Plasmalab
System100
Oxford Instruments Plasma Technology
Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11
Page 4 of 24
Printed: 10-Feb-11, 9:07
2.
Installation information
2.1
Dimensions
System dimensions are given in Fig 1, Fig 2 and Fig 3. Gas handling component
dimensions are given in Fig 6, Fig 7 and Fig 8. Teos pod and TEOS oven dimensions are
given in Fig 9 and Fig 10 respectively. Pump dimensions are given in Section 6.
Heater/chiller dimensions are given in Section 7.
2.2
Weights
Typical weights of system components:
2-frame system:
290 kg
3-frame system:
360 kg
6-line Gas pod: 35 kg
TEOS pod:
35 kg
TEOS oven:
30 kg
12-line Gas pod:
65 kg
Pumps:
See Section 6 (Pump set information).
Heater/chillers: See Section 7 (Heater/chiller information).
2.3
Heat load
The typical heat load for the clean room installation is:
Operating:
2 kW
Passive:
1.5 kW
Note that these specifications do not include externally sited components, e.g. pumps,
heater/chillers, transformers, etc..
Heat loads for typical chillers are given in the following table. The heat loads are quoted
for a bath temperature of 20°C and 100% cooling.
Chiller Model
Heat Load
FP51-SL
3.5 kW
FL601
1.1 kW
FC1600T
2.0 kW
