6. Utilize all prescribed components for the turbopump.
7. Tighten the nuts in 3 stages in opposite pairs.
– Tightening torque:
5, 10, 16 ± 1 Nm
Connection of stud screw and through-bore
1. Only use the approved mounting kits from Pfeiffer Vacuum for the connection.
2. Place the collar flange over the high vacuum flange on the turbopump.
3. Insert the snap ring into the side groove on the high vacuum flange of the turbopump.
4. Fasten the turbopump onto the counter flange in accordance with the diagram using the collar
flange, snap ring and centering ring.
5. Utilize all prescribed components for the turbopump.
6. Tighten the nuts in 3 stages in opposite pairs.
7. Tightening torque:
5, 10, 16 ± 1 Nm
5.4.8 Attaching CF flange to CF-F
The connection types for CF installation with CF flange are:
● "Hexagon head screw and through hole"
● "Stud screw with tapped hole"
● "Stud screw with through hole"
NOTICE
Leaks may occur due to the incorrect installation of CF flanges
Inadequate cleanliness when handling CF flanges and copper gaskets results in leaks and may
cause process damage.
► Always wear suitable gloves before touching or fitting any components.
► Fit seals only if dry and free of grease.
► Take care of damaged surfaces and cut edges.
► Replace the damaged components.
Required tools
● Hexagonal wrench (13 WAF)
● Calibrated torque wrench (tightening factor ≤ 1.6)
Fig. 10:
Flange connection CF-F, hexagon head screw and through hole
Connection of the hexagon head screw and through holes
1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum.
2. If used: Insert the protective screen or splinter shield with clamping lugs downwards in the turbo-
pump high vacuum flange.
3. Place the seal exactly in the hollow.
4. Connect the flange with the components of the mounting kit according to the figure.
Installation
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Содержание HiCube 300 H Pro
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