404/406XR Series Product Manual
Appendix C
– Clean Room
45
Parker Hannifin Corporation
1140 Sandy Hill Road
Irwin, PA 15642
www.parkermotion.com
Test 2:
Horizontal Plane
Particle counter located below table surface
Class 100 Compatible
Test 3:
Horizontal Plane, Inverted Table
Particle counter located below table surface
Class 100 Compatible
Test 4:
Vertical Plane
Particle counter located below table surface
Class 10 Compatible
For more information please contact Parker Hannifin Corporation's Application Engineering
Department at
800-245-6903.
25mmmm
25mm
25mm
www.comoso.com