Refer to Table 4, columns C and E. Slowly, pressurize purifier with dilute
blend at ≥ 15 psig (0.10 MPa) for 2 hours (do not exceed maximum flow rate
for conditioning – column E). Then flow dilute blend gas for the minimum
volume (column C) of process gas to flow through purifier and the maximum
flow rate not to be exceeded during conditioning. After completing the dilute
blend conditioning, repeat with actual process gas concentration for an
additional 20 – 30 bed volumes (Product column). If use of a dilute blend is
not possible, use actual process gas concentration at a reduced flow rate
(10% of value in column E). As an example, condition a Gaskleen
®
PG550
Purifier for SiH
4
service by first pressurizing unit with 10% SiH
4
blend for 2
hours. Follow this by flowing 0.5 slpm (1.1 scfh) of 10% SiH
4
blend through
the unit for 72 minutes. Then switch flow to 1.0 slpm (2.1 scfh) of 100% SiH
4
process gas through the unit for an additional 18 minutes.
Ensure that effluent gas during conditioning is directed to a suitable scrubber
or vent and NOT to the process tool.
Note:
During conditioning of Group IV gases, the purifier may feel warm
to the touch. If the purifier feels hot, reduce the gas flow rate or use a
more dilute blend for conditioning.
Traces of argon may be present in effluent gas stream for some time after
conditioning.
Upon completion of the above Conditioning Procedures, ensure that
product label on the purifier corresponds to the process gas being used
and purge all connecting lines and equipment. The Pall Gaskleen
®
Bulk
Gas Purifier is now ready for service.
