Installation
13
Fig. 3:
Example: How to secure against shifting and tipping by external tremors
Use of a splinter
shield or protection
screen
The installation of a Pfeiffer Vacuum centering ring with splinter shield or protection
screen in the high vacuum flange protects the turbopump against foreign bodies coming
from the chamber. The pumping speed is reduced.
Vibration damper
Mounting orientation
When using dry backing pumps, Pfeiffer Vacuum HiPace pumps are designed for instal-
lation in any orientation.
Support pipes in front of the vacuum pump or remove them. No force from the pipe
system may be exerted on the fixed pump.
To avoid contamination via the fore-vacuum line when using oil-sealed backing pumps
the fore-vacuum flange should always point vertically downward (± 25°).
Fig. 4:
Recommended orientation of the fore-vacuum flange
The maximum axial loading capacity of the high vacuum flange is 1000 N (equals
100 kg). A one-sided load on the high vacuum flange is not permitted.
SC
SC
SC
SC
SC
SC = Safety Connection
Vacuum chamber
Volume flow rate reduction in %
H
2
He
N
2
Ar
Splinter shield DN 200
7
11
23
26
Protection screen DN 200
2
3
7
8
WARNING
Danger from the turbopump and vibration damper being torn-off
In case of sudden blocking of the rotor, an applied vibration damper cannot compensate
any of the occurring forces. There is a danger of the turbopump being torn-off and the-
reby resulting severest injuries and property damages. Applicable safeguards must be
taken to compensate possible occurring torques.
Definitely consult with Pfeiffer Vacuum.
Do not exceed the max. permissible temperature at the vibration damper (100° C).
25° max
VV
VV
