Plasmalab
System100
Oxford Instruments Plasma Technology
Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11
Page 12 of 24
Printed: 10-Feb-11, 9:07
356
426.3
496.6
566.9
637.2
707.5
777.8
848.1
918.4
988.7
1059
1129.3
1199.6
1269.9
0
650
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4
GAS 5
GAS 6
GAS 7
GAS 8
GAS 9
GAS 10
GAS 11
GAS 12
160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
1311.5
42.3
45
220
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 8: 12-line gas pod
