Pfeiffer Vacuum HiPace 800 P, Руководство по эксплуатации

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Technical data and dimensions
35
13 Technical data and dimensions
13.1 General
Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps:
● Recommendations of PNEUROP committee PN5
● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum-
pump performance - General description"
● ISO 5302; 2003: "Vacuum technology - Turbomolecular pumps - Measurement of per-
formance characteristics"
● Ultimate pressure: using a test dome and a 48 hrs. period of baking out
● Gas throughput: water cooling; backing pump = rotary vane pump (10 m
3
/h)
● Cooling water consumption: at max. gas throughput, cooling water temp. 25 °C
● Integral leak rate: using a Helium concentration of 100 %, period 10 s
● Sound pressure level: Distance 1 m to the pump
Conversion table: pressure units
Conversion table: gas throughput units
13.2 HiPace 800 P, 48 V DC
mbar bar Pa hPa kPa Torr
mm Hg
mbar 1 1 · 10
-3
100 1 0.1 0.75
bar 1 · 10
3
1 1 · 10
5
1000 100 750
Pa 0.01 1 · 10
-5
1 0.01 1 · 10
-3
7.5 · 10
-3
hPa 1 1 · 10
-3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr
mm Hg
1.332 1.332 · 10
-3
133.32 1.3332 0.1332 1
1 Pa = 1 N/m
2
mbar l/s Pa m
3
/s sccm Torr l/s atm cm
3
/s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m
3
/s 10 1 592 7.5 9.87
sccm 1.69 · 10
-2
1.69 · 10
-2
1 1.27 · 10
-2
1.67 · 10
-2
Torr l/s 1.33 1.33 78.9 1 1.32
atm cm
3
/s 1.01 0.101 59.8 0.76 1
Parameter HiPace
TM
800 P HiPace
TM
800 P HiPace
TM
800 P
Flange (in) DN 200 ISO-K DN 200 CF-F DN 200 ISO-F
Flange (out) DN 25 ISO-KF
/G 1/4" DN 25 ISO-KF/G 1/4" DN 25 ISO-KF/G 1/4"
Pumping speed for Ar 770 l/s 770 l/s 770 l/s
Pumping speed for H
2
320 l/s 320 l/s 320 l/s
Pumping speed for He 595 l/s 595 l/s 595 l/s
Pumping speed for N
2
785 l/s 785 l/s 785 l/s
Compression ratio for Ar > 1 · 10
7
> 1 · 10
7
> 1 · 10
7
Compression ratio for H
2
4 · 10
2
4 · 10
2
4 · 10
2
Compression ratio for He 3 · 10
3
3 · 10
3
3 · 10
3
Compression ratio for N
2
> 1 · 10
6
> 1 · 10
6
> 1 · 10
6
Gas throughput at full rotational speed for Ar 2 hPa l/s 2 hPa l/s 2 hPa l/s
Gas throughput at full rotational speed for He 5 hPa l/s 5 hPa l/s 5 hPa l/s
Gas throughput at full rotational speed for H
2
8 hPa l/s 8 hPa l/s 8 hPa l/s
Gas throughput at full rotational speed for N
2
2.5 hPa l/s 2.5 hPa l/s 2.5 hPa l/s
Fore-vacuum max. for Ar 1.1 hPa 1.1 hPa 1.1 hPa
Fore-vacuum max. for H
2
0.1 hPa 0.1 hPa 0.1 hPa
Fore-vacuum max. for He 0.5 hPa 0.5 hPa 0.5 hPa
Fore-vacuum max. for N
2
1.1 hPa 1.1 hPa 1.1 hPa