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MKS Micro-Baratron 870B Скачать руководство пользователя страница 55

Chapter Five: Maintenance and Troubleshooting

General Information

45

Chapter Five: Maintenance and Troubleshooting

General Information

If the transducer fails to operate properly upon receipt, check for shipping damage, and check the
cables for correct continuity. Any damage should be reported to the carrier and MKS
Instruments immediately.

If there is no obvious damage and the cable continuity is correct, check your instrument using the
troubleshooting chart (refer to Table 15, page 47). If the transducer performance does not
improve and it is necessary to return the unit to MKS for service, obtain an ERA Number
(Equipment Return Authorization Number) from any MKS Calibration and Service center before
shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and
Service Centers.

Maintenance

In general, no maintenance is required other than proper installation and operation, and an
occasional zero adjustment. Periodically check for wear on the cables and inspect the enclosure
for visible signs of damage.

Zero Adjustment

The transducer zero can be set (or reset) by adjusting the

ZERO

potentiometer located on the

side of the unit or at the front panel of any MKS Power Supply/Readout being used. Refer to

How To Adjust the Zero

, page 43, for complete instructions on how to adjust the transducer zero.

Note

In production operations such as semiconductor manufacturing, verify the
transducer zero (and adjust if necessary) each time the equipment is shut
down for routine maintenance.

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Содержание Micro-Baratron 870B

Страница 1: ...Instruction Manual MKS Type 870B 872B Micro Baratron Absolute Pressure Transducer Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site...

Страница 2: ...urchaser shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distribut...

Страница 3: ...123655 P1 Rev B 06 01 MKS Type 870B 872B Micro Baratron Absolute Pressure Transducer...

Страница 4: ...l system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America Baratron is a registered trademark of MKS Instruments Inc Andover MA Bendix is a...

Страница 5: ...sducteur de pression 10 Symboles utilis s dans ce manuel d utilisation 10 Symboles apparaissant sur l unit 11 Mesures de s curit et pr cautions 12 Medidas de seguridad del transductor de presi n 14 S...

Страница 6: ...Leads 34 Bendix Connectors 35 Type D Connectors 36 Startup 38 Chapter Three Overview 39 General Information 39 Sensor 39 Signal Conditioner 39 Labels 40 Serial Number Label 40 Information Label 40 Ben...

Страница 7: ...Table of Contents v Performance Specifications 49 Electrical Specifications 49 Physical Specifications 50 Environmental Specifications 51 Appendix B Model Code Explanation 53 Model Code 53 Index 57...

Страница 8: ......

Страница 9: ...ype 872 Transducer 28 Figure 5 Electrical Scheme for a Voltage Unit 30 Figure 6 Line Resistance Equation 31 Figure 7 Total Resistance in Line 31 Figure 8 Electrical Scheme for a Current 4 to 20 mA Uni...

Страница 10: ......

Страница 11: ...lados en la unidad 15 Table 5 Power Requirements 22 Table 6 Interface Cables 24 Table 7 Connector Options 33 Table 8 Flying Lead Pinout Model Code F 34 Table 9 Flying Lead Pinout Model Code L 34 Table...

Страница 12: ...a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention...

Страница 13: ...arth ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC...

Страница 14: ...rvice must be made by qualified service personnel only USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety p...

Страница 15: ...urce install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit befor...

Страница 16: ...stand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger...

Страница 17: ...anschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg ng...

Страница 18: ...ng nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal...

Страница 19: ...eeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr auf...

Страница 20: ...ition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l...

Страница 21: ...masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu...

Страница 22: ...age doit tre uniquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise d...

Страница 23: ...r un disque d chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits...

Страница 24: ...ales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilida...

Страница 25: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente cont...

Страница 26: ...EBENSEREFECTUADAS NICAMENTEPORT CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o r...

Страница 27: ...hallar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de...

Страница 28: ......

Страница 29: ...with an optional attached connector located on top of the unit is either a DC voltage 0 to 10 V 0 to 5 V or mA current 4 to 20 mA For a direct readout of the pressure measurement a meter analog or di...

