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TABLE OF CONTENTS
1. UNPACKING THE FMA1700A/1800A MASS FLOW METER
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1.1 Inspect Package for External Damage.................................................
1.2 Unpack the Mass Flow Meter...............................................................
1.3 Returning Merchandise for Repair.......................................................
2. INSTALLATION
........................................................................................
2.1
Primary Gas Connections.................................................................
2.2
Electrical Connections......................................................................
2.3.1 Remote LCD Readouts.....................................................................
2.3.2 Panel Mounting Readouts................................................................
3. PRINCIPLE OF OPERATION
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4. SPECIFICATIONS
...................................................................................
4.1
CE Compliance.................................................................................
5. OPERATING INSTRUCTIONS
..................................................................
5.1
Preparation and Warm Up..................................................................
5.2
Flow Signal Output Readings..........................................................
5.3
Swamping Condition.......................................................................
6. MAINTENANCE
.........................................................................................
6.1
Introduction......................................................................................
6.2
Flow Path Cleaning...........................................................................
6.2.1 Restrictor Flow Element (RFE)........................................................
6.2.2 FMA1700A/1800A Series Max. Flow 10 L/min...................................
7. CALIBRATION PROCEDURES
.................................................................
7.1
Flow Calibration...............................................................................
7.2
Calibration of FMA1700A/1800A Mass Flow Meters........................
7.2.1 Connections and Initial Warm Up.....................................................
7.2.2 ZERO Adjustment.............................................................................
7.2.3 SPAN Adjustment............................................................................
7.3
Linearity Adjustment..........................................................................
7.3.1 Connections and Initial Warm Up....................................................
7.3.2 ZERO Adjustment.............................................................................
7.3.3 25% Flow Adjustment (using R33 potentiometer)...........................
7.3.4 10% Flow Adjustment......................................................................
7.3.5 25% Flow Adjustment (using R52 potentiometer)..........................
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Содержание FMA1700A
Страница 28: ...24 APPENDIX 1 COMPONENTS DIAGRAM FMA1700A 1800A METERING PC BOARD...
Страница 35: ...31 PARTS OF THE FLOW METER LEFT AND RIGHT VIEWS FRONT VIEW...
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