Shown in the figure below is an example of the AMAT Heat Exchanger Configuration Touch Screen. There are
eight boxes on each screen labelled HX1, HX2, HX3, HX4, HX5, HX6, HX7 and HX8.
NOTE
: Although the software has eight boxes, only two heat exchangers can be directly controlled.
To configure:
Select AMAT 1&2 in the upper right hand corner of the box.
Designate which chamber wall or cathode is attached to the heat exchanger.
Appendix C Using the AMAT Heat Exchanger
Configuration Touch Screen
C-1
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