Страница 30: ...ance and Troubleshooting lists any maintenance required to keep the instrument in good working condition and provides a checklist for reference should the instrument malfunction Appendix A Product Spe...

Страница 31: ...S obtain an ERA Number Equipment Return Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and S...

Страница 32: ...the 870 872 unit is 0 to 50 C 32 to 122 F Power Requirements The 870 872 transducer requires a minimum power supply of 12 VDC and a maximum power supply of 36 VDC regulated to 5 The specific input po...

Страница 33: ...ntains high EMI RFI noise 2 To order metal braided shielded cables add an S after the cable type designation For example to order a standard connection cable to connect the 870 872 unit to a 146 unit...

Страница 34: ...ust one point may not suffice 4 For shielded cables with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute min...

Страница 35: ...1 through 4 pages 25 to 28 The length of each fitting is measured from mating face to mating face Note All dimensions are listed in inches with millimeters referenced in parentheses 2 40 60 8 1 12 dia...

Страница 36: ...w Model Code BF 0 1 33 33 9 0 82 20 8 1 4 Weld T Model Code BD 1 14 29 1 4 VCR Male Rotatable Model Code CB 1 2 Weld Stub Model Code BA 0 70 17 8 0 97 24 6 1 4 Weld Stub Model Code BB 0 93 23 6 0 66 1...

Страница 37: ...27 2 40 60 8 1 12 dia 28 3 Zero Pot 1 4 Weld Stub Model Code BE 9 Braided Shielded Cable shown with 9 Pin Type D Connector 0 51 13 1 1 85 47 1 20 dia 30 4 2 44 61 9 NEMA 4 Enclosure Figure 3 Dimensio...

Страница 38: ...l Code CH 0 51 13 1 3 045 77 34 4 VCR Female Model Code CM 0 51 13 1 4 VCR Female Model Code CJ 2 95 7 49 0 51 13 1 1 4 Weld Stub Model Code BB 2 045 51 94 0 81 20 5 0 75 19 1 Z Seal Model Code MB 1 4...

Страница 39: ...line to a system you should follow certified welding practices such as those published by the American Welding Society AWS or the American Society of Mechanical Engineers ASME Warning Improper welding...

Страница 40: ...Refer to Figure 5 for the power signal and chassis grounding scheme for a voltage unit Note The ground of any external power supply and readout should be the same as the transducer ground chassis grou...

Страница 41: ...by RLN ohms Excitation Supply Volts 13 x 103 24 Figure 6 Line Resistance Equation For example RLN should not exceed 450 ohms for a 24 Volt supply 0 200 400 600 800 1000 1200 Voltage Resistance 13 18...

Страница 42: ...erably out of calibration it may take more than one calibration cycle to accurately complete the zero adjustment Voltage Readout Power Supply Return Excitation 13 to 36 V R sampling resistor LN Sensor...

Страница 43: ...ector Cable Length Description Flying Lead 6 1 8 m Green power white return Flying Lead 10 3 m Red power black return Bendix 4 Pin PTO male 9 225 mm 4 to 20 mA on pins A D voltage outputs on pins B C...

Страница 44: ...6 1 8 m cable Flying Lead Pinout Model Code F Color Voltage Signal Current Signal Red Pressure Output Do Not Use Black Pressure Return Do Not Use White Power Return 4 to 20 mA negative excitation Gree...

Страница 45: ...ble 10 lists the pinout for the Bendix 4 pin PTO male connector Model Code D Bendix Connector Pinout Model Code D Pin Voltage Signal Current Signal A Power Input 4 to 20 mA positive excitation B Press...

Страница 46: ...iew End View 9 Pin Standard Type D Connector Figure 11 9 Pin Standard Type D Connector Table 12 lists the pinout for the 9 pin standard Type D connector 9 Pin Standard Type D Connector Pinout Pin Volt...

Страница 47: ...13 lists the pinout for the 15 pin high density Type D connector 15 Pin High Density Type D Connector Pinout Pin Voltage Signal Current Signal 1 Reserved Reserved 2 Pressure Output Reserved 3 Reserve...

