Newport ONE-XY Series, Руководство пользователя, Страница: 3 / 26

iii
EDH0351En1012 — 10/18
ONE-XY Series Integrated XY Linear Motor Stages
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity ...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution ...................................................................................................................ix
1.0 — Introduction
.................................................................................1
2.0 — Description
...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics
............................................................................3
3.1 Definitions ..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Hard Stop ...................................................................................................4
3.4 Load Characteristics and Stiffness .........................................................4
4.0 — Drive and Motor
.........................................................................5
4.1 Motor characteristics (Direct Drive Brushless Motor) ........................5
4.2 Command Signals ......................................................................................5
4.3 Sensor Positions........................................................................................5
4.4 Position Feedback Signals........................................................................6
4.5 Pinouts........................................................................................................6
Motor (SUB-D9M Connector)...................................................................6
Encoder and End-of-Runs (SUB-D15M Connector) ...............................7
4.6 ONE-XY Cable Wiring................................................................................7
5.0 — Stage Installation
.......................................................................8
5.1 Unpacking ..................................................................................................8
5.2 Mounting Conditions ................................................................................9
6.0 — Connection to Newport Controllers
..............................10
6.1 Warnings on Controllers ........................................................................10
6.2 Connection ...............................................................................................11
6.3 Cables .......................................................................................................11
7.0 — Connection to Non-Newport Controllers
....................12
8.0 — Dimensions
.................................................................................13