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Section VI Troubleshooting
Facilitization Problem
Troubleshooting
Customer-related problems have occurred on NESLAB Steelhead Heat Exchangers during facilitization or start
up at Applied Materials and its customers. Although there were no defects with the Steelhead units, NESLAB
has developed the following reference guide to help minimize reoccurrence of these problems. This guide lists
potential facilitization problems, possible causes for these problems, and lists several items to check before
rejecting the unit or contacting NESLAB service.
If the problem remains, if you have any questions regarding the information in this table, or if you require
assistance from NESLAB, contact our Service Group at (800) 4NESLAB.
Problem
Unit will not heat above
a certain temperature
(i.e., ~30°C)
In Remote Mode, the
temperature output
signal reads a constant
temperature (0-15°C),
that is not equal to the
setpoint.
Pump pressure or flow
is deteriorated.
The unit will not main-
tain a resistivity level,
or the resistivity level is
always zero.
Possible Cause
1. The facility water lines are hooked up
incorrectly. If the inlet and outlet lines
are reversed, the facility water will flow
continuously in heat mode, especially
with a high temperature setpoint.
2. Excessive flow throught DI loop.
The remote interface cable is con-
nected incorrectly at the tool. If the
voltages supplied through the remote
interface are incorrect, the main
control board in the unit may be
damaged.
1. The filter cartridge may be dirty. If
the filter is clogged this will reduce
pump performance. Filter changing is
part of routine maintenance.
2. The flow control valve may not be
set to meet the tool's needs. This valve
allows adjustment of the flow and
pressure.
The resistivity cartridge is exhausted
or the thermal fluid is heavily contami-
nated. Replacing the resistivity car-
tridge to maintain a resistivity level is
part of routine maintenance.
Recommendation
1. Verify that the facility water lines are
correctly hooked up.
2. Regulate DEI valve towards the off
position. Monitor flow rate using the
flow meter on the rear of the unit.
Verify that the remote interface cable is
correctly corrected at the tool. If
incorrectly installed, contact NESLAB
service to replace the damaged main
control board.
1. Check the filter pressure gauge on
the front of the unit. If the pressure
reading is outside the tolerance listed
in this manual, the filter may need to
be changed.
2. Adjust the flow control valve to the
desired setting.
Install a new resistivity cartridge. If an
increase in resistivity does not occur,
flush out the thermal fluid system
(including lines to the tool), and fill with
new fluid.
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