Страница 48: ...o warm up until it is stabilized then check the transducer zero to verify the proper output Refer to How To Adjust the Zero page 43 for complete instructions on adjusting the ZERO potentiometer Note T...

Страница 49: ...e diaphragm on the flow through version is positioned above the gas stream The diaphragm in either configuration deflects with changing absolute pressure force per unit area independently of the gas t...

Страница 50: ...der the unit Refer to Appendix B Model Code Explanation page 53 for more information Information Label This label lists the maximum ambient temperature for the transducer and calls out the location of...

Страница 51: ...lead To prevent possible sparking never disconnect the Bendix connector while the circuit is live unless the area is known to be non hazardous Refer to Bendix Connectors page 35 for more information...

Страница 52: ...Labels Chapter Three Overview 42 This page intentionally left blank...

Страница 53: ...ing used To achieve the full dynamic range specified for the transducer the zero adjustment must be made at a pressure one decade lower than the transducer s minimum resolution 0 001 of FS Zeroing a t...

Страница 54: ...efer to Table 14 for the highest recommended pressure levels for proper zero adjustment Highest Pressures Suggested for Proper Zero Adjustment Full Scale Range Highest Pressure for Proper Zero Adjustm...

Страница 55: ...any MKS Calibration and Service center before shipping Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers Maintenance In general no maintenance is r...

Страница 56: ...ansducer will not Zero or Span Broken Ground connection between the PWA and the Sensor Element Remove the enclosure and inspect the three soldered connections where the PWA is mounted to the chassis O...

Страница 57: ...d return to MKS factory for repair Unstable output at zero pressure Excessive ambient temperature or ambient temp is varying over a very wide range Measure the ambient temperature and assure that it i...

Страница 58: ...Troubleshooting Chapter Five Maintenance and Troubleshooting 48 This page intentionally left blank...

Страница 59: ...0 04 of Reading C Electrical Specifications CE Compliance1 EMC Directive 89 336 EEC Input Power Requirement 0 to 5 V Output 0 to 10 V Output Two wire 4 to 20 mA Output 12 VDC minimum to 36 VDC maximum...

Страница 60: ...nfigurations at the end of a 9 flying lead 9 Pin standard or 15 pin high density male Type D at the end of a 9 flying lead Fittings Type 870 Type 872 Tube Stub Weld Stub Swagelok 4 VCR male rotatable...

Страница 61: ...s Located on the side of the unit 45 from flow direction Environmental Specifications Environmental Options Standard unit indoor use NEMA 4 compliant unit outdoor use weather resistant Operating Humid...

Страница 62: ...Environmental Specifications Appendix A Product Specifications 52 This page intentionally left blank...

Страница 63: ...ollows XXX YY W G Z E where Type Number Fittings Accuracy YY G Full Scale Range XXX Power Connectors W Z Environmental Options E Type Number The type number designates the model number of the instrume...

Страница 64: ...de Type 870 Single Ended Design Tube Stub BA Weld Stub BB Swagelok 4 VCR male rotatable CB 4 VCR female CD Butt Welded T 0 876 face to face on the flow through part of the T BD Type 872 Flow Through D...

Страница 65: ...onnectors are available indicated by a single letter code Connector Ordering Code Flying Lead with 6 1 8 m Cable White power green return F Flying Lead with 10 3 m Cable Red power black return L Bendi...

Страница 66: ...Model Code Appendix B Model Code Explanation 56 This page intentionally left blank...

Страница 67: ...information 30 32 55 Enclosure 19 55 F Full scale range 50 54 I Input power 22 Introduction 19 L Labels nonincendive device 40 serial number 40 warning 41 Line resistance 31 M Manual organization 20 M...

Страница 68: ...label 40 Signal conditioner 39 Startup pressures for proper zero adjustment 44 zero adjustment 37 38 T Temperature operating 22 51 Troubleshooting 47 U Ultraclean processing 19 21 W Warning label Bend...

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