EDH0351En1012 — 10/18
4
ONE-XY Series Integrated XY Linear Motor Stages
3.2
Mechanical Specifications
NOTE
The following specifications are controller/drive dependent. Refer to the
ONE-XY Series page on www.newport.com for specifications achievable
with specific Newport controller/drive combination.
• MIM
• Accuracy
• Repeatability
• Max Speed
• Max Acceleration
CAUTION
To reach stated specifications, the stages must be fixed on a plane
surface with a flatness of 5 µm.
3.3
Hard Stop
Hard stops are supplied, only for emergency use.
3.4
Load Characteristics and Stiffness
Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
NOTE
For other than centered loads, please contact Newport technical
support.
ONE-XY60 ONE-XY60HA ONE-XY100 ONE-XY100HA ONE-XY200 ONE-XY200HA ONE-XY300 ONE-XY300HA
Travel Range (mm) 50
x
50 90
x
90 190
x
190 290
x
290
Minimum Incremental Motion (µm) 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05
Accuracy, Typical (Guaranteed) (µm) ±0.4 (±1.5) n/a (±0.3) ±0.5 (±2.0) n/a (±0.3) n/a (±2.5) n/a (±0.4) n/a (±3.0) n/a (±0.5)
Bi-directional Repeatability,
Typical (Guaranteed) (µm)
±0.040 (±0.070) ±0.040 (±0.080) n/a (±0.090) n/a (±0.100)
Straightness, Typical
(5)
(µm) ±0.5 ±1.0 ±2.0 ±3.0
Flatness, Typical
(2)
(µm) ±0.5 ±1.0 ±2.0 ±3.0
Pitch, Typical (Guaranteed)
(3)(5)
(µrad) ±20 (±65) n/a (±65) n/a (±75) n/a (±75) n/a (±90) n/a (±90) ±15 (±55) n/a (±55)
Yaw, Typical (Guaranteed)
(3)(5)
(µrad) ±20 (±65) n/a (±65) n/a (±75) n/a (±75) n/a (±90) n/a (±90) ±15 (±55) n/a (±55)
Roll
(3)
(µrad) 58 58 72 48
Orthogonality
(3)
(µrad) 96 96 96 96
Max. Speed
(3)
(m/s) 0.3 0.4 0.5 0.3
Max. Acceleration
(3)
(G) 0.3 0.3 0.2 0.2
Max. Load Capacity (N) 100 120 150 350
Weight [lb (kg)] 6.4 (2.9) 12.8 (5.8) 26.4 (12) 165 (75)
1)
Specifications measured on stage centerline, 50 mm above mounting surface. Newport provides NIST traceable, test results.
2)
Flatness specifications dependent on system base. Contact Newport for more information.
3)
Stage performance values at no load. Does not account for drive or resolution effects.
4)
To obtain arcsec units, divide mrad value by 4.8.
5)
Over 80% of travel range.
Notes:
HA versions are error mapped in XY.
Speed and acceleration can be higher with other driver options.
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