EDH0351En1012 — 10/18
2
ONE-XY Series Integrated XY Linear Motor Stages
2.0 —
Description
The ONE-XY series of integrated XY linear motor stages are designed to
eliminate the integration of individual X and Y stages and increase system
stiffness for dynamic applications. The available travel ranges from 60 mm
to 400 mm, with precise orthogonality alignment between the X and Y
axes.
The stages feature robust components and deliver high performance,
making them ideal solutions for precision industrial applications such as
semiconductor wafer inspection, microelectronics test and assembly,
metrology, laser microprocessing.
The ONE-XY has a monolithic, aluminum middle plate that is stiffer than
the conventional interface between two individual linear stages. The linear
motor drive is an iron-less design that is suited for high precision
positioning, but at the same time offers high dynamic performance. Cross-
roller bearings provide high load capacity as well as straight trajectories.
Precision position feedback is supplied by a highly repeatable linear scale
mounted inside the stage. The encoder signals are interpolated by
Newport’s XPS motion controller with 50 nm MIM for outstanding
Minimum Incremental Motion, repeatability, and stability. Absolute home
position and limit signals are incorporated to improve repeatability and
reliability, while simplifying the design with less electronics and
mechanical parts.
2.1
Design Details
Base Material Aluminum
Bearings High precision crossed roller bearings
Drive System 3-phase synchronous ironless core linear motor
Motor Initialization Done by controller
Feedback Non-contact optical encoder
Limit & Home Switches Integrated home and end of travel limits
Cable High Flex, 10M cycle, 3 m length
MTBF 20,000 hours