MKS HPS 947 Series, Руководство по эксплуатации и обслуживанию, Страница: 6 / 40

HPS
®
Products Series 947 CEP System
Leak Detection ............................................................................ 19
Using the Series 947 CEP System with Other Gases ............. 22
Nitrogen Equivalent Pressure ..................................................... 22
Calibrating for Other Gases ........................................................ 23
Maintaining the Series 947 CEP System ................................ 24
Troubleshooting and Service ...................................................... 24
Cleaning the Series 947 CEP Controller Front Panel ................. 24
Cleaning the CEP Sensor ........................................................... 25
Testing the CEP Sensor ............................................................. 25
Preparing for Bakeout ................................................................. 26
Accessories ............................................................................. 27
Product Warranty ..................................................................... 29
Notes ....................................................................................... 30
Appendix A: How the Series 947 CEP System Works .......... A.1
Theory of a Thermal Conductivity Sensor ................................. A.1
Measurement Limits ................................................................... A.1
The Series 947 CEP System Design Overview ........................ A.2
Bridge Amplifier ....................................................................... A.2
Output ..................................................................................... A.2
Set Point Relays ..................................................................... A.2
Comparator ............................................................................. A.2