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8
FLOW RANGES
TABLE II FMA1700A/1800A
SERIES MAX FLOW 50 L/min
MEDIUM FLOW MASS FLOW METER*
TABLE III FMA1700A/1800A
SERIES MAX FLOW 100 L/min
HIGH FLOW MASS FLOW METER*
* Flow rates are stated for Nitrogen at STP
conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a
multiplier from APPENDIX 2.
CODE
L/min [N
2
]
23
15
24
20
26
30
27
40
28
50
CODE
L/min [N
2
]
40
60
41
80
42
100
43
200
44
500
45
1000
TABLE I FMA1700A/1800A
SERIES MAX FLOW 10 L/min
LOW FLOW MASS FLOW METER*
CODE
mL/min [N
2
]
02
0 to 10
04
0 to 20
06
0 to 50
08
0 to 100
10
0 to 200
12
0 to 500
CODE
L/min [N
2
]
14
0 to 1
16
0 to 2
18
0 to 5
20
0 to 10
TABLE IV
PRESSURE DROPS
MAXIMUM
FLOW RATE
SERIES
FLOW RATE
[liters/min]
MAXIMUM PRESSURE DROP
[mm H
2
O]
[psid]
[mbar]
10 L/min
up to 10
58
0.083
5.7
50 L/min
15
63
0.09
6.4
20
300
0.44
30
30
800
1.18
81
40
1480
2.18
150
50
2200
3.23
223
100 L/min
60
3100
4.56
314
100
5500
8.08
557
200 L/min
200
2720
4.0
280
500 L/min
500
3400
5.0
340
1000 L/min
1000
6120
9.0
620
Содержание FMA1700A
Страница 28: ...24 APPENDIX 1 COMPONENTS DIAGRAM FMA1700A 1800A METERING PC BOARD...
Страница 35: ...31 PARTS OF THE FLOW METER LEFT AND RIGHT VIEWS FRONT VIEW...
Страница 36: ...32...
Страница 37: ...33...
Страница 38: ...34...