MKS UniMag 971, Руководство по эксплуатации и установке, Страница: 25 / 44

971 UniMag ™ Operation manual 22
Analog output setup
The 971 can emulate analog voltage outputs from other vacuum transducers. The 971 analog output can be
assigned to the MicroPirani sensor measurement (PR1), Cold Cathode sensor measurement (PR2, PR5)
and the combined Cold cathode / MicroPirani reading (PR3). This is set by the first digit. The second and
third digit represents the analog output calibration.
The primary analog output provides 16 bit resolution.
 Due to curve form and limits, some of the alternative analog outputs will cause loss of
measuring range and accuracy. For best performance use the standard MKS analog
output. Change of analog output setup does not interfere on digital reading.
Change of analog output setup:
Command: @253AO1!15;FF
Command values: 10 to 319 (xy)
First digit (x) 1 = PR1 (Cold cathode pressure value assignment)
Second digit (y) 0 = MKS Standard (0.5 VDC/decade)
1 = Edwards APG-L (1.99 -10 VDC)
2 = Edwards APG100
3 = Edwards WRG
4 = Inficon PSG500 /Oerlikon/Leybold TTR91
5 = Inficon MPG400 / Pfeiffer PKR251
6 = Inficon BPG400 / MKS 999 Quattro
7 = Brooks / Granville Phillips GP275
8 = MKS Moducell 325
9 = MKS Moducell 325 (x3)
10 = MKS Baratron 0.1 Torr (0-10 VDC)
11 = MKS Baratron 1 Torr (0-10 VDC) / Hasting 2002OBE, Channel 2
12 = MKS Baratron 10 Torr (0-10 VDC)
13 = MKS Baratron 100 Torr (0-10 VDC)
14 = MKS Baratron 1000 Torr (0-10 VDC) / Hasting 2002OBE, Channel 1
15 = Piezo differential output
16 = Edwards AIM-S /-SL
17 = Edwards AIM-X / XL
18 = Pfeiffer IKR251
19 = Pfeiffer TPR 265
20 = OBE Channel 2
21 = Edwards DV6M
22 = Edwards APG-M
Command reply: @253ACK15;FF
Query: @253AO1?;FF
Query reply: @253ACK105;FF
Factory default: 30