Plasmalab
System100
Modular Cluster System – TEOS
Installation Data
Issue 10: February 2011
Страница 1: ...PlasmalabSystem100 Modular Cluster System TEOS Installation Data Issue 10 February 2011...
Страница 2: ...set information 16 7 Heater chiller information 18 8 PLC interlock chain 20 8 1 General description 20 8 2 Gas box interlocks 22 8 2 1 Incompatible gases 22 8 2 2 System Link Configuration Table 23 8...
Страница 3: ...rvices dimensions etc refer only to the PlasmalabSystem100 i e plasma processing at up to 200 mm wafers in MESC compatible chambers Consider access when planning the system installation Ensure that go...
Страница 4: ...2 2 Weights Typical weights of system components 2 frame system 290 kg 3 frame system 360 kg 6 line Gas pod 35 kg TEOS pod 35 kg TEOS oven 30 kg 12 line Gas pod 65 kg Pumps See Section 6 Pump set inf...
Страница 5: ...24 Issue 10 February 11 1412 1630 747 550 SERVICE ACCESS OIPT RECOMMENDS THAT AT LEAST 600mm SERVICE ACCESS SPACE IS ALLOWED BETWEEN ANY OBSTACLE E G WALLS PARTITIONS ETC AND SERVICEABLE ITEMS E G TH...
Страница 6: ...ry 11 Page 6 of 24 Printed 10 Feb 11 9 07 1412 1090 747 550 SERVICE ACCESS OIPT RECOMMENDS THAT AT LEAST 600mm SERVICE ACCESS SPACE IS ALLOWED BETWEEN ANY OBSTACLE E G WALLS PARTITIONS ETC AND SERVICE...
Страница 7: ...7 of 24 Issue 10 February 11 1795 446 550 1412 514 244 865 SERVICE ACCESS OIPT RECOMMENDS THAT AT LEAST 600mm SERVICE ACCESS SPACE IS ALLOWED BETWEEN ANY OBSTACLE E G WALLS PARTITIONS ETC AND SERVICEA...
Страница 8: ...SS GAS AIR OUT CHAMBER BACKING 4 MM PUSH FIT LEGRIS PLC SERVICE ACCESS CONNECTOR THIS IS AN ALTERNATIVE PC COMMUNICATIONS CONNECTION NOT Only used if a turbo pump is fitted Only used if chamber coolin...
Страница 9: ...NCY OFF SWITCH CONNECTOR 4 WAY BICC PIN A EMO 1 PIN B 24V PIN C 0V PIN D EMO 2 NOTE EMO 1 2 MUST BE LINKED EMO EMERGENCY OFF 2 AMP FS1 15V 15V 24V FS2 FS3 2 AMP 2 AMP 1 2 3 4 5 6 PHASE 1 PHASE 2 PHASE...
Страница 10: ...d and its fixings are secure 356 426 3 496 6 566 9 637 2 707 5 322 2 0 650 45 SECONDARY GAS OUTLET LINE TO SYSTEM ONLY USED IF A SPLIT MANIFOLD IS FITTED PRIMARY GAS OUTLET LINE TO SYSTEM HEATER CONTR...
Страница 11: ...IS FITTED PRIMARY GAS OUTLET LINE TO SYSTEM HEATER CONTROLLERS IF FITTED GAS INLET LINES STAINLESS STEEL TUBE FOR WELDING TO THE CUSTOMER S SUPPLY GAS 1 GAS 2 GAS 3 GAS 4 GAS 5 GAS 6 GAS 7 GAS 8 160...
Страница 12: ...D PRIMARY GAS OUTLET LINE TO SYSTEM HEATER CONTROLLERS IF FITTED GAS INLET LINES STAINLESS STEEL TUBE FOR WELDING TO THE CUSTOMER S SUPPLY GAS 1 GAS 2 GAS 3 GAS 4 GAS 5 GAS 6 GAS 7 GAS 8 GAS 9 GAS 10...
Страница 13: ...S STEEL TUBE PROTRUDING 160 mm FROM POD FOR WELDING EXTRACTION COLLAR 510 45 45 75 9mm Diameter for M8 screws Location of fixing holes To PECVD system Argon from process gas pod To TEOS pot From TEOS...
Страница 14: ...es 3 phase N E 5 2 Water Cooling requirement Function Connection Parameter Specification Base Pressure Turbo if fitted 1 4 stainless steel Swagelok Flow 1 lpm 0 27 gpm US Temperature 15 25 C 59 77 F L...
Страница 15: ...ally Flow Refer to sub section 6 1 Rotary pump purging Pressure Refer to sub section 6 1 Rotary pump purging 5 6 Process gas requirement Function Connection Parameter Specification Process gas in stai...
Страница 16: ...For Alcatel ADP122P and ADS602P dry pumps the recommended minimum cooling water flow rate is 1 litre minute Available pump options Length mm Width mm Height mm Pump inlet connection Pump outlet conne...
Страница 17: ...n a 0 45 50Hz 0 55 60Hz 2 lpm Adixen 2033C2 701 213 348 DN 40 DN 40 76 n a 1 1 50Hz 1 3 60Hz 2 lpm Adixen ACP15G 515 205 280 DN 25 DN 16 23 n a 0 6 50 60Hz 5 lpm Adixen ACP28G 650 195 325 DN 25 DN 25...
Страница 18: ...wagelok 220V 60Hz 1 Phase 14 amps Julabo FC 1600T 460 610 490 67 0 to 80 3 8 Swagelok 230V 50Hz 1 Phase 13 Amps Julabo FC 1600T 460 610 490 67 0 to 80 3 8 Swagelok 230V 60Hz 1 Phase 13 Amps Julabo FL...
Страница 19: ...tables and the automatic liquid nitrogen changeover unit ACU 94 G WTR SUN 903 Thermal H5 50 to 105 C All other systems The following accessories are available for heater chillers Part Number Descripti...
Страница 20: ...RF power The 600 mbar vacuum switch Vacstat must be at low pressure The process chamber lid must be shut or its hoist down The primary process pump must be running The primary process pressure gauge n...
Страница 21: ...Box JP44 6 15 Interlock disabled if an independent dry pump fitted Process pressure gauge on scale Capacitance Manometer e g Baratron JP16 5 NONE Analogue input below 11 5V Switches comparator U5 Spar...
Страница 22: ...signal is to supply 24Vdc power to the digital outputs of the CAN unit The interlock continues through idendical boards where fitted which drive gases 5 8 and 9 12 Fig 11 Gas box interlock chain 8 2 1...
Страница 23: ...OINT LK6B PM140 ENDPOINT SEE LK7 A B LK7 A B LK7A NON PM140 ENDPOINT LK7B PM140 ENDPOINT SEE LK 6 A B LK8 24V DC TO RL2 COM1 LK9 24V DC TO RL2 COM2 LK10 24V DC TO RL6 COM1 LK11 24V DC TO RL6 COM2 LK12...
Страница 24: ...742 Phone 1 978 369 9933 Toll Free 1 800 447 4717 Fax 1 978 369 8287 Email pt usa oxinst com Germany Oxford Instruments GmbH Otto von Guericke Ring 10 D 65205 Wiesbaden Tel 49 0 6122 937161 Fax 49 0 6...
