S2

Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.

Fit a circuit breaker with an interruption rating of min. 10,000 A.

WARNING

Danger of electric shock

In case of defect, the parts connected to the mains supply are under voltage.

Always keep the mains connection freely accessible so you can disconnect it at any 
time.

Содержание HiPace 800 P

Страница 1: ...Translation of the original instructions Operating Instructions EN PT 0319 BEN F 1211 HiPace 800 P Turbopump...

Страница 2: ...on 23 6 1 Commissioning 23 6 2 Operation modes 23 6 3 Function description 23 6 4 Monitoring of the operation conditions 24 6 5 Switching off and venting 25 7 Maintenance replacement 26 7 1 Maintenanc...

Страница 3: ...m operating instructions are the result of risk evaluations and hazard analyses and are oriented on international certification stan dards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 48...

Страница 4: ...acuum flange Fore vacuum flange Electric connection Cooling water connection Venting connection Sealing gas connection Prohibition of an action or activity in connection with a source of danger the di...

Страница 5: ...ance of connected devices are described in detail in the operating instructions of the individual components For information on order numbers of components see Accessories Use original accessory parts...

Страница 6: ...s vacuum pumps components or operating fluids can be con taminated by toxic reactive or radioactive substances Wear adequate protective equipment during maintenance and repairs or in case of reinstall...

Страница 7: ...ure operation of the devices in areas with ionizing radiation operation in potentially explosive areas use of the devices in systems in which impact like stress and vibrations or periodically forces a...

Страница 8: ...ore connection Keep the original protective covers Always transport the turbopump in an upright position 3 2 Storage Close the flange openings by using the original protective covers Close further con...

Страница 9: ...information from the rating plate available Fig 1 Example for a rating plate Scope of delivery HiPace 800 P with TC 400 and 48 V DC 5 Mating plug for the connection remote on the TC 400 type dependent...

Страница 10: ...s the drive power au tomatically Depending on the application and the HiPace different cooling variants are selectable Rotor bearing Hybrid bearing TurboDrag pump High vacuum side maintenance free per...

Страница 11: ...ic field 6 mT Overvoltage category II Connection voltage electronic drive unit depending on the variant 48 V DC 5 Remarks to ambient conditions The specified permissible ambient temperatures apply to...

Страница 12: ...time All flange components must be grease free dust free and dry at installation The operating fluid reservoir is already installed and filled for the turbopump HiPace 800 P Earthquake safety An eart...

Страница 13: ...acuum flange should always point vertically downward 25 Fig 4 Recommended orientation of the fore vacuum flange The maximum axial loading capacity of the high vacuum flange is 1000 N equals 100 kg A o...

Страница 14: ...eiffer Vacuum accessories programme protection screen or splinter shield are optionally Hexagon screw and blind hole Mind that the sealing surfaces are not damaged Connect the flanges according to the...

Страница 15: ...unting kit of the Pfeiffer Vacuum accessories programme A copper seal protection screen or splinter shield are optionally Stud screw and blind hole If used Insert protective screen or splinter shield...

Страница 16: ...voltage of the turbopump is valid Switch off switch S1 on the power pack position 0 Insert the connection cable with the socket in the connection DC in on the electronic drive unit and close the bayon...

Страница 17: ...ffer Vacuum range of accessories Connect the adapter to the appropriate red coded connection on the TC 400 Settings can be made via the interfaces of the TC 400 remote RS 485 Profibus or DeviceNet Ove...

Страница 18: ...sh the mains supply for the relay box according to the accessory operating in structions Make sure the supply voltage for the backing pump is valid WARNING Damage to health due to poisonous gases Proc...

Страница 19: ...case of shut down or power failure The permissible connection pressure is max 150 kPa absolute Unscrew the venting screw with seal ring from the venting connection Screw in the venting valve with sea...

Страница 20: ...Observe the tightening torque for the fixing screw Tightening torques for fixing screws of heating jackets Plug in and fix the accessory s control lead to the corresponding accessory connection port...

Страница 21: ...e amounts 17 5 20 sccm for the HiPace 800 P Sealing gas supply with control valve Unscrew the locking screw with seal ring out of the sealing gas connection Screw the sealing gas valve with seal ring...

