MKS UniMag 971, Руководство по эксплуатации и установке, Страница: 9 / 44

971 UniMag ™ Operation manual 6
Do not use or install the 971 transducer where the following conditions occur:
- Temperatures lower than 0
o
C or higher than 40
o
C
- Corrosive or explosive gases
- Direct sunlight or other heat sources
- Magnetic fields
Process compatibility
The 971 transducer is intended for use in relatively clean environments.
If the 971 transducer is located close to a gas source connection like a flow controller or leak valve the
transducer pressure measurement can be higher than the actual chamber pressure. Location close to a
pumping system connection can cause a lower pressure measurement than actual chamber pressure.
The 971 transducer and its sensor design can be mounted in any
orientation without compromising accuracy.
Explosive Environments
The 971 should not be used in explosive environments, due to its high
voltage potential that can cause ignition.
Temperature
For best measuring performance avoid large temperature gradients and
direct cooling like air-condition air stream or direct heating like a pump
exhaust stream.
Bake out
The transducer electronics can withstand 85
o
C (185
o
F) when the power is turned off.
Contamination
Locate and orient the 971 where contamination is least likely.
 If the transducer is backfilled with a liquid (like pump oil) the sensor can be cleaned. Refer to
Service and Maintenance page 31.
Vacuum connections
The 971 transducer is available with different types of vacuum fittings. When mounting the transducer always
ensure that all vacuum sealing items and surfaces are clean, without damage and free of particles. Do not
touch the vacuum flange sealing surface.
If the transducer will be exposed to pressures above atmospheric pressure make sure that proper
vacuum fittings are used. Ensure that the internal system pressure is at ambient pressure
conditions before opening the vacuum system and removing any connections.
Pressure range
The standard 971 transducer is internally sealed with elastomer viton sealing for use down to 1×10
-8
Torr.
The 971 can be exposed to positive pressure up to 3000 Torr absolute.