Omega FMA1700A, Руководство пользователя, Страница: 3 / 40

TABLE OF CONTENTS
1. UNPACKING THE FMA1700A/1800A MASS FLOW METER .....................
1.1 Inspect Package for External Damage.................................................
1.2 Unpack the Mass Flow Meter...............................................................
1.3 Returning Merchandise for Repair.......................................................
2. INSTALLATION ........................................................................................
2.1 Primary Gas Connections.................................................................
2.2 Electrical Connections......................................................................
2.3.1 Remote LCD Readouts.....................................................................
2.3.2 Panel Mounting Readouts................................................................
3. PRINCIPLE OF OPERATION ...................................................................
4. SPECIFICATIONS ...................................................................................
4.1 CE Compliance.................................................................................
5. OPERATING INSTRUCTIONS ..................................................................
5.1 Preparation and Warm Up..................................................................
5.2 Flow Signal Output Readings..........................................................
5.3 Swamping Condition.......................................................................
6. MAINTENANCE .........................................................................................
6.1 Introduction......................................................................................
6.2 Flow Path Cleaning...........................................................................
6.2.1 Restrictor Flow Element (RFE)........................................................
6.2.2 FMA1700A/1800A Series Max. Flow 10 L/min...................................
7. CALIBRATION PROCEDURES .................................................................
7.1 Flow Calibration...............................................................................
7.2 Calibration of FMA1700A/1800A Mass Flow Meters........................
7.2.1 Connections and Initial Warm Up.....................................................
7.2.2 ZERO Adjustment.............................................................................
7.2.3 SPAN Adjustment............................................................................
7.3
Linearity Adjustment..........................................................................
7.3.1 Connections and Initial Warm Up....................................................
7.3.2 ZERO Adjustment.............................................................................
7.3.3 25% Flow Adjustment (using R33 potentiometer)...........................
7.3.4 10% Flow Adjustment......................................................................
7.3.5 25% Flow Adjustment (using R52 potentiometer)..........................
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