MKS Vision 2000-C, Руководство пользователя

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MKS Instruments UK Ltd
V2000-C/E Hardware Manual – SP102005.102 March 2013
34
Removing the analyser
Before you can change the filaments or clean the ion source the quadrupole analyser must be removed from the
vacuum chamber. Before removing the analyser check that you have all the parts and tools ready for the
maintenance work. Also, have ready something to stand the analyser on. A small vice is useful for this.
The UniBloc
™
inlet valve fitted between the RGA chamber and the process chamber will allow the RGA chamber
to be vented to atmosphere without affecting the process chamber. We would recommend venting the RGA
chamber when the process chamber is not being run, just in case there is an unexpected accident or the inlet
valves have been contaminated and developed a small leak.
To remove and replace the analyser you will need:
¼” 12-point box-end wrench
One CF40 copper gasket
Shut down the Vision 2000C/E system as described on
Page 27 .

Make a note of the orientation of the analyser with respect to the vacuum chamber. This is most easily
done by making a mark on the vacuum chamber in line with the locking pip o
n the analyser’s
feedthrough housing. Relative to a turbopump orientation of 6 o’clock, the standard analyser alignment
pip orientation is at 9
o’clock.

Remove the six ¼” x 28 bolts.

Carefully withdraw the analyser from the vacuum chamber. Leave the old copper gasket in place until
you are ready to fit the new one, it will help protect the knife edge from accidental damage.

Replacing the filaments or ion-source along with cleaning methods are described in the Microvision2
User Manual.
Re-fitting the analyser

Note the gas inlet tube on the top of the analyser source. Look into the vacuum chamber and note the
ceramic socket that the gas inlet tube must mate with when you re-fit the analyser.

Clean, using a suitable solvent, and dry the new copper gasket then slip it over the analyser in place of
the old one.

Carefully, insert the analyser into the vacuum chamber trying not to let the leads touch the wall of the
vacuum chamber. Make sure the gasket does not slip out of its slot as you push the flanges together.
Make sure that the gas inlet tube on the top of the analyser mates with the ceramic socket. When
properly mated the analyser flange should be flush with that of the vacuum chamber. If the two flanges
are not parallel, the gas inlet tube is not in the ceramic socket.

Rotate the analyser flange so that it is in the correct orientation, as noted in the above steps.

Bolt the flanges together remembering to tighten opposite bolts equally.

Re-fit the Microvision2.