Oxford Instruments PlasmalabSystem100, Данные установки

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Plasmalab
System100
Oxford Instruments Plasma Technology
Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 18 of 24
Printed: 10-Feb-11, 9:07
7. Heater/chiller information
Chiller Width
mm
Length
mm
Height
mm
Weight
kg
Usable
Temperature
Range °C
Water
Connections
Electrical
Requirements
Julabo FP51 460 550 890 90 -30 to 80 3/8”
Swagelok
400V, 50Hz,
3 Phase,
14 Amps
Julabo FP51 460 550 890 90 -30 to 80 3/8”
Swagelok
230V, 60Hz,
3 Phase,
14 Amps
Julabo FP51 460 550 890 90 -30 to 80 3/8”
Swagelok
220V, 60Hz,
1 Phase,
14 amps
Julabo FC 1600T 460 610 490 67 0 to 80 3/8”
Swagelok
230V, 50Hz,
1 Phase,
13 Amps
Julabo FC 1600T 460 610 490 67 0 to 80 3/8”
Swagelok
230V, 60Hz,
1 Phase,
13 Amps
Julabo FL 601 320 500 600 48 0 to 30 3/8”
Swagelok
230V, 50Hz,
1 Phase,
5 Amps
Julabo FL 601 320 500 600 48 0 to 30 3/8”
Swagelok
230V, 60Hz,
1 Phase,
5 Amps
Neslab
Thermoflex TF
1400
361 625 694 60 5 to 80 3/8”
Swagelok
208V, 60Hz,
1 Phase,
13 Amps
IMPORTANT: Heater/chillers should be filled/topped up with one of the fluids listed I
the following table, as appropriate. Refer the OIPT ‘Services Specifications
for Plasmalab and Ionfab systems’ document, sub-section 2.1 for the
warranty impact of not using these products.