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Microelectronics

25 Harbor Park Drive
Port Washington, NY 11050
+1 516 484 5400 telephone
+1 800 645 6532 toll free US
+1 516 801 9754 fax

Visit us on the Web at www.pall.com/MicroE

Pall Corporation has offices and plants throughout the world. For Pall
representatives in your area, please go to www.pall.com/contact
Because of technological developments related to the products, systems,
and/or services described herein, the data and procedures are subject to
change without notice. Please consult your Pall representative or visit
www.pall.com to verify that this information remains valid.

Pall Gaskleen

®

purifiers comply with the applicable portions of the Pressure

Equipment Directive (PED) 97/23/EC. Purifiers not carrying the
CE mark comply with the directive, but do not require marking.

© 1998, 2014, 2015 Pall Corporation, Pall, and are trademarks of
Pall Corporation. ® Indicates a Pall trademark registered in the USA.

Form 2249

April 2015

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Содержание GASKLEEN PG550

Страница 1: ...PALL GASKLEEN BULK GAS PURIFIER ASSEMBLIES With AresKleenTM Purification Materials PG550 PG550 MAN PG2400 PG2400 MAN PG11000 PG11000 MAN INSTALLATION REPLACEMENT INSTRUCTIONS Revision F March 2014 ...

Страница 2: ...r designates 3 nm filtration Part numbers with addition of a MAN designation indicates the purifier is part of a manifold Use of a manifold allows for easy replacement of the purifier without any process interruption Please read all instructions carefully Questions should be resolved prior to proceeding with the installation of any purifier Contact Pall Corporation SLS Global Technical Support for...

Страница 3: ...scfm 4 00 102 mm male gasket seal 500 psig 3 45 MPa Length 17 3 439 mm PG2400 MAN Diameter 50 Fixed 500 slpm 17 6 scfm 4 00 102 mm female inlet male outlet 300 psig 2 07 MPa Length gasket seal 17 3 439 mm PG11000 Diameter 50 Fixed 1000 slpm 35 3 scfm 6 00 152 mm female inlet male outlet 250 psig 1 72 MPa Length gasket seal 29 7 754 mm PG11000 MAN Diameter 50 Fixed 1000 slpm 35 3 scfm 6 00 152 mm f...

Страница 4: ...e specifications Table 2 Purification Material Designations xxxxP in part number and Intended Process Gases INP Helium He Nitrogen N2 Neon Ne Argon Ar Krypton Kr Xenon Xe Tetrachlorosilane SiCl4 SIP Hydrogen H2 Methane CH4 Ethene Ethylene C2H4 Ethane C2H6 Propene Propylene C3H6 Propane C3H8 Butane C4H10 Cyclopropane c C3H6 Dimethyl Ether CH3 2O Carbon Monoxide CO Silane SiH4 Disilane Si2H6 Methyls...

Страница 5: ...under 5 15 psig argon pressure Always wear safety glasses when removing caps Table 2 continued Purification Material Designations WARNINGS Reaction of the purification material with large concentrations of air or water may evolve º Heat and flammable gas for INP SIP and FCP purification materials º Heat and corrosive gas for CLXP HCLP and HBRP purification materials º Heat flammable gas and corros...

Страница 6: ...cals that may cause severe burns to the eyes and irritation of the skin Reference Safety Data Sheets SDS supplied with assembly Hazardous gas should never be introduced into the purifier or associated piping until a field leak test demonstrates the system is ready for service see step 12 of this installation procedure Pall Corporation assumes no liability for damage or injury resulting from improp...

Страница 7: ...ulk Gas Purifier with bypass manifold The PG550 and PG2400 models come without shut off valves The PG11000 model comes mounted on a panel with shut off valves Purifiers with bypass manifolds come with all the valves shown in the schematic Additional gas lines and valves are necessary if the purification material requires conditioning before use see Step 5 below ...

Страница 8: ... An upstream process gas pressure regulator and pressure relief device must be installed when a potential exists for overpressurization i e pressure surge beyond MAWP of assembly For in line purifiers PG550 and PG2400 models the inlet fitting must be installed finger tight with inert gas purge flow introduced within one minute after removal of the protective cap Delay may result in degradation of ...

Страница 9: ...f the purifier for this test If the leak test is failed locate and repair the leak and repeat the test Leak testing procedures are documented in SEMI F1 ASTM E 498 or ASTM E 499 Prior to installing purifier purge all tubing fittings and components in the installation zone with inert gas nitrogen or argon Product Minimum Purge Tools Required for Installation Gas Flow Rate PG550 2 slpm 4 2 scfh 625 ...

