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27
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Hydrogen Bromide HBr
1.000
.0861
3.610
Hydrogen Chloride HCl
1.000
.1912
1.627
Hydrogen Cyanide HCN
.764
.3171
1.206
Hydrogen Fluoride HF
.9998
.3479
.893
Hydrogen Iodide HI
.9987
.0545
5.707
Hydrogen Selenide H
2
Se
.7893
.1025
3.613
Hydrogen Sulfide H
2
S
.80
.2397
1.520
Iodine Pentafluoride IF
5
.2492
.1108
9.90
Isobutane CH(CH
3
)
3
.27
.3872
3.593
Isobutylene C
4
H
8
.2951
.3701
2.503
Krypton Kr
1.453
.0593
3.739
*Methane CH
4
*Methane CH
4
-1 (>10 L/min)
.7175
.75
.5328
.5328
.7175
.7175
Methanol CH
3
.5843
.3274
1.429
Methyl Acetylene C
3
H
4
.4313
.3547
1.787
Methyl Bromide CH
3
Br
.5835
.1106
4.236
Methyl Chloride CH
3
Cl
.6299
.1926
2.253
Methyl Fluoride CH
3
F
.68
.3221
1.518
Methyl Mercaptan CH
3
SH
.5180
.2459
2.146
Methyl Trichlorosilane (CH
3
)SiCl
3
.2499
.164
6.669
Molybdenum Hexafluoride MoF
6
.2126
.1373
9.366
Monoethylamine C
2
H
5
NH
2
.3512
.387
2.011
Monomethylamine CH
3
NH
2
.51
.4343
1.386
Neon NE
1.46
.246
.900
Nitric Oxide NO
.990
.2328
1.339
Nitrogen N
2
1.000
.2485
1.25
Nitrogen Dioxide NO
2
.737
.1933
2.052
Nitrogen Trifluoride NF
3
.4802
.1797
3.168
Nitrosyl Chloride NOCl
.6134
.1632
2.920
Nitrous Oxide N
2
O
.7128
.2088
1.964
Octafluorocyclobutane (Freon-C318) C
4
F
8
.176
.185
8.397
Oxygen O
2
.9926
.2193
1.427
Oxygen Difluoride OF
2
.6337
.1917
2.406
Ozone
.446
.195
2.144
Pentaborane B
5
H
9
.2554
.38
2.816
Pentane C
5
H
12
.2134
.398
3.219
Perchloryl Fluoride ClO
3
F
.3950
.1514
4.571
Perfluoropropane C
3
F
8
.174
.197
8.388
Phosgene COCl
2
.4438
.1394
4.418
Phosphine PH
3
.759
.2374
1.517
Содержание FMA1700A
Страница 28: ...24 APPENDIX 1 COMPONENTS DIAGRAM FMA1700A 1800A METERING PC BOARD...
Страница 35: ...31 PARTS OF THE FLOW METER LEFT AND RIGHT VIEWS FRONT VIEW...
Страница 36: ...32...
Страница 37: ...33...
Страница 38: ...34...