MST FMK 9002, Руководство по эксплуатации

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FMK 9002 9002.0000.61.0E 05/04
page 11
Sensor Order Information
7. Sensor Order Information
The part number for the replacement sensor is written on the label of the depleted sensor cell. It is
recommended to state model, serial number, target gas and range of your FMK 9002 when ordering re-
placement sensors.
Contact MST for information on prices and delivery time.
Sensor for FMK 9002 Range Sensor Part No.
______________________________________________________________________
AsH3 Arsine.......................................0 - 1,00 ....ppm.......................9002-6000
B2H6 Diborane ..................................0 - 1,00 ....ppm.......................9012-6200
Br2 Bromine ...................................0 - 5,00 ....ppm.......................9012-6800
Cl2 Chlorine ...................................0 - 10,0 ....ppm.......................9012-5300
Cl2 Chlorine ...................................0 - 5,00 ....ppm.......................9012-5301
CO Carbon Monoxide ....................0 - 1000....ppm.......................9002-5400
COCl2 Phosgene.................................0 - 1,00 ....ppm.......................9012-6600
F2 Fluorine....................................0 - 5,00 ....ppm.......................9012-6400
GeH4 Germane..................................0 - 5,0 .....ppm.......................9012-6900
H2 Hydrogen .................................0 - 0,500 ..%...........................9012-5100
H2S Hydrogen Sulfide .....................0 - 100 .....ppm.......................9012-5200
HBr Hydrogen Bromide...................0 - 50 .......ppm.......................9012-7000
HCl Hydrogen Chloride...................0 - 50 .......ppm.......................9012-5800
HCN Hydrogen Cyanide ...................0 - 50 .......ppm.......................9002-5700
HF Hydrogen Fluoride ...................0 - 10,0 ....ppm.......................9012-6500
N2H4 Hydrazine.................................0 - 1,00 ....ppm.......................9002-7600
NH3 Ammonia..................................0 - 100 .....ppm.......................9012-6700
NO Nitric Oxide ..............................0 - 100 .....ppm.......................9012-7200
NO2 Nitrogen Dioxide ......................0 - 25,0 ....ppm.......................9012-7300
O2 Oxygen ....................................0 - 25,0.....%...........................9002-5500
O3 Ozone ......................................0 - 1,00 ....ppm.......................9002-7100
PH3 Phosphine................................0 - 1,00 ....ppm.......................9002-6100
SiH4 Silane.......................................0 - 50 .......ppm.......................9012-6300
SO2 Sulfur Dioxide ..........................0 - 25,0 ....ppm.......................9012-5900
SO2 Sulfur Dioxide .........................0 - 0,250 ..%...........................9012-5901
TEOS Tetraethyl Orthosilicate............0 - 100......ppm.......................9002-7500