Страница 10: ...ket seal connector terminators until immediately prior to equipment installation When a purifier is used for hazardous gas purification it must be installed within a suitable exhausted enclosure All connections external to the enclosure must be welded and supported in accordance with pertinent safety ordinances and regulations Dual containment lines may be mandated for certain hazardous gases Reta...

Страница 11: ...ing a new gasket supplied with the purifier Tighten the nuts until finger tight 6 Gasket seating begins when there is sudden resistance to nut rotation Using an appropriate open end wrench on the purifier and on the connection nut Ref Table 3 last column tighten per connection make up instructions provided by the gasket seal supplier Note Gasket suppliers typically recommend that the connection nu...

Страница 12: ... vent or scrubber 12 Continue the flow of inert gas for 5 10 minutes 13 Unit is now ready for helium leak testing PG550 MAN PG2400 MAN PG11000 and PG11000 MAN 1 Start inert gas purge flow Ref Table 3 middle column to the installation zone by opening an upstream valve MAINTAIN purge gas flow until the installation of assembly is complete 2 If necessary remove and dispose of existing component or sp...

Страница 13: ...or nickel silver plated nickel or stainless steel gaskets 7 Open the isolation valve downstream of installation zone Ensure the gas flow path in the outlet gas line is open to vent or scrubber 8 Open bypass valve and flow gas through bypass line 9 Close bypass valve wait for 2 seconds and then open bypass valve again Repeat this procedure at least 10 times These alternate pressurization and ventin...

Страница 14: ...livery line leading to the equipment and then shut off purge gas source via upstream isolation valve Testing in line puriﬁers PG550 and PG2400 1 Supply purified helium gas to the installation zone 2 Open upstream isolation valve at purifier 3 Pressurize purifier with helium up to maximum rated pressure MAWP of unit 4 Perform an outboard helium leak test on the purifier at the inlet and outlet gask...

Страница 15: ...sure MAWP of unit 8 Perform an outboard helium leak test on the purifier valves and gasket seal connections using a sniffer probe 9 Should leakage be detected contact Pall Corporation SLS for technical assistance Do not attempt to repair purifier or valves in assembly 10 Close upstream and downstream isolation valves on the purifier manifold CAUTION Inboard helium leak testing of the purifier is n...

Страница 16: ...e inert gas used during installation of the purifier and either generate or activate certain functional groups that are chemically bonded to the AresKleen purification material Any stray contaminants introduced during the installation procedure are also removed during the conditioning process WARNING Conditioning of purification material with reactive or corrosive gases is usually an exothermic he...

Страница 17: ...specially for Intended Process Gases within Group IV When the process gas consists of a blend of two or more gases conditioning is recommended if the purifier has been out of service for three days or longer Conditioning ensures that the relative percentage of the constituents remains unchanged upon passage through the purifier Once the purification material is conditioned with the process gas it ...

Страница 18: ...imum time for gas flow T minutes during conditioning is given by T minutes V F If a carrier gas is being used to dilute the process gas then a longer conditioning time is required the time increases proportional to the inverse of the dilution percentage A percentage of active ingredient For example if the gas is actually a blend containing A of the process gas then the minimum time T minutes is gi...

Страница 19: ...gas Product and COLUMN A COLUMN B COLUMN C COLUMN D COLUMN E Bed Volumes Min Volume Min Volume Min Volume Maximum Maximum 100 Process 100 Process 100 Process Flow Rate Flow Rate Gas for Gas for Gas for for Groups for Groups I II Group III Group IV I II III Groups IV Gaskleen 120 liters 180 liters 36 liters 10 slpm 1 0 slpm PG550 4 24 ft3 6 36 ft3 1 27 ft3 21 2 scfh 2 1 scfh 0 6 liters 0 02 ft3 Gas...

Страница 20: ... black Therefore Pall recommends that the indicator be affixed to the purifier after completion of the conditioning process Note Before conditioning verify that system is leak free and check that the contents of the gas cylinder gas source match the intended process gas for use in the purifier as per the product part If the no leaks are found and the cylinder contents are correct then proceed with...

Страница 21: ...00 process gas through the unit for 60 minutes Note During the conditioning the surface temperature of the purifier may feel warm to the touch If the purifier feels hot continue conditioning by reducing the gas flow rate or introducing an inert gas to create a dilute blend until the elevated temperature subsides then return to previous conditioning parameters No damage to the purification material...

