Newport CONEX-PSD, Руководство пользователя

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CONEX-PSD Two-Axis Position & Power Sensing Device
2.3 System Environmental Specifications
Operating temperature 5 °C to 40 °C
Operating humidity
20% to 85% relative humidity, non-condensing
Location Indoor use only
2.4 Sensor Characteristics
NOTE
The values are estimated based on the sensor manufacturer’s typical values at
ambient temperature. They are not calibrated to each unit.
2.4.1 Silicon Sensor
2.4.1.1 Absolute Maximum Rating (Ta = 25 °C)
Parameter Symbol Value Unit
Reverse Voltage V
R
Max. 20 V
Operating Temperature Topr -20 to + 60 °C
Storage Temperature Tstg -20 to + 80 °C
2.4.1.2 Electrical and Optical Characteristics (Ta = 25 °C)
Parameter Symbol Condition Min. Typ. Max. Unit
Spectral response
range
λ
–
320
to
1100
– Nm
Peak sensitivity
wavelength
λ
p – 960 – Nm
Photo sensitivity S
λ
=
λ
p – 0.6 – A/W
Interelectrode
resistance
Rie Vb = 0.1 V 5 7 15 k Ω
Position detector
error
E
λ = 900 nm
V
R
= 5 V
Spot size = 0.2 mm
– ± 150 ± 250 µm
Dark current ID VR=5V – 1 50 nA
Saturation
photocurrent
Ist
λ
= 900 nm
V
R
= 5 V
RL = 1 k
Ω
– 500 – µA
Rise time tr – 2 – µs
Terminal
capacitance
Ct
V
R
= 5 V
F = 10 kHz
– 500 1000 pF
Position
resolution
∆
R
IO = 1 µA
F = 10 kHz
– 1.5 – µm
EDH0315En1030 — 07/16 4