Oxford Instruments PlasmalabSystem100, Данные установки

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Plasmalab
System100
Oxford Instruments Plasma Technology
Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 22 of 24
Printed: 10-Feb-11, 9:07
8.2 Gas box interlocks
Refer to drawing: 94-SE81B26657 (PC2003 gas pod loom).
To enable process gases, the RF interlock chain must be complete. The gas box interlock
is shown in Fig 11.
1
BLK
20
24VDC
LID
SWITCH
PCB 94-PC00S26866 REAR SERVICES
PANEL
SKT25W
PIN4 PL25W
PIN4
GAS BOX SYSTEM CONSOLE
SERVICES
PANEL
SKT25W
PIN4
PL24W
PIN4
PCB 94-PC81S26655
JP6
PIN1 JP6
PIN2
JP6
PIN3
Via JP3 to CAN unit
controlling gases 1 - 4.
See NOTE.
NOTE: The function of the signal is to supply
24Vdc power to the digital outputs of
the CAN unit. The interlock continues
through idendical boards (where fitted)
which drive gases 5 - 8 and 9 - 12.
Fig 11: Gas box interlock chain
8.2.1 Incompatible gases
1
st
PCB Gas 2
nd
PCB Gas 3
rd
PCB Gas Type A Type B Type X
1
st
Gas 1 5 9 LK3A + 4 LK3B LK3A
2
nd
Gas 2 6 10 LK5A + 6 LK5B LK5A
3
rd
Gas 3 7 11 LK7A + 8 LK7B LK7A
4
th
Gas 4 8 12 LK9A + 10 LK9B LK9A
Gases are designated as one of three types:
Gas type A: Typically oxidising gases (e.g. oxygen)
Gas type B: Typically fuel gases (e.g. hydrogen)
Gas type X: Gases normally miscible with most other gas types.
If ANY gas Type A is enabled, then ALL gas Type B lines are disabled.
Table 2: Incompatible gases
The gas box has a facility to prevent incompatible gases from being enabled
simultaneously, using soldered links.