Страница 22: ...hipped with the assembly but is not affixed to the housing After conditioning i e when the housing has returned to room temperature attach the supplied over temperature indicator sticker to the housing where it can be easily seen Alternative Group III For SiH3Cl SiH2Cl2 SiHCl3 SiCl4 and BF3 For Group III gases conditioning can alternately be done first with a dilute blend containing less than 20 p...

Страница 23: ...hrough the unit for an additional 33 minutes Ensure that effluent gas during conditioning is directed to a suitable scrubber or vent and NOT to the process tool Note During conditioning of these Group III gases the purifier may feel warm to the touch If the purifier feels hot reduce the gas flow rate or use a more dilute blend for conditioning Group IV For C2H4 C3H6 COS SiH4 Si2H6 SiH3CH3 SiH CH3 ...

Страница 24: ...rst pressurizing unit with 10 SiH4 blend for 2 hours Follow this by flowing 0 5 slpm 1 1 scfh of 10 SiH4 blend through the unit for 72 minutes Then switch flow to 1 0 slpm 2 1 scfh of 100 SiH4 process gas through the unit for an additional 18 minutes Ensure that effluent gas during conditioning is directed to a suitable scrubber or vent and NOT to the process tool Note During conditioning of Group...

Страница 25: ... refer to Table 4 Product column of the process gas is recommended 3 DO NOT subject the purifier to a vacuum if material is conditioned with a toxic or corrosive gas Release of toxic or corrosive gases may result under vacuum 4 A purifier conditioned for a particular process gas must be used for that process gas only The purification material is gas specific WARNING 1 If a purifier has been condit...

Страница 26: ... to purification material or evolved gases should be managed as recommended in pertinent Safety Data Sheets SDS Requisite SDS documents should be available for use at all times If specific purification material SDS is required contact Pall Microelectronics for a duplicate copy SDS for process gases are obtainable from gas suppliers The purifier assembly is sufficiently durable to make purification...

Страница 27: ...ither purging equipment nor purging protocol is provided Both remain the sole responsibility of the user The typical protocol offered here is for guideline purposes only It may need to be suitably adapted to specific applications Should doubt exist as to whether a contemplated purging protocol is suitable or for advice on purging equipment requirements contact Pall Corporation SLS for technical as...

Страница 28: ...ed small but dangerous amounts of process gas may nevertheless remain adsorbed to the purification material or equipment surfaces For this reason and to preclude potential personal injury when replacing a purifier that has served for purification of hazardous gases personnel must be provided with suitable protective equipment Typical Procedure 1 Open inlet and outlet valves on purifier 2 For all p...

Страница 29: ...urifier allowing the gas to vent to 5 psig 0 03 MPa venting to just above atmospheric pressure is best 4 Pressurize the purifier by closing outlet valve s and opening inlet valve s on the purifier allowing purge gas to enter the unit until the pressure is 60 psig 0 41 MPa do not exceed pres sure rating MAWP for purifier 5 Measure the concentration of the toxic hazardous gas in the effluent gas by ...

Страница 30: ...y Dangerous to Life and Health concentration OSHA Occupational Safety and Health Administration After removing purifier from service install caps on end connections using new gaskets and seal gaskets to prevent any potential release of hazardous gases 10 TROUBLESHOOTING High Impurity Concentrations in Delivered Process Gas Observation Concentrations of impurities in purified process gas are greate...

Страница 31: ...mination upstream of purifier Excessive impurity perhaps water vapor concentration in process gas supply Purification material unsuitable for purification of supplied process gas Purification material was not adequately conditioned against intended process gas Wrong gas supplied to purifier Low Delivery Flow Rate or Pressure Interpretation Unable to achieve requisite process gas delivery flow or p...

Страница 32: ... purified and therefore might not meet the required purity specification for downstream equipment 12 DISPOSAL PROCEDURE It is the customer s responsibility to dispose of the purifier in accordance with all Federal State and local regulations If the purifier is exposed to toxic gases or gases containing toxic elements the purification material may contain these toxic materials or reaction products ...

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Страница 36: ...e data and procedures are subject to change without notice Please consult your Pall representative or visit www pall com to verify that this information remains valid Pall Gaskleen purifiers comply with the applicable portions of the Pressure Equipment Directive PED 97 23 EC Purifiers not carrying the CE mark comply with the directive but do not require marking 1998 2014 2015 Pall Corporation Pall...

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