MKS Vision 2000-C, Руководство пользователя

Страница: 11 / 37

MKS Instruments UK Ltd
V2000-C/E Hardware Manual – SP102005.102 March 2013
11
Installation
System Overview
The Vision 2000-C/E is a self contained RGA system for sampling directly from a CVD or Etch process chamber.
It consists of five main parts:

The RGA vacuum chamber that bolts directly on to the process chamber.

The turbopump foreline isolation valve and gauge assembly (Surge Protector)

The equipment sub-rack.

The interconnecting cables.

The operating PC.
The RGA vacuum chamber contains the quadrupole residual gas analyser with a differentially pumped CVD ion-
source, a special MKS UniBloc
™ inlet sampling valve with integral pressure reduction orifices, process chamber
pressure gauge and a purged turbomolecular pump. This assembly is surrounded by a dual-zone electrically
heated jacket. The entire system is controlled via the rack-mounted RVC2 and the System Interface Module.
The standard V2000C/E turbopump foreline provision is connection to the foreline of the process tool itself. This
ensures that the small amounts of process gas that are sampled from the process chamber are returned to an
appropriate exhaust gas scrubber system. The Surge Protector assembly isolates the RGA turbopump foreline
from the tool foreline when the RGA system pump is off and when the tool foreline pressure is above 3 torr.
WARNING
The RGA system must never be operated without exhausting to a
hazardous gas scrubbing system that is appropriate for the process
gases it might sample!
In normal operation, sampled gas flow can be up to 0.06 sccm for 3-
valve inlets and up to 10 sccm for 4-valve inlets. In either case, the
exhaust gas will consist of any sampled process gas mixed with 6
sccm of turbopump purge gas (N2 or Ar).
A 19-inch sub-rack houses the Remote Vacuum Controller (RVC), the cables running between the sub rack and
the RGA vacuum chamber may be fitted into trunking (conduit) to give additional protection.
CAUTION
There are subtle differences among the various available
configurations of the Vision 2000-C/E systems.
There are small differences among Vision 2000-C/E systems. Variations are usually due to the type of process
tool to which the Vision 2000-C/E is to be fitted, the type of process to be monitored and the pressure regime
from which the system will be sampling.
The design variations are purely to give the user the best possible system to meet the needs of the application.
This manual covers all variations of Vision 2000-C/E. The shipment report will detail your particular system and
you should refer to this when the manual gives details of options. The most common variants are shown on the
next page.