Страница 22: ...ng water connection Socket connection Hose lines External diameter 8 mm Internal diameter 6 mm Cooling water quality filtrated mechanically clean optically clear no turbidity no sediments chemical ly...

Страница 23: ...tion without operating unit Operation via remote connection Operation via RS 485 and Pfeiffer Vacuum display and control units or PC Operation via field bus 6 3 Function description Operation without...

Страница 24: ...he DCU 400 Settings are possible via the RS 485 by using DCU HPU or PC Operation via field bus Integrating and operating Pfeiffer Vacuum turbopumps in the customer s field bus system is possible for e...

Страница 25: ...tions of the electronic drive unit Settings are possible via the RS 485 by using DCU HPU or PC 1 When mains power is restored the venting procedure is aborted Basic information for the rapid venting V...

Страница 26: ...id by pumped media is possible Poisoning hazard through contact with materials that damage health In the case of contamination carry out appropriate safety precautions in order to pre vent danger to h...

Страница 27: ...cloth Do not use any cleaning fluids Using tweezers insert new Porex rods 9 pieces Insert the new operating fluid reservoir with its felt side towards the splash nut into the bearing mounting For the...

Страница 28: ...of a redundant safety system for avoiding excess rotation speeds Adjust the parameter P 777 according to the pump type Alternatively If no display and control unit is available please use the SpeedCon...

Страница 29: ...ve Pfeiffer Vacuum Service clean the turbopump completely If necessary have the bearings replaced Take into account the total running time Change the operating fluid reservoir Installation and commiss...

Страница 30: ...via interface RS 485 Please refer to operating instructions of the electronic drive unit Voltage drop in the cable too high Use a suitable cable Pump does not attain the final rotational speed within...

Страница 31: ...0 l s Leave electronic drive on the pump Close the flange openings by using the original protective covers If possible send pump or unit in the original packaging Sending of contaminated pumps or devi...

Страница 32: ...te when ordering accessories or spare parts Item Designation Size Order number Notes Pieces Order qty 7 Operating fluid reservoir PM 143 452 T incl Porex rods 1 8 Electronic drive unit TC 400 accordin...

Страница 33: ...PM 061 371 T Backing pump relay box single phase 5 A for TC 400 1200 and TM 3000 PM 061 374 T PM 061 374 T PM 061 374 T Backing pump relay box single phase 20 A for TC 400 1200 TCP 350 and TM 3000 PM...

Страница 34: ...F F PM 016 687 T Set of stud screws for trough hole DN 200 CF F PM 016 688 T Set of stud screws for trough hole DN 200 CF F PM 016 736 T Mounting kit for HiPace 1200 and HiPace 1800 DN 200 ISO F inclu...

Страница 35: ...1 Pa 1 N m2 mbar l s Pa m3 s sccm Torr l s atm cm3 s mbar l s 1 0 1 59 2 0 75 0 987 Pa m3 s 10 1 592 7 5 9 87 sccm 1 69 10 2 1 69 10 2 1 1 27 10 2 1 67 10 2 Torr l s 1 33 1 33 78 9 1 1 32 atm cm3 s 1...

Страница 36: ...level 50 dB A 50 dB A 50 dB A Relative humidity of air 5 85 non condensing 5 85 non condensing 5 85 non condensing Protection category IP 54 IP 54 IP 54 Connection pressure max for venting sealing ga...

Страница 37: ...130 131 203 5 212 179 5 148 181 45 45 1 1 7 150 208 59 16 7 30 M8 6x DN 25 ISO KF G 1 4 8 145 5 DN 200 ISO K 150 208 59 16 7 M8 6x 8 145 5 181 131 148 179 5 212 203 5 DN 200 ISO F HV DN 25 ISO KF G 1...

Страница 38: ...ive Elec tromagnetic Compatibility 2004 108 EC The agent responsible for compiling the technical documentation is Mr J rg Stanzel Pfeiffer Vacuum GmbH Berliner Stra e 43 35614 A lar HiPace 800 P Guide...

Страница 39: ...e the only supplier of vacuum technology that provides a complete product portfolio Benefit from our know how and our portfolio of training opportunities We can support you with your plant layout and...

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