MKS Vision 2000-C, Руководство пользователя

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MKS Instruments UK Ltd
V2000-C/E Hardware Manual – SP102005.102 March 2013
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CAUTION
Check the complete installation thoroughly before proceeding.
Start up
Set the Remote Vacuum Controller (RVC) “Interlocks” key switch to ON and the power switch to On (I)
On your PC, start Process Eye Professional. The software will detect that the RVC2 is fitted and the Remote
Vacuum Controller status and control panel will be available at the bottom of the Process Eye Professional
window.
To start the Vision 2000C/E vacuum system, click on the turbopump button.
The colour of the button indicates the status:
Red = off
Yellow = starting
Green = running at full speed
More information about the RVC operating software can be found in the manuals for the RVC2 and Process Eye
Professional.
The Vision 2000C/E may also be started from the RVC2 directly. This is useful if the PC is disconnected or the
Process Eye software is not running. To start the system from the RVC2, briefly press the PUMPS switch on the
front panel. Note that this control can also be used to turn the turbopump OFF.
As soon as the Vision 2000C/E is started the SurgeProtector foreline valve should open (if tool vacuum is <3torr)
and the turbopump will start.
The turbo pump controller will indicate when the pump is up to speed and the Turbopump indicator in the RVC
window will change from yellow to green. Note that the turbopump controller will be programmed to a set-point
of 95% of rated speed.
After the turbopump has reached full speed, you may switch the RGA filament on, but we recommend waiting at
least 10 minutes after the adsorbed gas load in the RGA vacuum chamber to reduce before switching a filament
on.
Switch the RGA filament on and look at the RGA chamber background spectrum using a Process Eye
Professional Bar-Chart recipe (refer to the Process Eye Professional documentation for further details).
The pressure is likely to be quite high but should be falling. If the pressure is very high switch the filament off and
wait a little while for the pressure to fall.
Now, check that the process valves work. Ensure that there is a good vacuum in the process chamber. The
pressure in the process chamber must be below the corresponding sample-valve pressure set-point to permit
you to open a sampling valve.
With the Remote Vacuum Controller in the manual mode and a filament on, open the process valve. The process
valve will open and you will be able to see a spectrum of the process chamber.
Once you have established that the process valve is working correctly, close the valve. Minimizing exposure to
corrosive process gases when not actively monitoring them will protect RGA system operating life.