MKS HPS 947 Series, Руководство по эксплуатации и обслуживанию, Страница: 17 / 40

11
HPS
®
Products Series 947 CEP System
Installing the
Series 947 CEP System
CEP Sensor Installation
Location
Locate the CEP Sensor where it can measure chamber or manifold pressure.
Install it away from pumps and gas sources and where vibration is minimal to
give the most representative values.
Orientation
The CEP Sensor can only be installed horizontally to work effectively in the
convection region. Convection is an effective heat transfer process at
pressures above 200 Torr of nitrogen. Install it in the direction indicated on
the body of the Sensor.
The Sensor is factory calibrated with the vacuum port facing down. At
atmosphere, the calibration may shift as much as 10% if the port is oriented
otherwise. If it is necessary to do so, you should make a calibration
adjustment (see Calibrating for Zero and Atmosphere, p.18).
Contamination
Locate and orient the CEP Sensor where contamination is least likely. For
example, if the Sensor is installed directly above a roughing pump, oil vapor
could contaminate the tube's filament wire and cause the calibration to shift.
Install the Sensor with the vacuum port facing down whenever possible to
prevent particulates falling or liquids flowing into it. Using a screen or porous
filter at the port is helpful. Try an HPS
® seal and centering ring assembly with
a screen (see Accessories, p. 26).
Vacuum Connection
Standard vacuum interfaces for the CEP Sensor include:
KF 16 flange 1 1 /
3
" CF flange
KF 25 flange 2 ¾" CF flange
8 VCR
®
-F (½") fitting Ø 15 mm x 30 mm tubing
1
/
8
" NPT-M fitting Ø 18 mm x 30 mm tubing
with ½" compression seal
To fit the KF 16 port to a KF 10 port, use an HPS ® adaptive centering ring
(see Accessories, p.26).